1/10/2011	2:08:30 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/10/2011	2:08:31 AM	Recipe started at 2:08 AM
1/10/2011	2:08:31 AM	H2 valve closed
1/10/2011	2:08:31 AM	BCl3 valve closed
1/10/2011	2:08:31 AM	PH3 valve closed
1/10/2011	2:08:31 AM	SiCl4 pre valve closed
1/10/2011	2:08:31 AM	SiCl4 post valve closed
1/10/2011	2:08:31 AM	Main Vac valve closed
1/10/2011	2:08:31 AM	Bypass valve closed
1/10/2011	2:08:31 AM	Bubbler valve closed
1/10/2011	2:08:31 AM	Helium valve opened
1/10/2011	2:08:31 AM	Helium MFC set to  500.000000
1/10/2011	2:08:31 AM	H2 MFC set to  0.000000
1/10/2011	2:08:31 AM	BCl3 MFC set to  0.000000
1/10/2011	2:08:31 AM	PHl3 MFC set to  0.000000
1/10/2011	2:08:31 AM	SiCl4 MFC set to  0.000000
1/10/2011	2:08:31 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	2:08:31 AM	Tube furnace set to 0
1/10/2011	2:09:52 AM	Helium valve closed
1/10/2011	2:09:52 AM	H2 valve closed
1/10/2011	2:09:52 AM	BCl3 valve closed
1/10/2011	2:09:52 AM	PH3 valve closed
1/10/2011	2:09:52 AM	SiCl4 pre valve closed
1/10/2011	2:09:52 AM	SiCl4 post valve closed
1/10/2011	2:09:52 AM	Main Vac valve closed
1/10/2011	2:09:52 AM	Bypass valve closed
1/10/2011	2:09:52 AM	Bubbler valve closed
1/10/2011	2:09:52 AM	Helium MFC set to  0.000000
1/10/2011	2:09:52 AM	H2 MFC set to  0.000000
1/10/2011	2:09:52 AM	BCl3 MFC set to  0.000000
1/10/2011	2:09:52 AM	PHl3 MFC set to  0.000000
1/10/2011	2:09:52 AM	SiCl4 MFC set to  0.000000
1/10/2011	2:09:52 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	2:09:52 AM	Tube furnace set to 0
1/10/2011	2:09:53 AM	Run finished at 2:09 AM
1/10/2011	2:09:53 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/10/2011	2:17:32 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/10/2011	2:17:33 AM	Recipe started at 2:17 AM
1/10/2011	2:17:33 AM	Helium valve closed
1/10/2011	2:17:33 AM	H2 valve closed
1/10/2011	2:17:33 AM	BCl3 valve closed
1/10/2011	2:17:33 AM	PH3 valve closed
1/10/2011	2:17:33 AM	SiCl4 pre valve closed
1/10/2011	2:17:33 AM	SiCl4 post valve closed
1/10/2011	2:17:33 AM	Main Vac valve closed
1/10/2011	2:17:33 AM	Bubbler valve closed
1/10/2011	2:17:33 AM	Bypass valve opened
1/10/2011	2:17:33 AM	Helium MFC set to  0.000000
1/10/2011	2:17:33 AM	H2 MFC set to  0.000000
1/10/2011	2:17:33 AM	BCl3 MFC set to  0.000000
1/10/2011	2:17:33 AM	PHl3 MFC set to  0.000000
1/10/2011	2:17:33 AM	SiCl4 MFC set to  0.000000
1/10/2011	2:17:33 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	2:17:33 AM	Tube furnace set to 0
1/10/2011	2:18:33 AM	Helium valve closed
1/10/2011	2:18:34 AM	H2 valve closed
1/10/2011	2:18:34 AM	BCl3 valve closed
1/10/2011	2:18:34 AM	PH3 valve closed
1/10/2011	2:18:34 AM	SiCl4 pre valve closed
1/10/2011	2:18:34 AM	SiCl4 post valve closed
1/10/2011	2:18:34 AM	Bubbler valve closed
1/10/2011	2:18:34 AM	Main Vac valve opened
1/10/2011	2:18:34 AM	Bypass valve opened
1/10/2011	2:18:34 AM	Helium MFC set to  0.000000
1/10/2011	2:18:34 AM	H2 MFC set to  0.000000
1/10/2011	2:18:34 AM	BCl3 MFC set to  0.000000
1/10/2011	2:18:34 AM	PHl3 MFC set to  0.000000
1/10/2011	2:18:34 AM	SiCl4 MFC set to  0.000000
1/10/2011	2:18:34 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	2:18:34 AM	Tube furnace set to 0
1/10/2011	2:18:34 AM	Run finished at 2:18 AM
1/10/2011	2:18:34 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/10/2011	2:21:17 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/10/2011	2:21:29 AM	Recipe started at 2:21 AM
1/10/2011	2:21:29 AM	Helium valve closed
1/10/2011	2:21:29 AM	H2 valve closed
1/10/2011	2:21:29 AM	BCl3 valve closed
1/10/2011	2:21:29 AM	PH3 valve closed
1/10/2011	2:21:29 AM	SiCl4 pre valve closed
1/10/2011	2:21:29 AM	SiCl4 post valve closed
1/10/2011	2:21:29 AM	Main Vac valve closed
1/10/2011	2:21:29 AM	Bubbler valve closed
1/10/2011	2:21:29 AM	Bypass valve opened
1/10/2011	2:21:29 AM	Helium MFC set to  0.000000
1/10/2011	2:21:29 AM	H2 MFC set to  0.000000
1/10/2011	2:21:29 AM	BCl3 MFC set to  0.000000
1/10/2011	2:21:29 AM	PHl3 MFC set to  0.000000
1/10/2011	2:21:29 AM	SiCl4 MFC set to  0.000000
1/10/2011	2:21:29 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	2:21:29 AM	Tube furnace set to 0
1/10/2011	2:21:30 AM	Helium valve closed
1/10/2011	2:21:30 AM	H2 valve closed
1/10/2011	2:21:30 AM	BCl3 valve closed
1/10/2011	2:21:30 AM	PH3 valve closed
1/10/2011	2:21:30 AM	SiCl4 pre valve closed
1/10/2011	2:21:30 AM	SiCl4 post valve closed
1/10/2011	2:21:30 AM	Bubbler valve closed
1/10/2011	2:21:30 AM	Main Vac valve opened
1/10/2011	2:21:30 AM	Bypass valve opened
1/10/2011	2:21:30 AM	Helium MFC set to  0.000000
1/10/2011	2:21:30 AM	H2 MFC set to  0.000000
1/10/2011	2:21:30 AM	BCl3 MFC set to  0.000000
1/10/2011	2:21:30 AM	PHl3 MFC set to  0.000000
1/10/2011	2:21:30 AM	SiCl4 MFC set to  0.000000
1/10/2011	2:21:30 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	2:21:30 AM	Tube furnace set to 0
1/10/2011	2:22:30 AM	H2 valve closed
1/10/2011	2:22:30 AM	BCl3 valve closed
1/10/2011	2:22:30 AM	PH3 valve closed
1/10/2011	2:22:30 AM	SiCl4 pre valve closed
1/10/2011	2:22:30 AM	SiCl4 post valve closed
1/10/2011	2:22:30 AM	Bubbler valve closed
1/10/2011	2:22:30 AM	Helium valve opened
1/10/2011	2:22:30 AM	Main Vac valve opened
1/10/2011	2:22:30 AM	Bypass valve opened
1/10/2011	2:22:30 AM	Helium MFC set to  100.000000
1/10/2011	2:22:30 AM	H2 MFC set to  0.000000
1/10/2011	2:22:30 AM	BCl3 MFC set to  0.000000
1/10/2011	2:22:30 AM	PHl3 MFC set to  0.000000
1/10/2011	2:22:30 AM	SiCl4 MFC set to  0.000000
1/10/2011	2:22:30 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	2:22:30 AM	Tube furnace set to 0
1/10/2011	2:23:30 AM	Helium valve closed
1/10/2011	2:23:30 AM	H2 valve closed
1/10/2011	2:23:30 AM	BCl3 valve closed
1/10/2011	2:23:30 AM	PH3 valve closed
1/10/2011	2:23:30 AM	SiCl4 pre valve closed
1/10/2011	2:23:30 AM	SiCl4 post valve closed
1/10/2011	2:23:30 AM	Bubbler valve closed
1/10/2011	2:23:30 AM	Main Vac valve opened
1/10/2011	2:23:30 AM	Bypass valve opened
1/10/2011	2:23:30 AM	Helium MFC set to  0.000000
1/10/2011	2:23:30 AM	H2 MFC set to  0.000000
1/10/2011	2:23:30 AM	BCl3 MFC set to  0.000000
1/10/2011	2:23:30 AM	PHl3 MFC set to  0.000000
1/10/2011	2:23:30 AM	SiCl4 MFC set to  0.000000
1/10/2011	2:23:30 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	2:23:30 AM	Tube furnace set to 0
1/10/2011	2:24:30 AM	H2 valve closed
1/10/2011	2:24:30 AM	BCl3 valve closed
1/10/2011	2:24:30 AM	PH3 valve closed
1/10/2011	2:24:30 AM	SiCl4 pre valve closed
1/10/2011	2:24:30 AM	SiCl4 post valve closed
1/10/2011	2:24:30 AM	Bubbler valve closed
1/10/2011	2:24:30 AM	Helium valve opened
1/10/2011	2:24:30 AM	Main Vac valve opened
1/10/2011	2:24:30 AM	Bypass valve opened
1/10/2011	2:24:30 AM	Helium MFC set to  100.000000
1/10/2011	2:24:30 AM	H2 MFC set to  0.000000
1/10/2011	2:24:30 AM	BCl3 MFC set to  0.000000
1/10/2011	2:24:30 AM	PHl3 MFC set to  0.000000
1/10/2011	2:24:30 AM	SiCl4 MFC set to  0.000000
1/10/2011	2:24:30 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	2:24:30 AM	Tube furnace set to 0
1/10/2011	2:25:19 AM	Run aborted at 2:25 AM
1/10/2011	2:25:19 AM	Helium valve closed
1/10/2011	2:25:19 AM	H2 valve closed
1/10/2011	2:25:19 AM	BCl3 valve closed
1/10/2011	2:25:19 AM	PH3 valve closed
1/10/2011	2:25:19 AM	SiCl4 pre valve closed
1/10/2011	2:25:19 AM	SiCl4 post valve closed
1/10/2011	2:25:19 AM	Bypass valve closed
1/10/2011	2:25:19 AM	Main Vac valve closed
1/10/2011	2:25:19 AM	Bubbler valve closed
1/10/2011	2:25:19 AM	Helium MFC set to  0.000000
1/10/2011	2:25:19 AM	H2 MFC set to  0.000000
1/10/2011	2:25:19 AM	BCl3 MFC set to  0.000000
1/10/2011	2:25:19 AM	PHl3 MFC set to  0.000000
1/10/2011	2:25:19 AM	SiCl4 MFC set to  0.000000
1/10/2011	2:25:19 AM	Tube furnace set to 0
1/10/2011	2:25:19 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/10/2011	2:25:23 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/10/2011	2:25:23 AM	Recipe started at 2:25 AM
1/10/2011	2:25:24 AM	Helium valve closed
1/10/2011	2:25:24 AM	H2 valve closed
1/10/2011	2:25:24 AM	BCl3 valve closed
1/10/2011	2:25:24 AM	PH3 valve closed
1/10/2011	2:25:24 AM	SiCl4 pre valve closed
1/10/2011	2:25:24 AM	SiCl4 post valve closed
1/10/2011	2:25:24 AM	Main Vac valve closed
1/10/2011	2:25:24 AM	Bubbler valve closed
1/10/2011	2:25:24 AM	Bypass valve opened
1/10/2011	2:25:24 AM	Helium MFC set to  0.000000
1/10/2011	2:25:24 AM	H2 MFC set to  0.000000
1/10/2011	2:25:24 AM	BCl3 MFC set to  0.000000
1/10/2011	2:25:24 AM	PHl3 MFC set to  0.000000
1/10/2011	2:25:24 AM	SiCl4 MFC set to  0.000000
1/10/2011	2:25:24 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	2:25:24 AM	Tube furnace set to 0
1/10/2011	2:25:24 AM	Helium valve closed
1/10/2011	2:25:24 AM	H2 valve closed
1/10/2011	2:25:24 AM	BCl3 valve closed
1/10/2011	2:25:24 AM	PH3 valve closed
1/10/2011	2:25:24 AM	SiCl4 pre valve closed
1/10/2011	2:25:24 AM	SiCl4 post valve closed
1/10/2011	2:25:24 AM	Bubbler valve closed
1/10/2011	2:25:24 AM	Main Vac valve opened
1/10/2011	2:25:24 AM	Bypass valve opened
1/10/2011	2:25:24 AM	Helium MFC set to  0.000000
1/10/2011	2:25:24 AM	H2 MFC set to  0.000000
1/10/2011	2:25:24 AM	BCl3 MFC set to  0.000000
1/10/2011	2:25:24 AM	PHl3 MFC set to  0.000000
1/10/2011	2:25:24 AM	SiCl4 MFC set to  0.000000
1/10/2011	2:25:24 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	2:25:24 AM	Tube furnace set to 0
1/10/2011	2:25:24 AM	Run finished at 2:25 AM
1/10/2011	2:25:24 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/10/2011	2:25:31 AM	Tube furnace set to 60
1/10/2011	2:27:54 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/10/2011	2:28:06 AM	Recipe started at 2:28 AM
1/10/2011	2:28:06 AM	Helium valve closed
1/10/2011	2:28:06 AM	H2 valve closed
1/10/2011	2:28:06 AM	BCl3 valve closed
1/10/2011	2:28:06 AM	PH3 valve closed
1/10/2011	2:28:06 AM	SiCl4 pre valve closed
1/10/2011	2:28:06 AM	SiCl4 post valve closed
1/10/2011	2:28:06 AM	Main Vac valve closed
1/10/2011	2:28:06 AM	Bubbler valve closed
1/10/2011	2:28:06 AM	Bypass valve opened
1/10/2011	2:28:06 AM	Helium MFC set to  0.000000
1/10/2011	2:28:06 AM	H2 MFC set to  0.000000
1/10/2011	2:28:06 AM	BCl3 MFC set to  0.000000
1/10/2011	2:28:06 AM	PHl3 MFC set to  0.000000
1/10/2011	2:28:06 AM	SiCl4 MFC set to  0.000000
1/10/2011	2:28:06 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	2:28:06 AM	Tube furnace set to 0
1/10/2011	2:28:06 AM	Helium valve closed
1/10/2011	2:28:06 AM	H2 valve closed
1/10/2011	2:28:06 AM	BCl3 valve closed
1/10/2011	2:28:06 AM	PH3 valve closed
1/10/2011	2:28:06 AM	SiCl4 pre valve closed
1/10/2011	2:28:06 AM	SiCl4 post valve closed
1/10/2011	2:28:06 AM	Bubbler valve closed
1/10/2011	2:28:06 AM	Main Vac valve opened
1/10/2011	2:28:06 AM	Bypass valve opened
1/10/2011	2:28:06 AM	Helium MFC set to  0.000000
1/10/2011	2:28:06 AM	H2 MFC set to  0.000000
1/10/2011	2:28:06 AM	BCl3 MFC set to  0.000000
1/10/2011	2:28:06 AM	PHl3 MFC set to  0.000000
1/10/2011	2:28:06 AM	SiCl4 MFC set to  0.000000
1/10/2011	2:28:06 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	2:28:07 AM	Tube furnace set to 0
1/10/2011	2:29:07 AM	H2 valve closed
1/10/2011	2:29:07 AM	BCl3 valve closed
1/10/2011	2:29:07 AM	PH3 valve closed
1/10/2011	2:29:07 AM	SiCl4 pre valve closed
1/10/2011	2:29:07 AM	SiCl4 post valve closed
1/10/2011	2:29:07 AM	Bubbler valve closed
1/10/2011	2:29:07 AM	Helium valve opened
1/10/2011	2:29:07 AM	Main Vac valve opened
1/10/2011	2:29:07 AM	Bypass valve opened
1/10/2011	2:29:07 AM	Helium MFC set to  100.000000
1/10/2011	2:29:07 AM	H2 MFC set to  0.000000
1/10/2011	2:29:07 AM	BCl3 MFC set to  0.000000
1/10/2011	2:29:07 AM	PHl3 MFC set to  0.000000
1/10/2011	2:29:07 AM	SiCl4 MFC set to  0.000000
1/10/2011	2:29:07 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	2:29:07 AM	Tube furnace set to 0
1/10/2011	2:30:07 AM	Helium valve closed
1/10/2011	2:30:07 AM	H2 valve closed
1/10/2011	2:30:07 AM	BCl3 valve closed
1/10/2011	2:30:07 AM	PH3 valve closed
1/10/2011	2:30:07 AM	SiCl4 pre valve closed
1/10/2011	2:30:07 AM	SiCl4 post valve closed
1/10/2011	2:30:07 AM	Bubbler valve closed
1/10/2011	2:30:07 AM	Main Vac valve opened
1/10/2011	2:30:07 AM	Bypass valve opened
1/10/2011	2:30:07 AM	Helium MFC set to  0.000000
1/10/2011	2:30:07 AM	H2 MFC set to  0.000000
1/10/2011	2:30:07 AM	BCl3 MFC set to  0.000000
1/10/2011	2:30:07 AM	PHl3 MFC set to  0.000000
1/10/2011	2:30:07 AM	SiCl4 MFC set to  0.000000
1/10/2011	2:30:07 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	2:30:07 AM	Tube furnace set to 0
1/10/2011	2:31:07 AM	H2 valve closed
1/10/2011	2:31:07 AM	BCl3 valve closed
1/10/2011	2:31:07 AM	PH3 valve closed
1/10/2011	2:31:07 AM	SiCl4 pre valve closed
1/10/2011	2:31:07 AM	SiCl4 post valve closed
1/10/2011	2:31:07 AM	Bubbler valve closed
1/10/2011	2:31:07 AM	Helium valve opened
1/10/2011	2:31:07 AM	Main Vac valve opened
1/10/2011	2:31:07 AM	Bypass valve opened
1/10/2011	2:31:07 AM	Helium MFC set to  100.000000
1/10/2011	2:31:07 AM	H2 MFC set to  0.000000
1/10/2011	2:31:07 AM	BCl3 MFC set to  0.000000
1/10/2011	2:31:07 AM	PHl3 MFC set to  0.000000
1/10/2011	2:31:07 AM	SiCl4 MFC set to  0.000000
1/10/2011	2:31:07 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	2:31:07 AM	Tube furnace set to 0
1/10/2011	2:31:35 AM	Run aborted at 2:31 AM
1/10/2011	2:31:35 AM	Helium valve closed
1/10/2011	2:31:35 AM	H2 valve closed
1/10/2011	2:31:35 AM	BCl3 valve closed
1/10/2011	2:31:35 AM	PH3 valve closed
1/10/2011	2:31:35 AM	SiCl4 pre valve closed
1/10/2011	2:31:35 AM	SiCl4 post valve closed
1/10/2011	2:31:35 AM	Bypass valve closed
1/10/2011	2:31:35 AM	Main Vac valve closed
1/10/2011	2:31:35 AM	Bubbler valve closed
1/10/2011	2:31:35 AM	Helium MFC set to  0.000000
1/10/2011	2:31:35 AM	H2 MFC set to  0.000000
1/10/2011	2:31:35 AM	BCl3 MFC set to  0.000000
1/10/2011	2:31:35 AM	PHl3 MFC set to  0.000000
1/10/2011	2:31:35 AM	SiCl4 MFC set to  0.000000
1/10/2011	2:31:35 AM	Tube furnace set to 0
1/10/2011	2:31:35 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/10/2011	2:31:37 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/10/2011	2:31:38 AM	Recipe started at 2:31 AM
1/10/2011	2:31:38 AM	Helium valve closed
1/10/2011	2:31:38 AM	H2 valve closed
1/10/2011	2:31:38 AM	BCl3 valve closed
1/10/2011	2:31:38 AM	PH3 valve closed
1/10/2011	2:31:38 AM	SiCl4 pre valve closed
1/10/2011	2:31:38 AM	SiCl4 post valve closed
1/10/2011	2:31:38 AM	Main Vac valve closed
1/10/2011	2:31:38 AM	Bubbler valve closed
1/10/2011	2:31:38 AM	Bypass valve opened
1/10/2011	2:31:38 AM	Helium MFC set to  0.000000
1/10/2011	2:31:38 AM	H2 MFC set to  0.000000
1/10/2011	2:31:38 AM	BCl3 MFC set to  0.000000
1/10/2011	2:31:38 AM	PHl3 MFC set to  0.000000
1/10/2011	2:31:38 AM	SiCl4 MFC set to  0.000000
1/10/2011	2:31:38 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	2:31:38 AM	Tube furnace set to 0
1/10/2011	2:31:38 AM	Helium valve closed
1/10/2011	2:31:38 AM	H2 valve closed
1/10/2011	2:31:38 AM	BCl3 valve closed
1/10/2011	2:31:38 AM	PH3 valve closed
1/10/2011	2:31:38 AM	SiCl4 pre valve closed
1/10/2011	2:31:38 AM	SiCl4 post valve closed
1/10/2011	2:31:38 AM	Bubbler valve closed
1/10/2011	2:31:38 AM	Main Vac valve opened
1/10/2011	2:31:38 AM	Bypass valve opened
1/10/2011	2:31:38 AM	Helium MFC set to  0.000000
1/10/2011	2:31:38 AM	H2 MFC set to  0.000000
1/10/2011	2:31:38 AM	BCl3 MFC set to  0.000000
1/10/2011	2:31:38 AM	PHl3 MFC set to  0.000000
1/10/2011	2:31:38 AM	SiCl4 MFC set to  0.000000
1/10/2011	2:31:38 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	2:31:38 AM	Tube furnace set to 0
1/10/2011	2:31:39 AM	Run finished at 2:31 AM
1/10/2011	2:31:39 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/10/2011	2:31:44 AM	Tube furnace set to 80
1/10/2011	2:34:29 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/10/2011	2:34:42 AM	Recipe started at 2:34 AM
1/10/2011	2:34:42 AM	Helium valve closed
1/10/2011	2:34:42 AM	H2 valve closed
1/10/2011	2:34:42 AM	BCl3 valve closed
1/10/2011	2:34:42 AM	PH3 valve closed
1/10/2011	2:34:42 AM	SiCl4 pre valve closed
1/10/2011	2:34:42 AM	SiCl4 post valve closed
1/10/2011	2:34:42 AM	Main Vac valve closed
1/10/2011	2:34:42 AM	Bubbler valve closed
1/10/2011	2:34:42 AM	Bypass valve opened
1/10/2011	2:34:42 AM	Helium MFC set to  0.000000
1/10/2011	2:34:42 AM	H2 MFC set to  0.000000
1/10/2011	2:34:42 AM	BCl3 MFC set to  0.000000
1/10/2011	2:34:42 AM	PHl3 MFC set to  0.000000
1/10/2011	2:34:42 AM	SiCl4 MFC set to  0.000000
1/10/2011	2:34:42 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	2:34:42 AM	Tube furnace set to 0
1/10/2011	2:34:42 AM	Helium valve closed
1/10/2011	2:34:42 AM	H2 valve closed
1/10/2011	2:34:42 AM	BCl3 valve closed
1/10/2011	2:34:42 AM	PH3 valve closed
1/10/2011	2:34:42 AM	SiCl4 pre valve closed
1/10/2011	2:34:42 AM	SiCl4 post valve closed
1/10/2011	2:34:42 AM	Bubbler valve closed
1/10/2011	2:34:42 AM	Main Vac valve opened
1/10/2011	2:34:42 AM	Bypass valve opened
1/10/2011	2:34:42 AM	Helium MFC set to  0.000000
1/10/2011	2:34:42 AM	H2 MFC set to  0.000000
1/10/2011	2:34:42 AM	BCl3 MFC set to  0.000000
1/10/2011	2:34:42 AM	PHl3 MFC set to  0.000000
1/10/2011	2:34:42 AM	SiCl4 MFC set to  0.000000
1/10/2011	2:34:42 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	2:34:42 AM	Tube furnace set to 0
1/10/2011	2:35:42 AM	H2 valve closed
1/10/2011	2:35:42 AM	BCl3 valve closed
1/10/2011	2:35:42 AM	PH3 valve closed
1/10/2011	2:35:42 AM	SiCl4 pre valve closed
1/10/2011	2:35:42 AM	SiCl4 post valve closed
1/10/2011	2:35:42 AM	Bubbler valve closed
1/10/2011	2:35:42 AM	Helium valve opened
1/10/2011	2:35:42 AM	Main Vac valve opened
1/10/2011	2:35:42 AM	Bypass valve opened
1/10/2011	2:35:42 AM	Helium MFC set to  100.000000
1/10/2011	2:35:42 AM	H2 MFC set to  0.000000
1/10/2011	2:35:42 AM	BCl3 MFC set to  0.000000
1/10/2011	2:35:42 AM	PHl3 MFC set to  0.000000
1/10/2011	2:35:42 AM	SiCl4 MFC set to  0.000000
1/10/2011	2:35:42 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	2:35:42 AM	Tube furnace set to 0
1/10/2011	2:36:42 AM	Helium valve closed
1/10/2011	2:36:42 AM	H2 valve closed
1/10/2011	2:36:42 AM	BCl3 valve closed
1/10/2011	2:36:42 AM	PH3 valve closed
1/10/2011	2:36:42 AM	SiCl4 pre valve closed
1/10/2011	2:36:42 AM	SiCl4 post valve closed
1/10/2011	2:36:42 AM	Bubbler valve closed
1/10/2011	2:36:42 AM	Main Vac valve opened
1/10/2011	2:36:42 AM	Bypass valve opened
1/10/2011	2:36:42 AM	Helium MFC set to  0.000000
1/10/2011	2:36:42 AM	H2 MFC set to  0.000000
1/10/2011	2:36:42 AM	BCl3 MFC set to  0.000000
1/10/2011	2:36:42 AM	PHl3 MFC set to  0.000000
1/10/2011	2:36:42 AM	SiCl4 MFC set to  0.000000
1/10/2011	2:36:42 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	2:36:43 AM	Tube furnace set to 0
1/10/2011	2:37:43 AM	H2 valve closed
1/10/2011	2:37:43 AM	BCl3 valve closed
1/10/2011	2:37:43 AM	PH3 valve closed
1/10/2011	2:37:43 AM	SiCl4 pre valve closed
1/10/2011	2:37:43 AM	SiCl4 post valve closed
1/10/2011	2:37:43 AM	Bubbler valve closed
1/10/2011	2:37:43 AM	Helium valve opened
1/10/2011	2:37:43 AM	Main Vac valve opened
1/10/2011	2:37:43 AM	Bypass valve opened
1/10/2011	2:37:43 AM	Helium MFC set to  100.000000
1/10/2011	2:37:43 AM	H2 MFC set to  0.000000
1/10/2011	2:37:43 AM	BCl3 MFC set to  0.000000
1/10/2011	2:37:43 AM	PHl3 MFC set to  0.000000
1/10/2011	2:37:43 AM	SiCl4 MFC set to  0.000000
1/10/2011	2:37:43 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	2:37:43 AM	Tube furnace set to 0
1/10/2011	2:38:43 AM	Helium valve closed
1/10/2011	2:38:43 AM	H2 valve closed
1/10/2011	2:38:43 AM	BCl3 valve closed
1/10/2011	2:38:43 AM	PH3 valve closed
1/10/2011	2:38:43 AM	SiCl4 pre valve closed
1/10/2011	2:38:43 AM	SiCl4 post valve closed
1/10/2011	2:38:43 AM	Bubbler valve closed
1/10/2011	2:38:43 AM	Main Vac valve opened
1/10/2011	2:38:43 AM	Bypass valve opened
1/10/2011	2:38:43 AM	Helium MFC set to  0.000000
1/10/2011	2:38:43 AM	H2 MFC set to  0.000000
1/10/2011	2:38:43 AM	BCl3 MFC set to  0.000000
1/10/2011	2:38:43 AM	PHl3 MFC set to  0.000000
1/10/2011	2:38:43 AM	SiCl4 MFC set to  0.000000
1/10/2011	2:38:43 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	2:38:43 AM	Tube furnace set to 0
1/10/2011	2:39:43 AM	H2 valve closed
1/10/2011	2:39:43 AM	BCl3 valve closed
1/10/2011	2:39:43 AM	PH3 valve closed
1/10/2011	2:39:43 AM	SiCl4 pre valve closed
1/10/2011	2:39:43 AM	SiCl4 post valve closed
1/10/2011	2:39:43 AM	Bubbler valve closed
1/10/2011	2:39:43 AM	Helium valve opened
1/10/2011	2:39:43 AM	Main Vac valve opened
1/10/2011	2:39:43 AM	Bypass valve opened
1/10/2011	2:39:43 AM	Helium MFC set to  100.000000
1/10/2011	2:39:43 AM	H2 MFC set to  0.000000
1/10/2011	2:39:43 AM	BCl3 MFC set to  0.000000
1/10/2011	2:39:43 AM	PHl3 MFC set to  0.000000
1/10/2011	2:39:43 AM	SiCl4 MFC set to  0.000000
1/10/2011	2:39:43 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	2:39:43 AM	Tube furnace set to 0
1/10/2011	2:40:43 AM	Helium valve closed
1/10/2011	2:40:43 AM	H2 valve closed
1/10/2011	2:40:43 AM	BCl3 valve closed
1/10/2011	2:40:43 AM	PH3 valve closed
1/10/2011	2:40:43 AM	SiCl4 pre valve closed
1/10/2011	2:40:43 AM	SiCl4 post valve closed
1/10/2011	2:40:43 AM	Bubbler valve closed
1/10/2011	2:40:43 AM	Main Vac valve opened
1/10/2011	2:40:43 AM	Bypass valve opened
1/10/2011	2:40:43 AM	Helium MFC set to  0.000000
1/10/2011	2:40:43 AM	H2 MFC set to  0.000000
1/10/2011	2:40:43 AM	BCl3 MFC set to  0.000000
1/10/2011	2:40:43 AM	PHl3 MFC set to  0.000000
1/10/2011	2:40:43 AM	SiCl4 MFC set to  0.000000
1/10/2011	2:40:43 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	2:40:43 AM	Tube furnace set to 0
1/10/2011	2:41:43 AM	H2 valve closed
1/10/2011	2:41:43 AM	BCl3 valve closed
1/10/2011	2:41:43 AM	PH3 valve closed
1/10/2011	2:41:43 AM	SiCl4 pre valve closed
1/10/2011	2:41:43 AM	SiCl4 post valve closed
1/10/2011	2:41:43 AM	Bubbler valve closed
1/10/2011	2:41:43 AM	Helium valve opened
1/10/2011	2:41:43 AM	Main Vac valve opened
1/10/2011	2:41:43 AM	Bypass valve opened
1/10/2011	2:41:43 AM	Helium MFC set to  100.000000
1/10/2011	2:41:43 AM	H2 MFC set to  0.000000
1/10/2011	2:41:43 AM	BCl3 MFC set to  0.000000
1/10/2011	2:41:43 AM	PHl3 MFC set to  0.000000
1/10/2011	2:41:43 AM	SiCl4 MFC set to  0.000000
1/10/2011	2:41:43 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	2:41:44 AM	Tube furnace set to 0
1/10/2011	2:42:44 AM	Helium valve closed
1/10/2011	2:42:44 AM	H2 valve closed
1/10/2011	2:42:44 AM	BCl3 valve closed
1/10/2011	2:42:44 AM	PH3 valve closed
1/10/2011	2:42:44 AM	SiCl4 pre valve closed
1/10/2011	2:42:44 AM	SiCl4 post valve closed
1/10/2011	2:42:44 AM	Bubbler valve closed
1/10/2011	2:42:44 AM	Main Vac valve opened
1/10/2011	2:42:44 AM	Bypass valve opened
1/10/2011	2:42:44 AM	Helium MFC set to  0.000000
1/10/2011	2:42:44 AM	H2 MFC set to  0.000000
1/10/2011	2:42:44 AM	BCl3 MFC set to  0.000000
1/10/2011	2:42:44 AM	PHl3 MFC set to  0.000000
1/10/2011	2:42:44 AM	SiCl4 MFC set to  0.000000
1/10/2011	2:42:44 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	2:42:44 AM	Tube furnace set to 0
1/10/2011	2:43:44 AM	H2 valve closed
1/10/2011	2:43:44 AM	BCl3 valve closed
1/10/2011	2:43:44 AM	PH3 valve closed
1/10/2011	2:43:44 AM	SiCl4 pre valve closed
1/10/2011	2:43:44 AM	SiCl4 post valve closed
1/10/2011	2:43:44 AM	Bubbler valve closed
1/10/2011	2:43:44 AM	Helium valve opened
1/10/2011	2:43:44 AM	Main Vac valve opened
1/10/2011	2:43:44 AM	Bypass valve opened
1/10/2011	2:43:44 AM	Helium MFC set to  100.000000
1/10/2011	2:43:44 AM	H2 MFC set to  0.000000
1/10/2011	2:43:44 AM	BCl3 MFC set to  0.000000
1/10/2011	2:43:44 AM	PHl3 MFC set to  0.000000
1/10/2011	2:43:44 AM	SiCl4 MFC set to  0.000000
1/10/2011	2:43:44 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	2:43:44 AM	Tube furnace set to 0
1/10/2011	2:44:44 AM	Helium valve closed
1/10/2011	2:44:44 AM	H2 valve closed
1/10/2011	2:44:44 AM	BCl3 valve closed
1/10/2011	2:44:44 AM	PH3 valve closed
1/10/2011	2:44:44 AM	SiCl4 pre valve closed
1/10/2011	2:44:44 AM	SiCl4 post valve closed
1/10/2011	2:44:44 AM	Bubbler valve closed
1/10/2011	2:44:44 AM	Main Vac valve opened
1/10/2011	2:44:44 AM	Bypass valve opened
1/10/2011	2:44:44 AM	Helium MFC set to  0.000000
1/10/2011	2:44:44 AM	H2 MFC set to  0.000000
1/10/2011	2:44:44 AM	BCl3 MFC set to  0.000000
1/10/2011	2:44:44 AM	PHl3 MFC set to  0.000000
1/10/2011	2:44:44 AM	SiCl4 MFC set to  0.000000
1/10/2011	2:44:44 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	2:44:44 AM	Tube furnace set to 0
1/10/2011	2:45:44 AM	H2 valve closed
1/10/2011	2:45:44 AM	BCl3 valve closed
1/10/2011	2:45:44 AM	PH3 valve closed
1/10/2011	2:45:44 AM	SiCl4 pre valve closed
1/10/2011	2:45:44 AM	SiCl4 post valve closed
1/10/2011	2:45:44 AM	Bubbler valve closed
1/10/2011	2:45:44 AM	Helium valve opened
1/10/2011	2:45:44 AM	Main Vac valve opened
1/10/2011	2:45:44 AM	Bypass valve opened
1/10/2011	2:45:44 AM	Helium MFC set to  100.000000
1/10/2011	2:45:44 AM	H2 MFC set to  0.000000
1/10/2011	2:45:44 AM	BCl3 MFC set to  0.000000
1/10/2011	2:45:44 AM	PHl3 MFC set to  0.000000
1/10/2011	2:45:44 AM	SiCl4 MFC set to  0.000000
1/10/2011	2:45:44 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	2:45:44 AM	Tube furnace set to 0
1/10/2011	2:46:44 AM	Helium valve closed
1/10/2011	2:46:44 AM	H2 valve closed
1/10/2011	2:46:44 AM	BCl3 valve closed
1/10/2011	2:46:44 AM	PH3 valve closed
1/10/2011	2:46:44 AM	SiCl4 pre valve closed
1/10/2011	2:46:44 AM	SiCl4 post valve closed
1/10/2011	2:46:44 AM	Bubbler valve closed
1/10/2011	2:46:44 AM	Main Vac valve opened
1/10/2011	2:46:44 AM	Bypass valve opened
1/10/2011	2:46:44 AM	Helium MFC set to  0.000000
1/10/2011	2:46:44 AM	H2 MFC set to  0.000000
1/10/2011	2:46:44 AM	BCl3 MFC set to  0.000000
1/10/2011	2:46:44 AM	PHl3 MFC set to  0.000000
1/10/2011	2:46:44 AM	SiCl4 MFC set to  0.000000
1/10/2011	2:46:44 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	2:46:45 AM	Tube furnace set to 0
1/10/2011	2:47:45 AM	H2 valve closed
1/10/2011	2:47:45 AM	BCl3 valve closed
1/10/2011	2:47:45 AM	PH3 valve closed
1/10/2011	2:47:45 AM	SiCl4 pre valve closed
1/10/2011	2:47:45 AM	SiCl4 post valve closed
1/10/2011	2:47:45 AM	Bubbler valve closed
1/10/2011	2:47:45 AM	Helium valve opened
1/10/2011	2:47:45 AM	Main Vac valve opened
1/10/2011	2:47:45 AM	Bypass valve opened
1/10/2011	2:47:45 AM	Helium MFC set to  100.000000
1/10/2011	2:47:45 AM	H2 MFC set to  0.000000
1/10/2011	2:47:45 AM	BCl3 MFC set to  0.000000
1/10/2011	2:47:45 AM	PHl3 MFC set to  0.000000
1/10/2011	2:47:45 AM	SiCl4 MFC set to  0.000000
1/10/2011	2:47:45 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	2:47:45 AM	Tube furnace set to 0
1/10/2011	2:48:45 AM	Helium valve closed
1/10/2011	2:48:45 AM	H2 valve closed
1/10/2011	2:48:45 AM	BCl3 valve closed
1/10/2011	2:48:45 AM	PH3 valve closed
1/10/2011	2:48:45 AM	SiCl4 pre valve closed
1/10/2011	2:48:45 AM	SiCl4 post valve closed
1/10/2011	2:48:45 AM	Bubbler valve closed
1/10/2011	2:48:45 AM	Main Vac valve opened
1/10/2011	2:48:45 AM	Bypass valve opened
1/10/2011	2:48:45 AM	Helium MFC set to  0.000000
1/10/2011	2:48:45 AM	H2 MFC set to  0.000000
1/10/2011	2:48:45 AM	BCl3 MFC set to  0.000000
1/10/2011	2:48:45 AM	PHl3 MFC set to  0.000000
1/10/2011	2:48:45 AM	SiCl4 MFC set to  0.000000
1/10/2011	2:48:45 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	2:48:45 AM	Tube furnace set to 0
1/10/2011	2:49:45 AM	H2 valve closed
1/10/2011	2:49:45 AM	BCl3 valve closed
1/10/2011	2:49:45 AM	PH3 valve closed
1/10/2011	2:49:45 AM	SiCl4 pre valve closed
1/10/2011	2:49:45 AM	SiCl4 post valve closed
1/10/2011	2:49:45 AM	Bubbler valve closed
1/10/2011	2:49:45 AM	Helium valve opened
1/10/2011	2:49:45 AM	Main Vac valve opened
1/10/2011	2:49:45 AM	Bypass valve opened
1/10/2011	2:49:45 AM	Helium MFC set to  100.000000
1/10/2011	2:49:45 AM	H2 MFC set to  0.000000
1/10/2011	2:49:45 AM	BCl3 MFC set to  0.000000
1/10/2011	2:49:45 AM	PHl3 MFC set to  0.000000
1/10/2011	2:49:45 AM	SiCl4 MFC set to  0.000000
1/10/2011	2:49:45 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	2:49:45 AM	Tube furnace set to 0
1/10/2011	2:50:45 AM	Helium valve closed
1/10/2011	2:50:45 AM	H2 valve closed
1/10/2011	2:50:45 AM	BCl3 valve closed
1/10/2011	2:50:45 AM	PH3 valve closed
1/10/2011	2:50:45 AM	SiCl4 pre valve closed
1/10/2011	2:50:45 AM	SiCl4 post valve closed
1/10/2011	2:50:45 AM	Bubbler valve closed
1/10/2011	2:50:45 AM	Main Vac valve opened
1/10/2011	2:50:45 AM	Bypass valve opened
1/10/2011	2:50:45 AM	Helium MFC set to  0.000000
1/10/2011	2:50:45 AM	H2 MFC set to  0.000000
1/10/2011	2:50:45 AM	BCl3 MFC set to  0.000000
1/10/2011	2:50:45 AM	PHl3 MFC set to  0.000000
1/10/2011	2:50:45 AM	SiCl4 MFC set to  0.000000
1/10/2011	2:50:45 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	2:50:45 AM	Tube furnace set to 0
1/10/2011	2:51:45 AM	H2 valve closed
1/10/2011	2:51:45 AM	BCl3 valve closed
1/10/2011	2:51:45 AM	PH3 valve closed
1/10/2011	2:51:45 AM	SiCl4 pre valve closed
1/10/2011	2:51:45 AM	SiCl4 post valve closed
1/10/2011	2:51:45 AM	Bubbler valve closed
1/10/2011	2:51:45 AM	Helium valve opened
1/10/2011	2:51:45 AM	Main Vac valve opened
1/10/2011	2:51:46 AM	Bypass valve opened
1/10/2011	2:51:46 AM	Helium MFC set to  100.000000
1/10/2011	2:51:46 AM	H2 MFC set to  0.000000
1/10/2011	2:51:46 AM	BCl3 MFC set to  0.000000
1/10/2011	2:51:46 AM	PHl3 MFC set to  0.000000
1/10/2011	2:51:46 AM	SiCl4 MFC set to  0.000000
1/10/2011	2:51:46 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	2:51:46 AM	Tube furnace set to 0
1/10/2011	2:52:46 AM	Helium valve closed
1/10/2011	2:52:46 AM	H2 valve closed
1/10/2011	2:52:46 AM	BCl3 valve closed
1/10/2011	2:52:46 AM	PH3 valve closed
1/10/2011	2:52:46 AM	SiCl4 pre valve closed
1/10/2011	2:52:46 AM	SiCl4 post valve closed
1/10/2011	2:52:46 AM	Bubbler valve closed
1/10/2011	2:52:46 AM	Main Vac valve opened
1/10/2011	2:52:46 AM	Bypass valve opened
1/10/2011	2:52:46 AM	Helium MFC set to  0.000000
1/10/2011	2:52:46 AM	H2 MFC set to  0.000000
1/10/2011	2:52:46 AM	BCl3 MFC set to  0.000000
1/10/2011	2:52:46 AM	PHl3 MFC set to  0.000000
1/10/2011	2:52:46 AM	SiCl4 MFC set to  0.000000
1/10/2011	2:52:46 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	2:52:46 AM	Tube furnace set to 0
1/10/2011	2:53:46 AM	H2 valve closed
1/10/2011	2:53:46 AM	BCl3 valve closed
1/10/2011	2:53:46 AM	PH3 valve closed
1/10/2011	2:53:46 AM	SiCl4 pre valve closed
1/10/2011	2:53:46 AM	SiCl4 post valve closed
1/10/2011	2:53:46 AM	Bubbler valve closed
1/10/2011	2:53:46 AM	Helium valve opened
1/10/2011	2:53:46 AM	Main Vac valve opened
1/10/2011	2:53:46 AM	Bypass valve opened
1/10/2011	2:53:46 AM	Helium MFC set to  100.000000
1/10/2011	2:53:46 AM	H2 MFC set to  0.000000
1/10/2011	2:53:46 AM	BCl3 MFC set to  0.000000
1/10/2011	2:53:46 AM	PHl3 MFC set to  0.000000
1/10/2011	2:53:46 AM	SiCl4 MFC set to  0.000000
1/10/2011	2:53:46 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	2:53:46 AM	Tube furnace set to 0
1/10/2011	2:54:46 AM	Helium valve closed
1/10/2011	2:54:46 AM	H2 valve closed
1/10/2011	2:54:46 AM	BCl3 valve closed
1/10/2011	2:54:46 AM	PH3 valve closed
1/10/2011	2:54:46 AM	SiCl4 pre valve closed
1/10/2011	2:54:46 AM	SiCl4 post valve closed
1/10/2011	2:54:46 AM	Bubbler valve closed
1/10/2011	2:54:46 AM	Main Vac valve opened
1/10/2011	2:54:46 AM	Bypass valve opened
1/10/2011	2:54:46 AM	Helium MFC set to  0.000000
1/10/2011	2:54:46 AM	H2 MFC set to  0.000000
1/10/2011	2:54:46 AM	BCl3 MFC set to  0.000000
1/10/2011	2:54:46 AM	PHl3 MFC set to  0.000000
1/10/2011	2:54:46 AM	SiCl4 MFC set to  0.000000
1/10/2011	2:54:46 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	2:54:46 AM	Tube furnace set to 0
1/10/2011	2:54:47 AM	Run finished at 2:54 AM
1/10/2011	2:54:47 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/10/2011	3:53:19 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/10/2011	3:53:20 AM	Recipe started at 3:53 AM
1/10/2011	3:53:20 AM	Helium valve closed
1/10/2011	3:53:20 AM	H2 valve closed
1/10/2011	3:53:20 AM	BCl3 valve closed
1/10/2011	3:53:20 AM	PH3 valve closed
1/10/2011	3:53:20 AM	SiCl4 pre valve closed
1/10/2011	3:53:20 AM	SiCl4 post valve closed
1/10/2011	3:53:20 AM	Main Vac valve closed
1/10/2011	3:53:20 AM	Bypass valve closed
1/10/2011	3:53:20 AM	Bubbler valve closed
1/10/2011	3:53:20 AM	Helium MFC set to  0.000000
1/10/2011	3:53:20 AM	H2 MFC set to  0.000000
1/10/2011	3:53:20 AM	BCl3 MFC set to  0.000000
1/10/2011	3:53:20 AM	PHl3 MFC set to  0.000000
1/10/2011	3:53:20 AM	SiCl4 MFC set to  0.000000
1/10/2011	3:53:20 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	3:53:20 AM	Tube furnace set to 0
1/10/2011	3:53:20 AM	Run finished at 3:53 AM
1/10/2011	3:53:20 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/10/2011	3:53:44 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/10/2011	3:53:44 AM	Recipe started at 3:53 AM
1/10/2011	3:53:44 AM	Helium valve closed
1/10/2011	3:53:44 AM	H2 valve closed
1/10/2011	3:53:44 AM	BCl3 valve closed
1/10/2011	3:53:44 AM	PH3 valve closed
1/10/2011	3:53:44 AM	SiCl4 pre valve closed
1/10/2011	3:53:44 AM	SiCl4 post valve closed
1/10/2011	3:53:44 AM	Main Vac valve closed
1/10/2011	3:53:44 AM	Bubbler valve closed
1/10/2011	3:53:44 AM	Bypass valve opened
1/10/2011	3:53:44 AM	Helium MFC set to  0.000000
1/10/2011	3:53:44 AM	H2 MFC set to  0.000000
1/10/2011	3:53:44 AM	BCl3 MFC set to  0.000000
1/10/2011	3:53:44 AM	PHl3 MFC set to  0.000000
1/10/2011	3:53:44 AM	SiCl4 MFC set to  0.000000
1/10/2011	3:53:44 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	3:53:44 AM	Tube furnace set to 0
1/10/2011	3:53:45 AM	Helium valve closed
1/10/2011	3:53:45 AM	H2 valve closed
1/10/2011	3:53:45 AM	BCl3 valve closed
1/10/2011	3:53:45 AM	PH3 valve closed
1/10/2011	3:53:45 AM	SiCl4 pre valve closed
1/10/2011	3:53:45 AM	SiCl4 post valve closed
1/10/2011	3:53:45 AM	Bubbler valve closed
1/10/2011	3:53:45 AM	Main Vac valve opened
1/10/2011	3:53:45 AM	Bypass valve opened
1/10/2011	3:53:45 AM	Helium MFC set to  0.000000
1/10/2011	3:53:45 AM	H2 MFC set to  0.000000
1/10/2011	3:53:45 AM	BCl3 MFC set to  0.000000
1/10/2011	3:53:45 AM	PHl3 MFC set to  0.000000
1/10/2011	3:53:45 AM	SiCl4 MFC set to  0.000000
1/10/2011	3:53:45 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	3:53:45 AM	Tube furnace set to 0
1/10/2011	3:53:45 AM	Run finished at 3:53 AM
1/10/2011	3:53:45 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/10/2011	3:54:47 AM	Recipe started at 3:54 AM
1/10/2011	3:54:47 AM	Helium valve closed
1/10/2011	3:54:47 AM	BCl3 valve closed
1/10/2011	3:54:47 AM	PH3 valve closed
1/10/2011	3:54:47 AM	SiCl4 pre valve closed
1/10/2011	3:54:47 AM	SiCl4 post valve closed
1/10/2011	3:54:47 AM	Main Vac valve closed
1/10/2011	3:54:47 AM	Bypass valve closed
1/10/2011	3:54:47 AM	Bubbler valve closed
1/10/2011	3:54:47 AM	H2 valve opened
1/10/2011	3:54:47 AM	Helium MFC set to  0.000000
1/10/2011	3:54:47 AM	H2 MFC set to  500.000000
1/10/2011	3:54:47 AM	BCl3 MFC set to  0.000000
1/10/2011	3:54:47 AM	PHl3 MFC set to  0.000000
1/10/2011	3:54:47 AM	SiCl4 MFC set to  0.000000
1/10/2011	3:54:47 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	3:54:47 AM	Tube furnace set to 0
1/10/2011	3:56:10 AM	Helium valve closed
1/10/2011	3:56:10 AM	BCl3 valve closed
1/10/2011	3:56:10 AM	PH3 valve closed
1/10/2011	3:56:10 AM	SiCl4 pre valve closed
1/10/2011	3:56:10 AM	SiCl4 post valve closed
1/10/2011	3:56:10 AM	Main Vac valve closed
1/10/2011	3:56:10 AM	Bypass valve closed
1/10/2011	3:56:10 AM	H2 valve opened
1/10/2011	3:56:10 AM	Bubbler valve opened
1/10/2011	3:56:10 AM	Helium MFC set to  0.000000
1/10/2011	3:56:10 AM	H2 MFC set to  500.000000
1/10/2011	3:56:10 AM	BCl3 MFC set to  0.000000
1/10/2011	3:56:10 AM	PHl3 MFC set to  0.000000
1/10/2011	3:56:10 AM	SiCl4 MFC set to  0.000000
1/10/2011	3:56:10 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	3:56:10 AM	Tube furnace set to 1000
1/10/2011	4:16:10 AM	Helium valve closed
1/10/2011	4:16:10 AM	PH3 valve closed
1/10/2011	4:16:10 AM	Main Vac valve closed
1/10/2011	4:16:10 AM	Bypass valve closed
1/10/2011	4:16:10 AM	H2 valve opened
1/10/2011	4:16:10 AM	BCl3 valve opened
1/10/2011	4:16:10 AM	SiCl4 pre valve opened
1/10/2011	4:16:10 AM	SiCl4 post valve opened
1/10/2011	4:16:10 AM	Bubbler valve opened
1/10/2011	4:16:10 AM	Helium MFC set to  0.000000
1/10/2011	4:16:10 AM	H2 MFC set to  500.000000
1/10/2011	4:16:10 AM	BCl3 MFC set to  1.800000
1/10/2011	4:16:10 AM	PHl3 MFC set to  0.000000
1/10/2011	4:16:10 AM	SiCl4 MFC set to  50.000000
1/10/2011	4:16:10 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	4:16:11 AM	Tube furnace set to 1000
1/10/2011	4:31:11 AM	H2 valve closed
1/10/2011	4:31:11 AM	BCl3 valve closed
1/10/2011	4:31:11 AM	PH3 valve closed
1/10/2011	4:31:11 AM	SiCl4 pre valve closed
1/10/2011	4:31:11 AM	SiCl4 post valve closed
1/10/2011	4:31:11 AM	Main Vac valve closed
1/10/2011	4:31:11 AM	Bypass valve closed
1/10/2011	4:31:11 AM	Helium valve opened
1/10/2011	4:31:11 AM	Bubbler valve opened
1/10/2011	4:31:11 AM	Helium MFC set to  500.000000
1/10/2011	4:31:11 AM	H2 MFC set to  0.000000
1/10/2011	4:31:11 AM	BCl3 MFC set to  0.000000
1/10/2011	4:31:11 AM	PHl3 MFC set to  0.000000
1/10/2011	4:31:11 AM	SiCl4 MFC set to  0.000000
1/10/2011	4:31:11 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	4:31:11 AM	Tube furnace set to 0
1/10/2011	4:51:11 AM	Helium valve closed
1/10/2011	4:51:11 AM	H2 valve closed
1/10/2011	4:51:11 AM	BCl3 valve closed
1/10/2011	4:51:11 AM	PH3 valve closed
1/10/2011	4:51:11 AM	SiCl4 pre valve closed
1/10/2011	4:51:11 AM	SiCl4 post valve closed
1/10/2011	4:51:11 AM	Main Vac valve closed
1/10/2011	4:51:11 AM	Bypass valve closed
1/10/2011	4:51:11 AM	Bubbler valve closed
1/10/2011	4:51:11 AM	Helium MFC set to  0.000000
1/10/2011	4:51:11 AM	H2 MFC set to  0.000000
1/10/2011	4:51:11 AM	BCl3 MFC set to  0.000000
1/10/2011	4:51:11 AM	PHl3 MFC set to  0.000000
1/10/2011	4:51:11 AM	SiCl4 MFC set to  0.000000
1/10/2011	4:51:11 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	4:51:11 AM	Tube furnace set to 0
1/10/2011	4:51:11 AM	Run finished at 4:51 AM
1/10/2011	5:18:42 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/10/2011	5:18:43 AM	Recipe started at 5:18 AM
1/10/2011	5:18:43 AM	Helium valve closed
1/10/2011	5:18:43 AM	H2 valve closed
1/10/2011	5:18:43 AM	BCl3 valve closed
1/10/2011	5:18:43 AM	PH3 valve closed
1/10/2011	5:18:43 AM	SiCl4 pre valve closed
1/10/2011	5:18:43 AM	SiCl4 post valve closed
1/10/2011	5:18:43 AM	Main Vac valve closed
1/10/2011	5:18:43 AM	Bubbler valve closed
1/10/2011	5:18:43 AM	Bypass valve opened
1/10/2011	5:18:43 AM	Helium MFC set to  0.000000
1/10/2011	5:18:43 AM	H2 MFC set to  0.000000
1/10/2011	5:18:43 AM	BCl3 MFC set to  0.000000
1/10/2011	5:18:43 AM	PHl3 MFC set to  0.000000
1/10/2011	5:18:43 AM	SiCl4 MFC set to  0.000000
1/10/2011	5:18:43 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	5:18:43 AM	Tube furnace set to 0
1/10/2011	5:19:46 AM	Helium valve closed
1/10/2011	5:19:46 AM	H2 valve closed
1/10/2011	5:19:46 AM	BCl3 valve closed
1/10/2011	5:19:46 AM	PH3 valve closed
1/10/2011	5:19:46 AM	SiCl4 pre valve closed
1/10/2011	5:19:46 AM	SiCl4 post valve closed
1/10/2011	5:19:46 AM	Bubbler valve closed
1/10/2011	5:19:46 AM	Main Vac valve opened
1/10/2011	5:19:46 AM	Bypass valve opened
1/10/2011	5:19:46 AM	Helium MFC set to  0.000000
1/10/2011	5:19:46 AM	H2 MFC set to  0.000000
1/10/2011	5:19:46 AM	BCl3 MFC set to  0.000000
1/10/2011	5:19:46 AM	PHl3 MFC set to  0.000000
1/10/2011	5:19:46 AM	SiCl4 MFC set to  0.000000
1/10/2011	5:19:46 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	5:19:46 AM	Tube furnace set to 0
1/10/2011	5:19:46 AM	Run finished at 5:19 AM
1/10/2011	5:19:46 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/10/2011	5:24:33 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/10/2011	5:24:45 AM	Recipe started at 5:24 AM
1/10/2011	5:24:45 AM	Helium valve closed
1/10/2011	5:24:45 AM	H2 valve closed
1/10/2011	5:24:45 AM	BCl3 valve closed
1/10/2011	5:24:45 AM	PH3 valve closed
1/10/2011	5:24:45 AM	SiCl4 pre valve closed
1/10/2011	5:24:45 AM	SiCl4 post valve closed
1/10/2011	5:24:45 AM	Main Vac valve closed
1/10/2011	5:24:45 AM	Bubbler valve closed
1/10/2011	5:24:45 AM	Bypass valve opened
1/10/2011	5:24:45 AM	Helium MFC set to  0.000000
1/10/2011	5:24:45 AM	H2 MFC set to  0.000000
1/10/2011	5:24:45 AM	BCl3 MFC set to  0.000000
1/10/2011	5:24:45 AM	PHl3 MFC set to  0.000000
1/10/2011	5:24:45 AM	SiCl4 MFC set to  0.000000
1/10/2011	5:24:45 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	5:24:46 AM	Tube furnace set to 0
1/10/2011	5:24:46 AM	Helium valve closed
1/10/2011	5:24:46 AM	H2 valve closed
1/10/2011	5:24:46 AM	BCl3 valve closed
1/10/2011	5:24:46 AM	PH3 valve closed
1/10/2011	5:24:46 AM	SiCl4 pre valve closed
1/10/2011	5:24:46 AM	SiCl4 post valve closed
1/10/2011	5:24:46 AM	Bubbler valve closed
1/10/2011	5:24:46 AM	Main Vac valve opened
1/10/2011	5:24:46 AM	Bypass valve opened
1/10/2011	5:24:46 AM	Helium MFC set to  0.000000
1/10/2011	5:24:46 AM	H2 MFC set to  0.000000
1/10/2011	5:24:46 AM	BCl3 MFC set to  0.000000
1/10/2011	5:24:46 AM	PHl3 MFC set to  0.000000
1/10/2011	5:24:46 AM	SiCl4 MFC set to  0.000000
1/10/2011	5:24:46 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	5:24:46 AM	Tube furnace set to 0
1/10/2011	5:25:46 AM	H2 valve closed
1/10/2011	5:25:46 AM	BCl3 valve closed
1/10/2011	5:25:46 AM	PH3 valve closed
1/10/2011	5:25:46 AM	SiCl4 pre valve closed
1/10/2011	5:25:46 AM	SiCl4 post valve closed
1/10/2011	5:25:46 AM	Bubbler valve closed
1/10/2011	5:25:46 AM	Helium valve opened
1/10/2011	5:25:46 AM	Main Vac valve opened
1/10/2011	5:25:46 AM	Bypass valve opened
1/10/2011	5:25:46 AM	Helium MFC set to  100.000000
1/10/2011	5:25:46 AM	H2 MFC set to  0.000000
1/10/2011	5:25:46 AM	BCl3 MFC set to  0.000000
1/10/2011	5:25:46 AM	PHl3 MFC set to  0.000000
1/10/2011	5:25:46 AM	SiCl4 MFC set to  0.000000
1/10/2011	5:25:46 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	5:25:46 AM	Tube furnace set to 0
1/10/2011	5:26:46 AM	Helium valve closed
1/10/2011	5:26:46 AM	H2 valve closed
1/10/2011	5:26:46 AM	BCl3 valve closed
1/10/2011	5:26:46 AM	PH3 valve closed
1/10/2011	5:26:46 AM	SiCl4 pre valve closed
1/10/2011	5:26:46 AM	SiCl4 post valve closed
1/10/2011	5:26:46 AM	Bubbler valve closed
1/10/2011	5:26:46 AM	Main Vac valve opened
1/10/2011	5:26:46 AM	Bypass valve opened
1/10/2011	5:26:46 AM	Helium MFC set to  0.000000
1/10/2011	5:26:46 AM	H2 MFC set to  0.000000
1/10/2011	5:26:46 AM	BCl3 MFC set to  0.000000
1/10/2011	5:26:46 AM	PHl3 MFC set to  0.000000
1/10/2011	5:26:46 AM	SiCl4 MFC set to  0.000000
1/10/2011	5:26:46 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	5:26:46 AM	Tube furnace set to 0
1/10/2011	5:27:46 AM	H2 valve closed
1/10/2011	5:27:46 AM	BCl3 valve closed
1/10/2011	5:27:46 AM	PH3 valve closed
1/10/2011	5:27:46 AM	SiCl4 pre valve closed
1/10/2011	5:27:46 AM	SiCl4 post valve closed
1/10/2011	5:27:46 AM	Bubbler valve closed
1/10/2011	5:27:46 AM	Helium valve opened
1/10/2011	5:27:46 AM	Main Vac valve opened
1/10/2011	5:27:46 AM	Bypass valve opened
1/10/2011	5:27:46 AM	Helium MFC set to  100.000000
1/10/2011	5:27:46 AM	H2 MFC set to  0.000000
1/10/2011	5:27:46 AM	BCl3 MFC set to  0.000000
1/10/2011	5:27:46 AM	PHl3 MFC set to  0.000000
1/10/2011	5:27:46 AM	SiCl4 MFC set to  0.000000
1/10/2011	5:27:46 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	5:27:47 AM	Tube furnace set to 0
1/10/2011	5:28:47 AM	Helium valve closed
1/10/2011	5:28:47 AM	H2 valve closed
1/10/2011	5:28:47 AM	BCl3 valve closed
1/10/2011	5:28:47 AM	PH3 valve closed
1/10/2011	5:28:47 AM	SiCl4 pre valve closed
1/10/2011	5:28:47 AM	SiCl4 post valve closed
1/10/2011	5:28:47 AM	Bubbler valve closed
1/10/2011	5:28:47 AM	Main Vac valve opened
1/10/2011	5:28:47 AM	Bypass valve opened
1/10/2011	5:28:47 AM	Helium MFC set to  0.000000
1/10/2011	5:28:47 AM	H2 MFC set to  0.000000
1/10/2011	5:28:47 AM	BCl3 MFC set to  0.000000
1/10/2011	5:28:47 AM	PHl3 MFC set to  0.000000
1/10/2011	5:28:47 AM	SiCl4 MFC set to  0.000000
1/10/2011	5:28:47 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	5:28:47 AM	Tube furnace set to 0
1/10/2011	5:29:47 AM	H2 valve closed
1/10/2011	5:29:47 AM	BCl3 valve closed
1/10/2011	5:29:47 AM	PH3 valve closed
1/10/2011	5:29:47 AM	SiCl4 pre valve closed
1/10/2011	5:29:47 AM	SiCl4 post valve closed
1/10/2011	5:29:47 AM	Bubbler valve closed
1/10/2011	5:29:47 AM	Helium valve opened
1/10/2011	5:29:47 AM	Main Vac valve opened
1/10/2011	5:29:47 AM	Bypass valve opened
1/10/2011	5:29:47 AM	Helium MFC set to  100.000000
1/10/2011	5:29:47 AM	H2 MFC set to  0.000000
1/10/2011	5:29:47 AM	BCl3 MFC set to  0.000000
1/10/2011	5:29:47 AM	PHl3 MFC set to  0.000000
1/10/2011	5:29:47 AM	SiCl4 MFC set to  0.000000
1/10/2011	5:29:47 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	5:29:47 AM	Tube furnace set to 0
1/10/2011	5:30:47 AM	Helium valve closed
1/10/2011	5:30:47 AM	H2 valve closed
1/10/2011	5:30:47 AM	BCl3 valve closed
1/10/2011	5:30:47 AM	PH3 valve closed
1/10/2011	5:30:47 AM	SiCl4 pre valve closed
1/10/2011	5:30:47 AM	SiCl4 post valve closed
1/10/2011	5:30:47 AM	Bubbler valve closed
1/10/2011	5:30:47 AM	Main Vac valve opened
1/10/2011	5:30:47 AM	Bypass valve opened
1/10/2011	5:30:47 AM	Helium MFC set to  0.000000
1/10/2011	5:30:47 AM	H2 MFC set to  0.000000
1/10/2011	5:30:47 AM	BCl3 MFC set to  0.000000
1/10/2011	5:30:47 AM	PHl3 MFC set to  0.000000
1/10/2011	5:30:47 AM	SiCl4 MFC set to  0.000000
1/10/2011	5:30:47 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	5:30:47 AM	Tube furnace set to 0
1/10/2011	5:31:47 AM	H2 valve closed
1/10/2011	5:31:47 AM	BCl3 valve closed
1/10/2011	5:31:47 AM	PH3 valve closed
1/10/2011	5:31:47 AM	SiCl4 pre valve closed
1/10/2011	5:31:47 AM	SiCl4 post valve closed
1/10/2011	5:31:47 AM	Bubbler valve closed
1/10/2011	5:31:47 AM	Helium valve opened
1/10/2011	5:31:47 AM	Main Vac valve opened
1/10/2011	5:31:47 AM	Bypass valve opened
1/10/2011	5:31:47 AM	Helium MFC set to  100.000000
1/10/2011	5:31:47 AM	H2 MFC set to  0.000000
1/10/2011	5:31:47 AM	BCl3 MFC set to  0.000000
1/10/2011	5:31:47 AM	PHl3 MFC set to  0.000000
1/10/2011	5:31:47 AM	SiCl4 MFC set to  0.000000
1/10/2011	5:31:47 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	5:31:47 AM	Tube furnace set to 0
1/10/2011	5:32:47 AM	Helium valve closed
1/10/2011	5:32:47 AM	H2 valve closed
1/10/2011	5:32:47 AM	BCl3 valve closed
1/10/2011	5:32:47 AM	PH3 valve closed
1/10/2011	5:32:47 AM	SiCl4 pre valve closed
1/10/2011	5:32:47 AM	SiCl4 post valve closed
1/10/2011	5:32:47 AM	Bubbler valve closed
1/10/2011	5:32:47 AM	Main Vac valve opened
1/10/2011	5:32:47 AM	Bypass valve opened
1/10/2011	5:32:47 AM	Helium MFC set to  0.000000
1/10/2011	5:32:47 AM	H2 MFC set to  0.000000
1/10/2011	5:32:47 AM	BCl3 MFC set to  0.000000
1/10/2011	5:32:47 AM	PHl3 MFC set to  0.000000
1/10/2011	5:32:47 AM	SiCl4 MFC set to  0.000000
1/10/2011	5:32:47 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	5:32:48 AM	Tube furnace set to 0
1/10/2011	5:33:48 AM	H2 valve closed
1/10/2011	5:33:48 AM	BCl3 valve closed
1/10/2011	5:33:48 AM	PH3 valve closed
1/10/2011	5:33:48 AM	SiCl4 pre valve closed
1/10/2011	5:33:48 AM	SiCl4 post valve closed
1/10/2011	5:33:48 AM	Bubbler valve closed
1/10/2011	5:33:48 AM	Helium valve opened
1/10/2011	5:33:48 AM	Main Vac valve opened
1/10/2011	5:33:48 AM	Bypass valve opened
1/10/2011	5:33:48 AM	Helium MFC set to  100.000000
1/10/2011	5:33:48 AM	H2 MFC set to  0.000000
1/10/2011	5:33:48 AM	BCl3 MFC set to  0.000000
1/10/2011	5:33:48 AM	PHl3 MFC set to  0.000000
1/10/2011	5:33:48 AM	SiCl4 MFC set to  0.000000
1/10/2011	5:33:48 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	5:33:48 AM	Tube furnace set to 0
1/10/2011	5:34:48 AM	Helium valve closed
1/10/2011	5:34:48 AM	H2 valve closed
1/10/2011	5:34:48 AM	BCl3 valve closed
1/10/2011	5:34:48 AM	PH3 valve closed
1/10/2011	5:34:48 AM	SiCl4 pre valve closed
1/10/2011	5:34:48 AM	SiCl4 post valve closed
1/10/2011	5:34:48 AM	Bubbler valve closed
1/10/2011	5:34:48 AM	Main Vac valve opened
1/10/2011	5:34:48 AM	Bypass valve opened
1/10/2011	5:34:48 AM	Helium MFC set to  0.000000
1/10/2011	5:34:48 AM	H2 MFC set to  0.000000
1/10/2011	5:34:48 AM	BCl3 MFC set to  0.000000
1/10/2011	5:34:48 AM	PHl3 MFC set to  0.000000
1/10/2011	5:34:48 AM	SiCl4 MFC set to  0.000000
1/10/2011	5:34:48 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	5:34:48 AM	Tube furnace set to 0
1/10/2011	5:35:48 AM	H2 valve closed
1/10/2011	5:35:48 AM	BCl3 valve closed
1/10/2011	5:35:48 AM	PH3 valve closed
1/10/2011	5:35:48 AM	SiCl4 pre valve closed
1/10/2011	5:35:48 AM	SiCl4 post valve closed
1/10/2011	5:35:48 AM	Bubbler valve closed
1/10/2011	5:35:48 AM	Helium valve opened
1/10/2011	5:35:48 AM	Main Vac valve opened
1/10/2011	5:35:48 AM	Bypass valve opened
1/10/2011	5:35:48 AM	Helium MFC set to  100.000000
1/10/2011	5:35:48 AM	H2 MFC set to  0.000000
1/10/2011	5:35:48 AM	BCl3 MFC set to  0.000000
1/10/2011	5:35:48 AM	PHl3 MFC set to  0.000000
1/10/2011	5:35:48 AM	SiCl4 MFC set to  0.000000
1/10/2011	5:35:48 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	5:35:48 AM	Tube furnace set to 0
1/10/2011	5:36:48 AM	Helium valve closed
1/10/2011	5:36:48 AM	H2 valve closed
1/10/2011	5:36:48 AM	BCl3 valve closed
1/10/2011	5:36:48 AM	PH3 valve closed
1/10/2011	5:36:48 AM	SiCl4 pre valve closed
1/10/2011	5:36:48 AM	SiCl4 post valve closed
1/10/2011	5:36:48 AM	Bubbler valve closed
1/10/2011	5:36:48 AM	Main Vac valve opened
1/10/2011	5:36:48 AM	Bypass valve opened
1/10/2011	5:36:48 AM	Helium MFC set to  0.000000
1/10/2011	5:36:48 AM	H2 MFC set to  0.000000
1/10/2011	5:36:48 AM	BCl3 MFC set to  0.000000
1/10/2011	5:36:48 AM	PHl3 MFC set to  0.000000
1/10/2011	5:36:48 AM	SiCl4 MFC set to  0.000000
1/10/2011	5:36:48 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	5:36:48 AM	Tube furnace set to 0
1/10/2011	5:37:48 AM	H2 valve closed
1/10/2011	5:37:48 AM	BCl3 valve closed
1/10/2011	5:37:48 AM	PH3 valve closed
1/10/2011	5:37:48 AM	SiCl4 pre valve closed
1/10/2011	5:37:48 AM	SiCl4 post valve closed
1/10/2011	5:37:48 AM	Bubbler valve closed
1/10/2011	5:37:48 AM	Helium valve opened
1/10/2011	5:37:48 AM	Main Vac valve opened
1/10/2011	5:37:48 AM	Bypass valve opened
1/10/2011	5:37:48 AM	Helium MFC set to  100.000000
1/10/2011	5:37:48 AM	H2 MFC set to  0.000000
1/10/2011	5:37:48 AM	BCl3 MFC set to  0.000000
1/10/2011	5:37:48 AM	PHl3 MFC set to  0.000000
1/10/2011	5:37:48 AM	SiCl4 MFC set to  0.000000
1/10/2011	5:37:48 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	5:37:49 AM	Tube furnace set to 0
1/10/2011	5:38:49 AM	Helium valve closed
1/10/2011	5:38:49 AM	H2 valve closed
1/10/2011	5:38:49 AM	BCl3 valve closed
1/10/2011	5:38:49 AM	PH3 valve closed
1/10/2011	5:38:49 AM	SiCl4 pre valve closed
1/10/2011	5:38:49 AM	SiCl4 post valve closed
1/10/2011	5:38:49 AM	Bubbler valve closed
1/10/2011	5:38:49 AM	Main Vac valve opened
1/10/2011	5:38:49 AM	Bypass valve opened
1/10/2011	5:38:49 AM	Helium MFC set to  0.000000
1/10/2011	5:38:49 AM	H2 MFC set to  0.000000
1/10/2011	5:38:49 AM	BCl3 MFC set to  0.000000
1/10/2011	5:38:49 AM	PHl3 MFC set to  0.000000
1/10/2011	5:38:49 AM	SiCl4 MFC set to  0.000000
1/10/2011	5:38:49 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	5:38:49 AM	Tube furnace set to 0
1/10/2011	5:39:49 AM	H2 valve closed
1/10/2011	5:39:49 AM	BCl3 valve closed
1/10/2011	5:39:49 AM	PH3 valve closed
1/10/2011	5:39:49 AM	SiCl4 pre valve closed
1/10/2011	5:39:49 AM	SiCl4 post valve closed
1/10/2011	5:39:49 AM	Bubbler valve closed
1/10/2011	5:39:49 AM	Helium valve opened
1/10/2011	5:39:49 AM	Main Vac valve opened
1/10/2011	5:39:49 AM	Bypass valve opened
1/10/2011	5:39:49 AM	Helium MFC set to  100.000000
1/10/2011	5:39:49 AM	H2 MFC set to  0.000000
1/10/2011	5:39:49 AM	BCl3 MFC set to  0.000000
1/10/2011	5:39:49 AM	PHl3 MFC set to  0.000000
1/10/2011	5:39:49 AM	SiCl4 MFC set to  0.000000
1/10/2011	5:39:49 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	5:39:49 AM	Tube furnace set to 0
1/10/2011	5:40:49 AM	Helium valve closed
1/10/2011	5:40:49 AM	H2 valve closed
1/10/2011	5:40:49 AM	BCl3 valve closed
1/10/2011	5:40:49 AM	PH3 valve closed
1/10/2011	5:40:49 AM	SiCl4 pre valve closed
1/10/2011	5:40:49 AM	SiCl4 post valve closed
1/10/2011	5:40:49 AM	Bubbler valve closed
1/10/2011	5:40:49 AM	Main Vac valve opened
1/10/2011	5:40:49 AM	Bypass valve opened
1/10/2011	5:40:49 AM	Helium MFC set to  0.000000
1/10/2011	5:40:49 AM	H2 MFC set to  0.000000
1/10/2011	5:40:49 AM	BCl3 MFC set to  0.000000
1/10/2011	5:40:49 AM	PHl3 MFC set to  0.000000
1/10/2011	5:40:49 AM	SiCl4 MFC set to  0.000000
1/10/2011	5:40:49 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	5:40:49 AM	Tube furnace set to 0
1/10/2011	5:41:49 AM	H2 valve closed
1/10/2011	5:41:49 AM	BCl3 valve closed
1/10/2011	5:41:49 AM	PH3 valve closed
1/10/2011	5:41:49 AM	SiCl4 pre valve closed
1/10/2011	5:41:49 AM	SiCl4 post valve closed
1/10/2011	5:41:49 AM	Bubbler valve closed
1/10/2011	5:41:49 AM	Helium valve opened
1/10/2011	5:41:49 AM	Main Vac valve opened
1/10/2011	5:41:49 AM	Bypass valve opened
1/10/2011	5:41:49 AM	Helium MFC set to  100.000000
1/10/2011	5:41:49 AM	H2 MFC set to  0.000000
1/10/2011	5:41:49 AM	BCl3 MFC set to  0.000000
1/10/2011	5:41:49 AM	PHl3 MFC set to  0.000000
1/10/2011	5:41:49 AM	SiCl4 MFC set to  0.000000
1/10/2011	5:41:49 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	5:41:49 AM	Tube furnace set to 0
1/10/2011	5:42:49 AM	Helium valve closed
1/10/2011	5:42:49 AM	H2 valve closed
1/10/2011	5:42:49 AM	BCl3 valve closed
1/10/2011	5:42:49 AM	PH3 valve closed
1/10/2011	5:42:49 AM	SiCl4 pre valve closed
1/10/2011	5:42:49 AM	SiCl4 post valve closed
1/10/2011	5:42:49 AM	Bubbler valve closed
1/10/2011	5:42:49 AM	Main Vac valve opened
1/10/2011	5:42:49 AM	Bypass valve opened
1/10/2011	5:42:49 AM	Helium MFC set to  0.000000
1/10/2011	5:42:49 AM	H2 MFC set to  0.000000
1/10/2011	5:42:49 AM	BCl3 MFC set to  0.000000
1/10/2011	5:42:49 AM	PHl3 MFC set to  0.000000
1/10/2011	5:42:49 AM	SiCl4 MFC set to  0.000000
1/10/2011	5:42:49 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	5:42:50 AM	Tube furnace set to 0
1/10/2011	5:43:50 AM	H2 valve closed
1/10/2011	5:43:50 AM	BCl3 valve closed
1/10/2011	5:43:50 AM	PH3 valve closed
1/10/2011	5:43:50 AM	SiCl4 pre valve closed
1/10/2011	5:43:50 AM	SiCl4 post valve closed
1/10/2011	5:43:50 AM	Bubbler valve closed
1/10/2011	5:43:50 AM	Helium valve opened
1/10/2011	5:43:50 AM	Main Vac valve opened
1/10/2011	5:43:50 AM	Bypass valve opened
1/10/2011	5:43:50 AM	Helium MFC set to  100.000000
1/10/2011	5:43:50 AM	H2 MFC set to  0.000000
1/10/2011	5:43:50 AM	BCl3 MFC set to  0.000000
1/10/2011	5:43:50 AM	PHl3 MFC set to  0.000000
1/10/2011	5:43:50 AM	SiCl4 MFC set to  0.000000
1/10/2011	5:43:50 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	5:43:50 AM	Tube furnace set to 0
1/10/2011	5:44:50 AM	Helium valve closed
1/10/2011	5:44:50 AM	H2 valve closed
1/10/2011	5:44:50 AM	BCl3 valve closed
1/10/2011	5:44:50 AM	PH3 valve closed
1/10/2011	5:44:50 AM	SiCl4 pre valve closed
1/10/2011	5:44:50 AM	SiCl4 post valve closed
1/10/2011	5:44:50 AM	Bubbler valve closed
1/10/2011	5:44:50 AM	Main Vac valve opened
1/10/2011	5:44:50 AM	Bypass valve opened
1/10/2011	5:44:50 AM	Helium MFC set to  0.000000
1/10/2011	5:44:50 AM	H2 MFC set to  0.000000
1/10/2011	5:44:50 AM	BCl3 MFC set to  0.000000
1/10/2011	5:44:50 AM	PHl3 MFC set to  0.000000
1/10/2011	5:44:50 AM	SiCl4 MFC set to  0.000000
1/10/2011	5:44:50 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	5:44:50 AM	Tube furnace set to 0
1/10/2011	5:44:51 AM	Run finished at 5:44 AM
1/10/2011	5:44:51 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/10/2011	7:08:03 AM	Recipe started at 7:08 AM
1/10/2011	7:08:03 AM	Helium valve closed
1/10/2011	7:08:03 AM	BCl3 valve closed
1/10/2011	7:08:03 AM	PH3 valve closed
1/10/2011	7:08:03 AM	SiCl4 pre valve closed
1/10/2011	7:08:03 AM	SiCl4 post valve closed
1/10/2011	7:08:03 AM	Main Vac valve closed
1/10/2011	7:08:03 AM	Bypass valve closed
1/10/2011	7:08:03 AM	Bubbler valve closed
1/10/2011	7:08:03 AM	H2 valve opened
1/10/2011	7:08:03 AM	Helium MFC set to  0.000000
1/10/2011	7:08:03 AM	H2 MFC set to  500.000000
1/10/2011	7:08:03 AM	BCl3 MFC set to  0.000000
1/10/2011	7:08:03 AM	PHl3 MFC set to  0.000000
1/10/2011	7:08:03 AM	SiCl4 MFC set to  0.000000
1/10/2011	7:08:03 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	7:08:03 AM	Tube furnace set to 0
1/10/2011	7:09:25 AM	Helium valve closed
1/10/2011	7:09:25 AM	BCl3 valve closed
1/10/2011	7:09:25 AM	PH3 valve closed
1/10/2011	7:09:25 AM	SiCl4 pre valve closed
1/10/2011	7:09:25 AM	SiCl4 post valve closed
1/10/2011	7:09:25 AM	Main Vac valve closed
1/10/2011	7:09:25 AM	Bypass valve closed
1/10/2011	7:09:25 AM	H2 valve opened
1/10/2011	7:09:25 AM	Bubbler valve opened
1/10/2011	7:09:25 AM	Helium MFC set to  0.000000
1/10/2011	7:09:25 AM	H2 MFC set to  500.000000
1/10/2011	7:09:25 AM	BCl3 MFC set to  0.000000
1/10/2011	7:09:25 AM	PHl3 MFC set to  0.000000
1/10/2011	7:09:25 AM	SiCl4 MFC set to  0.000000
1/10/2011	7:09:25 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	7:09:25 AM	Tube furnace set to 1000
1/10/2011	7:29:25 AM	Helium valve closed
1/10/2011	7:29:25 AM	PH3 valve closed
1/10/2011	7:29:25 AM	Main Vac valve closed
1/10/2011	7:29:25 AM	Bypass valve closed
1/10/2011	7:29:25 AM	H2 valve opened
1/10/2011	7:29:25 AM	BCl3 valve opened
1/10/2011	7:29:25 AM	SiCl4 pre valve opened
1/10/2011	7:29:25 AM	SiCl4 post valve opened
1/10/2011	7:29:25 AM	Bubbler valve opened
1/10/2011	7:29:25 AM	Helium MFC set to  0.000000
1/10/2011	7:29:25 AM	H2 MFC set to  500.000000
1/10/2011	7:29:25 AM	BCl3 MFC set to  1.800000
1/10/2011	7:29:25 AM	PHl3 MFC set to  0.000000
1/10/2011	7:29:25 AM	SiCl4 MFC set to  50.000000
1/10/2011	7:29:25 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	7:29:25 AM	Tube furnace set to 1000
1/10/2011	7:44:25 AM	H2 valve closed
1/10/2011	7:44:25 AM	BCl3 valve closed
1/10/2011	7:44:25 AM	PH3 valve closed
1/10/2011	7:44:25 AM	SiCl4 pre valve closed
1/10/2011	7:44:25 AM	SiCl4 post valve closed
1/10/2011	7:44:25 AM	Main Vac valve closed
1/10/2011	7:44:25 AM	Bypass valve closed
1/10/2011	7:44:25 AM	Helium valve opened
1/10/2011	7:44:25 AM	Bubbler valve opened
1/10/2011	7:44:25 AM	Helium MFC set to  500.000000
1/10/2011	7:44:25 AM	H2 MFC set to  0.000000
1/10/2011	7:44:25 AM	BCl3 MFC set to  0.000000
1/10/2011	7:44:25 AM	PHl3 MFC set to  0.000000
1/10/2011	7:44:25 AM	SiCl4 MFC set to  0.000000
1/10/2011	7:44:25 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	7:44:25 AM	Tube furnace set to 0
1/10/2011	8:04:25 AM	Helium valve closed
1/10/2011	8:04:25 AM	H2 valve closed
1/10/2011	8:04:25 AM	BCl3 valve closed
1/10/2011	8:04:25 AM	PH3 valve closed
1/10/2011	8:04:25 AM	SiCl4 pre valve closed
1/10/2011	8:04:25 AM	SiCl4 post valve closed
1/10/2011	8:04:25 AM	Main Vac valve closed
1/10/2011	8:04:25 AM	Bypass valve closed
1/10/2011	8:04:25 AM	Bubbler valve closed
1/10/2011	8:04:25 AM	Helium MFC set to  0.000000
1/10/2011	8:04:25 AM	H2 MFC set to  0.000000
1/10/2011	8:04:25 AM	BCl3 MFC set to  0.000000
1/10/2011	8:04:25 AM	PHl3 MFC set to  0.000000
1/10/2011	8:04:25 AM	SiCl4 MFC set to  0.000000
1/10/2011	8:04:25 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	8:04:26 AM	Tube furnace set to 0
1/10/2011	8:04:26 AM	Run finished at 8:04 AM
1/10/2011	8:27:48 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/10/2011	8:27:49 AM	Recipe started at 8:27 AM
1/10/2011	8:27:49 AM	Helium valve closed
1/10/2011	8:27:49 AM	H2 valve closed
1/10/2011	8:27:49 AM	BCl3 valve closed
1/10/2011	8:27:49 AM	PH3 valve closed
1/10/2011	8:27:49 AM	SiCl4 pre valve closed
1/10/2011	8:27:49 AM	SiCl4 post valve closed
1/10/2011	8:27:49 AM	Main Vac valve closed
1/10/2011	8:27:49 AM	Bubbler valve closed
1/10/2011	8:27:49 AM	Bypass valve opened
1/10/2011	8:27:49 AM	Helium MFC set to  0.000000
1/10/2011	8:27:49 AM	H2 MFC set to  0.000000
1/10/2011	8:27:49 AM	BCl3 MFC set to  0.000000
1/10/2011	8:27:49 AM	PHl3 MFC set to  0.000000
1/10/2011	8:27:49 AM	SiCl4 MFC set to  0.000000
1/10/2011	8:27:49 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	8:27:49 AM	Tube furnace set to 0
1/10/2011	8:28:52 AM	Helium valve closed
1/10/2011	8:28:52 AM	H2 valve closed
1/10/2011	8:28:52 AM	BCl3 valve closed
1/10/2011	8:28:52 AM	PH3 valve closed
1/10/2011	8:28:52 AM	SiCl4 pre valve closed
1/10/2011	8:28:52 AM	SiCl4 post valve closed
1/10/2011	8:28:52 AM	Bubbler valve closed
1/10/2011	8:28:52 AM	Main Vac valve opened
1/10/2011	8:28:52 AM	Bypass valve opened
1/10/2011	8:28:52 AM	Helium MFC set to  0.000000
1/10/2011	8:28:52 AM	H2 MFC set to  0.000000
1/10/2011	8:28:52 AM	BCl3 MFC set to  0.000000
1/10/2011	8:28:52 AM	PHl3 MFC set to  0.000000
1/10/2011	8:28:52 AM	SiCl4 MFC set to  0.000000
1/10/2011	8:28:52 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	8:28:52 AM	Tube furnace set to 0
1/10/2011	8:28:52 AM	Run finished at 8:28 AM
1/10/2011	8:28:52 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/10/2011	8:30:52 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/10/2011	8:31:04 AM	Recipe started at 8:30 AM
1/10/2011	8:31:04 AM	Helium valve closed
1/10/2011	8:31:04 AM	H2 valve closed
1/10/2011	8:31:04 AM	BCl3 valve closed
1/10/2011	8:31:04 AM	PH3 valve closed
1/10/2011	8:31:04 AM	SiCl4 pre valve closed
1/10/2011	8:31:04 AM	SiCl4 post valve closed
1/10/2011	8:31:04 AM	Main Vac valve closed
1/10/2011	8:31:04 AM	Bubbler valve closed
1/10/2011	8:31:04 AM	Bypass valve opened
1/10/2011	8:31:04 AM	Helium MFC set to  0.000000
1/10/2011	8:31:04 AM	H2 MFC set to  0.000000
1/10/2011	8:31:04 AM	BCl3 MFC set to  0.000000
1/10/2011	8:31:04 AM	PHl3 MFC set to  0.000000
1/10/2011	8:31:04 AM	SiCl4 MFC set to  0.000000
1/10/2011	8:31:04 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	8:31:04 AM	Tube furnace set to 0
1/10/2011	8:31:04 AM	Helium valve closed
1/10/2011	8:31:04 AM	H2 valve closed
1/10/2011	8:31:04 AM	BCl3 valve closed
1/10/2011	8:31:04 AM	PH3 valve closed
1/10/2011	8:31:04 AM	SiCl4 pre valve closed
1/10/2011	8:31:04 AM	SiCl4 post valve closed
1/10/2011	8:31:04 AM	Bubbler valve closed
1/10/2011	8:31:04 AM	Main Vac valve opened
1/10/2011	8:31:04 AM	Bypass valve opened
1/10/2011	8:31:05 AM	Helium MFC set to  0.000000
1/10/2011	8:31:05 AM	H2 MFC set to  0.000000
1/10/2011	8:31:05 AM	BCl3 MFC set to  0.000000
1/10/2011	8:31:05 AM	PHl3 MFC set to  0.000000
1/10/2011	8:31:05 AM	SiCl4 MFC set to  0.000000
1/10/2011	8:31:05 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	8:31:05 AM	Tube furnace set to 0
1/10/2011	8:32:05 AM	H2 valve closed
1/10/2011	8:32:05 AM	BCl3 valve closed
1/10/2011	8:32:05 AM	PH3 valve closed
1/10/2011	8:32:05 AM	SiCl4 pre valve closed
1/10/2011	8:32:05 AM	SiCl4 post valve closed
1/10/2011	8:32:05 AM	Bubbler valve closed
1/10/2011	8:32:05 AM	Helium valve opened
1/10/2011	8:32:05 AM	Main Vac valve opened
1/10/2011	8:32:05 AM	Bypass valve opened
1/10/2011	8:32:05 AM	Helium MFC set to  100.000000
1/10/2011	8:32:05 AM	H2 MFC set to  0.000000
1/10/2011	8:32:05 AM	BCl3 MFC set to  0.000000
1/10/2011	8:32:05 AM	PHl3 MFC set to  0.000000
1/10/2011	8:32:05 AM	SiCl4 MFC set to  0.000000
1/10/2011	8:32:05 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	8:32:05 AM	Tube furnace set to 0
1/10/2011	8:33:05 AM	Helium valve closed
1/10/2011	8:33:05 AM	H2 valve closed
1/10/2011	8:33:05 AM	BCl3 valve closed
1/10/2011	8:33:05 AM	PH3 valve closed
1/10/2011	8:33:05 AM	SiCl4 pre valve closed
1/10/2011	8:33:05 AM	SiCl4 post valve closed
1/10/2011	8:33:05 AM	Bubbler valve closed
1/10/2011	8:33:05 AM	Main Vac valve opened
1/10/2011	8:33:05 AM	Bypass valve opened
1/10/2011	8:33:05 AM	Helium MFC set to  0.000000
1/10/2011	8:33:05 AM	H2 MFC set to  0.000000
1/10/2011	8:33:05 AM	BCl3 MFC set to  0.000000
1/10/2011	8:33:05 AM	PHl3 MFC set to  0.000000
1/10/2011	8:33:05 AM	SiCl4 MFC set to  0.000000
1/10/2011	8:33:05 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	8:33:05 AM	Tube furnace set to 0
1/10/2011	8:34:05 AM	H2 valve closed
1/10/2011	8:34:05 AM	BCl3 valve closed
1/10/2011	8:34:05 AM	PH3 valve closed
1/10/2011	8:34:05 AM	SiCl4 pre valve closed
1/10/2011	8:34:05 AM	SiCl4 post valve closed
1/10/2011	8:34:05 AM	Bubbler valve closed
1/10/2011	8:34:05 AM	Helium valve opened
1/10/2011	8:34:05 AM	Main Vac valve opened
1/10/2011	8:34:05 AM	Bypass valve opened
1/10/2011	8:34:05 AM	Helium MFC set to  100.000000
1/10/2011	8:34:05 AM	H2 MFC set to  0.000000
1/10/2011	8:34:05 AM	BCl3 MFC set to  0.000000
1/10/2011	8:34:05 AM	PHl3 MFC set to  0.000000
1/10/2011	8:34:05 AM	SiCl4 MFC set to  0.000000
1/10/2011	8:34:05 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	8:34:05 AM	Tube furnace set to 0
1/10/2011	8:35:05 AM	Helium valve closed
1/10/2011	8:35:05 AM	H2 valve closed
1/10/2011	8:35:05 AM	BCl3 valve closed
1/10/2011	8:35:05 AM	PH3 valve closed
1/10/2011	8:35:05 AM	SiCl4 pre valve closed
1/10/2011	8:35:05 AM	SiCl4 post valve closed
1/10/2011	8:35:05 AM	Bubbler valve closed
1/10/2011	8:35:05 AM	Main Vac valve opened
1/10/2011	8:35:05 AM	Bypass valve opened
1/10/2011	8:35:05 AM	Helium MFC set to  0.000000
1/10/2011	8:35:05 AM	H2 MFC set to  0.000000
1/10/2011	8:35:05 AM	BCl3 MFC set to  0.000000
1/10/2011	8:35:05 AM	PHl3 MFC set to  0.000000
1/10/2011	8:35:05 AM	SiCl4 MFC set to  0.000000
1/10/2011	8:35:05 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	8:35:05 AM	Tube furnace set to 0
1/10/2011	8:36:06 AM	H2 valve closed
1/10/2011	8:36:06 AM	BCl3 valve closed
1/10/2011	8:36:06 AM	PH3 valve closed
1/10/2011	8:36:06 AM	SiCl4 pre valve closed
1/10/2011	8:36:06 AM	SiCl4 post valve closed
1/10/2011	8:36:06 AM	Bubbler valve closed
1/10/2011	8:36:06 AM	Helium valve opened
1/10/2011	8:36:06 AM	Main Vac valve opened
1/10/2011	8:36:06 AM	Bypass valve opened
1/10/2011	8:36:06 AM	Helium MFC set to  100.000000
1/10/2011	8:36:06 AM	H2 MFC set to  0.000000
1/10/2011	8:36:06 AM	BCl3 MFC set to  0.000000
1/10/2011	8:36:06 AM	PHl3 MFC set to  0.000000
1/10/2011	8:36:06 AM	SiCl4 MFC set to  0.000000
1/10/2011	8:36:06 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	8:36:06 AM	Tube furnace set to 0
1/10/2011	8:37:06 AM	Helium valve closed
1/10/2011	8:37:06 AM	H2 valve closed
1/10/2011	8:37:06 AM	BCl3 valve closed
1/10/2011	8:37:06 AM	PH3 valve closed
1/10/2011	8:37:06 AM	SiCl4 pre valve closed
1/10/2011	8:37:06 AM	SiCl4 post valve closed
1/10/2011	8:37:06 AM	Bubbler valve closed
1/10/2011	8:37:06 AM	Main Vac valve opened
1/10/2011	8:37:06 AM	Bypass valve opened
1/10/2011	8:37:06 AM	Helium MFC set to  0.000000
1/10/2011	8:37:06 AM	H2 MFC set to  0.000000
1/10/2011	8:37:06 AM	BCl3 MFC set to  0.000000
1/10/2011	8:37:06 AM	PHl3 MFC set to  0.000000
1/10/2011	8:37:06 AM	SiCl4 MFC set to  0.000000
1/10/2011	8:37:06 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	8:37:06 AM	Tube furnace set to 0
1/10/2011	8:38:06 AM	H2 valve closed
1/10/2011	8:38:06 AM	BCl3 valve closed
1/10/2011	8:38:06 AM	PH3 valve closed
1/10/2011	8:38:06 AM	SiCl4 pre valve closed
1/10/2011	8:38:06 AM	SiCl4 post valve closed
1/10/2011	8:38:06 AM	Bubbler valve closed
1/10/2011	8:38:06 AM	Helium valve opened
1/10/2011	8:38:06 AM	Main Vac valve opened
1/10/2011	8:38:06 AM	Bypass valve opened
1/10/2011	8:38:06 AM	Helium MFC set to  100.000000
1/10/2011	8:38:06 AM	H2 MFC set to  0.000000
1/10/2011	8:38:06 AM	BCl3 MFC set to  0.000000
1/10/2011	8:38:06 AM	PHl3 MFC set to  0.000000
1/10/2011	8:38:06 AM	SiCl4 MFC set to  0.000000
1/10/2011	8:38:06 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	8:38:06 AM	Tube furnace set to 0
1/10/2011	8:39:06 AM	Helium valve closed
1/10/2011	8:39:06 AM	H2 valve closed
1/10/2011	8:39:06 AM	BCl3 valve closed
1/10/2011	8:39:06 AM	PH3 valve closed
1/10/2011	8:39:06 AM	SiCl4 pre valve closed
1/10/2011	8:39:06 AM	SiCl4 post valve closed
1/10/2011	8:39:06 AM	Bubbler valve closed
1/10/2011	8:39:06 AM	Main Vac valve opened
1/10/2011	8:39:06 AM	Bypass valve opened
1/10/2011	8:39:06 AM	Helium MFC set to  0.000000
1/10/2011	8:39:06 AM	H2 MFC set to  0.000000
1/10/2011	8:39:06 AM	BCl3 MFC set to  0.000000
1/10/2011	8:39:06 AM	PHl3 MFC set to  0.000000
1/10/2011	8:39:06 AM	SiCl4 MFC set to  0.000000
1/10/2011	8:39:06 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	8:39:06 AM	Tube furnace set to 0
1/10/2011	8:40:06 AM	H2 valve closed
1/10/2011	8:40:06 AM	BCl3 valve closed
1/10/2011	8:40:06 AM	PH3 valve closed
1/10/2011	8:40:06 AM	SiCl4 pre valve closed
1/10/2011	8:40:06 AM	SiCl4 post valve closed
1/10/2011	8:40:06 AM	Bubbler valve closed
1/10/2011	8:40:06 AM	Helium valve opened
1/10/2011	8:40:06 AM	Main Vac valve opened
1/10/2011	8:40:06 AM	Bypass valve opened
1/10/2011	8:40:06 AM	Helium MFC set to  100.000000
1/10/2011	8:40:06 AM	H2 MFC set to  0.000000
1/10/2011	8:40:06 AM	BCl3 MFC set to  0.000000
1/10/2011	8:40:06 AM	PHl3 MFC set to  0.000000
1/10/2011	8:40:06 AM	SiCl4 MFC set to  0.000000
1/10/2011	8:40:06 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	8:40:06 AM	Tube furnace set to 0
1/10/2011	8:41:07 AM	Helium valve closed
1/10/2011	8:41:07 AM	H2 valve closed
1/10/2011	8:41:07 AM	BCl3 valve closed
1/10/2011	8:41:07 AM	PH3 valve closed
1/10/2011	8:41:07 AM	SiCl4 pre valve closed
1/10/2011	8:41:07 AM	SiCl4 post valve closed
1/10/2011	8:41:07 AM	Bubbler valve closed
1/10/2011	8:41:07 AM	Main Vac valve opened
1/10/2011	8:41:07 AM	Bypass valve opened
1/10/2011	8:41:07 AM	Helium MFC set to  0.000000
1/10/2011	8:41:07 AM	H2 MFC set to  0.000000
1/10/2011	8:41:07 AM	BCl3 MFC set to  0.000000
1/10/2011	8:41:07 AM	PHl3 MFC set to  0.000000
1/10/2011	8:41:07 AM	SiCl4 MFC set to  0.000000
1/10/2011	8:41:07 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	8:41:07 AM	Tube furnace set to 0
1/10/2011	8:42:07 AM	H2 valve closed
1/10/2011	8:42:07 AM	BCl3 valve closed
1/10/2011	8:42:07 AM	PH3 valve closed
1/10/2011	8:42:07 AM	SiCl4 pre valve closed
1/10/2011	8:42:07 AM	SiCl4 post valve closed
1/10/2011	8:42:07 AM	Bubbler valve closed
1/10/2011	8:42:07 AM	Helium valve opened
1/10/2011	8:42:07 AM	Main Vac valve opened
1/10/2011	8:42:07 AM	Bypass valve opened
1/10/2011	8:42:07 AM	Helium MFC set to  100.000000
1/10/2011	8:42:07 AM	H2 MFC set to  0.000000
1/10/2011	8:42:07 AM	BCl3 MFC set to  0.000000
1/10/2011	8:42:07 AM	PHl3 MFC set to  0.000000
1/10/2011	8:42:07 AM	SiCl4 MFC set to  0.000000
1/10/2011	8:42:07 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	8:42:07 AM	Tube furnace set to 0
1/10/2011	8:43:07 AM	Helium valve closed
1/10/2011	8:43:07 AM	H2 valve closed
1/10/2011	8:43:07 AM	BCl3 valve closed
1/10/2011	8:43:07 AM	PH3 valve closed
1/10/2011	8:43:07 AM	SiCl4 pre valve closed
1/10/2011	8:43:07 AM	SiCl4 post valve closed
1/10/2011	8:43:07 AM	Bubbler valve closed
1/10/2011	8:43:07 AM	Main Vac valve opened
1/10/2011	8:43:07 AM	Bypass valve opened
1/10/2011	8:43:07 AM	Helium MFC set to  0.000000
1/10/2011	8:43:07 AM	H2 MFC set to  0.000000
1/10/2011	8:43:07 AM	BCl3 MFC set to  0.000000
1/10/2011	8:43:07 AM	PHl3 MFC set to  0.000000
1/10/2011	8:43:07 AM	SiCl4 MFC set to  0.000000
1/10/2011	8:43:07 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	8:43:07 AM	Tube furnace set to 0
1/10/2011	8:44:07 AM	H2 valve closed
1/10/2011	8:44:07 AM	BCl3 valve closed
1/10/2011	8:44:07 AM	PH3 valve closed
1/10/2011	8:44:07 AM	SiCl4 pre valve closed
1/10/2011	8:44:07 AM	SiCl4 post valve closed
1/10/2011	8:44:07 AM	Bubbler valve closed
1/10/2011	8:44:07 AM	Helium valve opened
1/10/2011	8:44:07 AM	Main Vac valve opened
1/10/2011	8:44:07 AM	Bypass valve opened
1/10/2011	8:44:07 AM	Helium MFC set to  100.000000
1/10/2011	8:44:07 AM	H2 MFC set to  0.000000
1/10/2011	8:44:07 AM	BCl3 MFC set to  0.000000
1/10/2011	8:44:07 AM	PHl3 MFC set to  0.000000
1/10/2011	8:44:07 AM	SiCl4 MFC set to  0.000000
1/10/2011	8:44:07 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	8:44:07 AM	Tube furnace set to 0
1/10/2011	8:45:07 AM	Helium valve closed
1/10/2011	8:45:07 AM	H2 valve closed
1/10/2011	8:45:07 AM	BCl3 valve closed
1/10/2011	8:45:07 AM	PH3 valve closed
1/10/2011	8:45:07 AM	SiCl4 pre valve closed
1/10/2011	8:45:07 AM	SiCl4 post valve closed
1/10/2011	8:45:07 AM	Bubbler valve closed
1/10/2011	8:45:07 AM	Main Vac valve opened
1/10/2011	8:45:07 AM	Bypass valve opened
1/10/2011	8:45:07 AM	Helium MFC set to  0.000000
1/10/2011	8:45:07 AM	H2 MFC set to  0.000000
1/10/2011	8:45:07 AM	BCl3 MFC set to  0.000000
1/10/2011	8:45:07 AM	PHl3 MFC set to  0.000000
1/10/2011	8:45:07 AM	SiCl4 MFC set to  0.000000
1/10/2011	8:45:07 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	8:45:08 AM	Tube furnace set to 0
1/10/2011	8:46:08 AM	H2 valve closed
1/10/2011	8:46:08 AM	BCl3 valve closed
1/10/2011	8:46:08 AM	PH3 valve closed
1/10/2011	8:46:08 AM	SiCl4 pre valve closed
1/10/2011	8:46:08 AM	SiCl4 post valve closed
1/10/2011	8:46:08 AM	Bubbler valve closed
1/10/2011	8:46:08 AM	Helium valve opened
1/10/2011	8:46:08 AM	Main Vac valve opened
1/10/2011	8:46:08 AM	Bypass valve opened
1/10/2011	8:46:08 AM	Helium MFC set to  100.000000
1/10/2011	8:46:08 AM	H2 MFC set to  0.000000
1/10/2011	8:46:08 AM	BCl3 MFC set to  0.000000
1/10/2011	8:46:08 AM	PHl3 MFC set to  0.000000
1/10/2011	8:46:08 AM	SiCl4 MFC set to  0.000000
1/10/2011	8:46:08 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	8:46:08 AM	Tube furnace set to 0
1/10/2011	8:47:08 AM	Helium valve closed
1/10/2011	8:47:08 AM	H2 valve closed
1/10/2011	8:47:08 AM	BCl3 valve closed
1/10/2011	8:47:08 AM	PH3 valve closed
1/10/2011	8:47:08 AM	SiCl4 pre valve closed
1/10/2011	8:47:08 AM	SiCl4 post valve closed
1/10/2011	8:47:08 AM	Bubbler valve closed
1/10/2011	8:47:08 AM	Main Vac valve opened
1/10/2011	8:47:08 AM	Bypass valve opened
1/10/2011	8:47:08 AM	Helium MFC set to  0.000000
1/10/2011	8:47:08 AM	H2 MFC set to  0.000000
1/10/2011	8:47:08 AM	BCl3 MFC set to  0.000000
1/10/2011	8:47:08 AM	PHl3 MFC set to  0.000000
1/10/2011	8:47:08 AM	SiCl4 MFC set to  0.000000
1/10/2011	8:47:08 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	8:47:08 AM	Tube furnace set to 0
1/10/2011	8:48:08 AM	H2 valve closed
1/10/2011	8:48:08 AM	BCl3 valve closed
1/10/2011	8:48:08 AM	PH3 valve closed
1/10/2011	8:48:08 AM	SiCl4 pre valve closed
1/10/2011	8:48:08 AM	SiCl4 post valve closed
1/10/2011	8:48:08 AM	Bubbler valve closed
1/10/2011	8:48:08 AM	Helium valve opened
1/10/2011	8:48:08 AM	Main Vac valve opened
1/10/2011	8:48:08 AM	Bypass valve opened
1/10/2011	8:48:08 AM	Helium MFC set to  100.000000
1/10/2011	8:48:08 AM	H2 MFC set to  0.000000
1/10/2011	8:48:08 AM	BCl3 MFC set to  0.000000
1/10/2011	8:48:08 AM	PHl3 MFC set to  0.000000
1/10/2011	8:48:08 AM	SiCl4 MFC set to  0.000000
1/10/2011	8:48:08 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	8:48:08 AM	Tube furnace set to 0
1/10/2011	8:49:08 AM	Helium valve closed
1/10/2011	8:49:08 AM	H2 valve closed
1/10/2011	8:49:08 AM	BCl3 valve closed
1/10/2011	8:49:08 AM	PH3 valve closed
1/10/2011	8:49:08 AM	SiCl4 pre valve closed
1/10/2011	8:49:08 AM	SiCl4 post valve closed
1/10/2011	8:49:08 AM	Bubbler valve closed
1/10/2011	8:49:08 AM	Main Vac valve opened
1/10/2011	8:49:08 AM	Bypass valve opened
1/10/2011	8:49:08 AM	Helium MFC set to  0.000000
1/10/2011	8:49:08 AM	H2 MFC set to  0.000000
1/10/2011	8:49:08 AM	BCl3 MFC set to  0.000000
1/10/2011	8:49:08 AM	PHl3 MFC set to  0.000000
1/10/2011	8:49:08 AM	SiCl4 MFC set to  0.000000
1/10/2011	8:49:08 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	8:49:08 AM	Tube furnace set to 0
1/10/2011	8:50:08 AM	H2 valve closed
1/10/2011	8:50:08 AM	BCl3 valve closed
1/10/2011	8:50:08 AM	PH3 valve closed
1/10/2011	8:50:08 AM	SiCl4 pre valve closed
1/10/2011	8:50:08 AM	SiCl4 post valve closed
1/10/2011	8:50:08 AM	Bubbler valve closed
1/10/2011	8:50:09 AM	Helium valve opened
1/10/2011	8:50:09 AM	Main Vac valve opened
1/10/2011	8:50:09 AM	Bypass valve opened
1/10/2011	8:50:09 AM	Helium MFC set to  100.000000
1/10/2011	8:50:09 AM	H2 MFC set to  0.000000
1/10/2011	8:50:09 AM	BCl3 MFC set to  0.000000
1/10/2011	8:50:09 AM	PHl3 MFC set to  0.000000
1/10/2011	8:50:09 AM	SiCl4 MFC set to  0.000000
1/10/2011	8:50:09 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	8:50:09 AM	Tube furnace set to 0
1/10/2011	8:51:09 AM	Helium valve closed
1/10/2011	8:51:09 AM	H2 valve closed
1/10/2011	8:51:09 AM	BCl3 valve closed
1/10/2011	8:51:09 AM	PH3 valve closed
1/10/2011	8:51:09 AM	SiCl4 pre valve closed
1/10/2011	8:51:09 AM	SiCl4 post valve closed
1/10/2011	8:51:09 AM	Bubbler valve closed
1/10/2011	8:51:09 AM	Main Vac valve opened
1/10/2011	8:51:09 AM	Bypass valve opened
1/10/2011	8:51:09 AM	Helium MFC set to  0.000000
1/10/2011	8:51:09 AM	H2 MFC set to  0.000000
1/10/2011	8:51:09 AM	BCl3 MFC set to  0.000000
1/10/2011	8:51:09 AM	PHl3 MFC set to  0.000000
1/10/2011	8:51:09 AM	SiCl4 MFC set to  0.000000
1/10/2011	8:51:09 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	8:51:09 AM	Tube furnace set to 0
1/10/2011	8:51:10 AM	Run finished at 8:51 AM
1/10/2011	8:51:10 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/10/2011	9:55:47 AM	Recipe started at 9:55 AM
1/10/2011	9:55:47 AM	Helium valve closed
1/10/2011	9:55:47 AM	BCl3 valve closed
1/10/2011	9:55:47 AM	PH3 valve closed
1/10/2011	9:55:47 AM	SiCl4 pre valve closed
1/10/2011	9:55:47 AM	SiCl4 post valve closed
1/10/2011	9:55:47 AM	Main Vac valve closed
1/10/2011	9:55:47 AM	Bypass valve closed
1/10/2011	9:55:47 AM	Bubbler valve closed
1/10/2011	9:55:47 AM	H2 valve opened
1/10/2011	9:55:47 AM	Helium MFC set to  0.000000
1/10/2011	9:55:47 AM	H2 MFC set to  500.000000
1/10/2011	9:55:47 AM	BCl3 MFC set to  0.000000
1/10/2011	9:55:47 AM	PHl3 MFC set to  0.000000
1/10/2011	9:55:47 AM	SiCl4 MFC set to  0.000000
1/10/2011	9:55:47 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	9:55:47 AM	Tube furnace set to 0
1/10/2011	9:57:08 AM	Helium valve closed
1/10/2011	9:57:08 AM	BCl3 valve closed
1/10/2011	9:57:08 AM	PH3 valve closed
1/10/2011	9:57:08 AM	SiCl4 pre valve closed
1/10/2011	9:57:08 AM	SiCl4 post valve closed
1/10/2011	9:57:08 AM	Main Vac valve closed
1/10/2011	9:57:08 AM	Bypass valve closed
1/10/2011	9:57:08 AM	H2 valve opened
1/10/2011	9:57:08 AM	Bubbler valve opened
1/10/2011	9:57:08 AM	Helium MFC set to  0.000000
1/10/2011	9:57:08 AM	H2 MFC set to  500.000000
1/10/2011	9:57:08 AM	BCl3 MFC set to  0.000000
1/10/2011	9:57:08 AM	PHl3 MFC set to  0.000000
1/10/2011	9:57:08 AM	SiCl4 MFC set to  0.000000
1/10/2011	9:57:08 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	9:57:08 AM	Tube furnace set to 1000
1/10/2011	10:17:08 AM	Helium valve closed
1/10/2011	10:17:08 AM	PH3 valve closed
1/10/2011	10:17:08 AM	Main Vac valve closed
1/10/2011	10:17:08 AM	Bypass valve closed
1/10/2011	10:17:08 AM	H2 valve opened
1/10/2011	10:17:08 AM	BCl3 valve opened
1/10/2011	10:17:08 AM	SiCl4 pre valve opened
1/10/2011	10:17:08 AM	SiCl4 post valve opened
1/10/2011	10:17:08 AM	Bubbler valve opened
1/10/2011	10:17:08 AM	Helium MFC set to  0.000000
1/10/2011	10:17:08 AM	H2 MFC set to  500.000000
1/10/2011	10:17:08 AM	BCl3 MFC set to  1.800000
1/10/2011	10:17:08 AM	PHl3 MFC set to  0.000000
1/10/2011	10:17:08 AM	SiCl4 MFC set to  50.000000
1/10/2011	10:17:08 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	10:17:09 AM	Tube furnace set to 1000
1/10/2011	10:37:09 AM	H2 valve closed
1/10/2011	10:37:09 AM	BCl3 valve closed
1/10/2011	10:37:09 AM	PH3 valve closed
1/10/2011	10:37:09 AM	SiCl4 pre valve closed
1/10/2011	10:37:09 AM	SiCl4 post valve closed
1/10/2011	10:37:09 AM	Main Vac valve closed
1/10/2011	10:37:09 AM	Bypass valve closed
1/10/2011	10:37:09 AM	Helium valve opened
1/10/2011	10:37:09 AM	Bubbler valve opened
1/10/2011	10:37:09 AM	Helium MFC set to  500.000000
1/10/2011	10:37:09 AM	H2 MFC set to  0.000000
1/10/2011	10:37:09 AM	BCl3 MFC set to  0.000000
1/10/2011	10:37:09 AM	PHl3 MFC set to  0.000000
1/10/2011	10:37:09 AM	SiCl4 MFC set to  0.000000
1/10/2011	10:37:09 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	10:37:09 AM	Tube furnace set to 0
1/10/2011	10:57:09 AM	Helium valve closed
1/10/2011	10:57:09 AM	H2 valve closed
1/10/2011	10:57:09 AM	BCl3 valve closed
1/10/2011	10:57:09 AM	PH3 valve closed
1/10/2011	10:57:09 AM	SiCl4 pre valve closed
1/10/2011	10:57:09 AM	SiCl4 post valve closed
1/10/2011	10:57:09 AM	Main Vac valve closed
1/10/2011	10:57:09 AM	Bypass valve closed
1/10/2011	10:57:09 AM	Bubbler valve closed
1/10/2011	10:57:09 AM	Helium MFC set to  0.000000
1/10/2011	10:57:09 AM	H2 MFC set to  0.000000
1/10/2011	10:57:09 AM	BCl3 MFC set to  0.000000
1/10/2011	10:57:09 AM	PHl3 MFC set to  0.000000
1/10/2011	10:57:09 AM	SiCl4 MFC set to  0.000000
1/10/2011	10:57:09 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	10:57:09 AM	Tube furnace set to 0
1/10/2011	10:57:09 AM	Run finished at 10:57 AM
1/10/2011	11:15:24 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/10/2011	11:15:24 AM	Recipe started at 11:15 AM
1/10/2011	11:15:24 AM	H2 valve closed
1/10/2011	11:15:24 AM	BCl3 valve closed
1/10/2011	11:15:24 AM	PH3 valve closed
1/10/2011	11:15:24 AM	SiCl4 pre valve closed
1/10/2011	11:15:24 AM	SiCl4 post valve closed
1/10/2011	11:15:24 AM	Main Vac valve closed
1/10/2011	11:15:24 AM	Bypass valve closed
1/10/2011	11:15:24 AM	Bubbler valve closed
1/10/2011	11:15:24 AM	Helium valve opened
1/10/2011	11:15:24 AM	Helium MFC set to  500.000000
1/10/2011	11:15:24 AM	H2 MFC set to  0.000000
1/10/2011	11:15:24 AM	BCl3 MFC set to  0.000000
1/10/2011	11:15:24 AM	PHl3 MFC set to  0.000000
1/10/2011	11:15:24 AM	SiCl4 MFC set to  0.000000
1/10/2011	11:15:24 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	11:15:24 AM	Tube furnace set to 0
1/10/2011	11:15:31 AM	Helium valve closed
1/10/2011	11:15:31 AM	H2 valve closed
1/10/2011	11:15:31 AM	BCl3 valve closed
1/10/2011	11:15:31 AM	PH3 valve closed
1/10/2011	11:15:31 AM	SiCl4 pre valve closed
1/10/2011	11:15:31 AM	SiCl4 post valve closed
1/10/2011	11:15:31 AM	Main Vac valve closed
1/10/2011	11:15:31 AM	Bypass valve closed
1/10/2011	11:15:31 AM	Bubbler valve closed
1/10/2011	11:15:31 AM	Helium MFC set to  0.000000
1/10/2011	11:15:31 AM	H2 MFC set to  0.000000
1/10/2011	11:15:31 AM	BCl3 MFC set to  0.000000
1/10/2011	11:15:31 AM	PHl3 MFC set to  0.000000
1/10/2011	11:15:31 AM	SiCl4 MFC set to  0.000000
1/10/2011	11:15:31 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	11:15:31 AM	Tube furnace set to 0
1/10/2011	11:15:32 AM	Run finished at 11:15 AM
1/10/2011	11:15:32 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/10/2011	11:33:19 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/10/2011	11:33:19 AM	Recipe started at 11:33 AM
1/10/2011	11:33:19 AM	Helium valve closed
1/10/2011	11:33:19 AM	H2 valve closed
1/10/2011	11:33:19 AM	BCl3 valve closed
1/10/2011	11:33:19 AM	PH3 valve closed
1/10/2011	11:33:19 AM	SiCl4 pre valve closed
1/10/2011	11:33:19 AM	SiCl4 post valve closed
1/10/2011	11:33:19 AM	Main Vac valve closed
1/10/2011	11:33:19 AM	Bubbler valve closed
1/10/2011	11:33:19 AM	Bypass valve opened
1/10/2011	11:33:19 AM	Helium MFC set to  0.000000
1/10/2011	11:33:19 AM	H2 MFC set to  0.000000
1/10/2011	11:33:19 AM	BCl3 MFC set to  0.000000
1/10/2011	11:33:19 AM	PHl3 MFC set to  0.000000
1/10/2011	11:33:19 AM	SiCl4 MFC set to  0.000000
1/10/2011	11:33:19 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	11:33:20 AM	Tube furnace set to 0
1/10/2011	11:34:22 AM	Helium valve closed
1/10/2011	11:34:22 AM	H2 valve closed
1/10/2011	11:34:22 AM	BCl3 valve closed
1/10/2011	11:34:22 AM	PH3 valve closed
1/10/2011	11:34:22 AM	SiCl4 pre valve closed
1/10/2011	11:34:22 AM	SiCl4 post valve closed
1/10/2011	11:34:22 AM	Bubbler valve closed
1/10/2011	11:34:22 AM	Main Vac valve opened
1/10/2011	11:34:22 AM	Bypass valve opened
1/10/2011	11:34:22 AM	Helium MFC set to  0.000000
1/10/2011	11:34:22 AM	H2 MFC set to  0.000000
1/10/2011	11:34:22 AM	BCl3 MFC set to  0.000000
1/10/2011	11:34:22 AM	PHl3 MFC set to  0.000000
1/10/2011	11:34:22 AM	SiCl4 MFC set to  0.000000
1/10/2011	11:34:22 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	11:34:22 AM	Tube furnace set to 0
1/10/2011	11:34:22 AM	Run finished at 11:34 AM
1/10/2011	11:34:22 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/10/2011	11:49:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/10/2011	11:49:51 AM	Recipe started at 11:49 AM
1/10/2011	11:49:51 AM	Helium valve closed
1/10/2011	11:49:51 AM	H2 valve closed
1/10/2011	11:49:51 AM	BCl3 valve closed
1/10/2011	11:49:51 AM	PH3 valve closed
1/10/2011	11:49:51 AM	SiCl4 pre valve closed
1/10/2011	11:49:51 AM	SiCl4 post valve closed
1/10/2011	11:49:51 AM	Main Vac valve closed
1/10/2011	11:49:51 AM	Bubbler valve closed
1/10/2011	11:49:51 AM	Bypass valve opened
1/10/2011	11:49:51 AM	Helium MFC set to  0.000000
1/10/2011	11:49:51 AM	H2 MFC set to  0.000000
1/10/2011	11:49:51 AM	BCl3 MFC set to  0.000000
1/10/2011	11:49:51 AM	PHl3 MFC set to  0.000000
1/10/2011	11:49:51 AM	SiCl4 MFC set to  0.000000
1/10/2011	11:49:51 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	11:49:51 AM	Tube furnace set to 0
1/10/2011	11:49:52 AM	Helium valve closed
1/10/2011	11:49:52 AM	H2 valve closed
1/10/2011	11:49:52 AM	BCl3 valve closed
1/10/2011	11:49:52 AM	PH3 valve closed
1/10/2011	11:49:52 AM	SiCl4 pre valve closed
1/10/2011	11:49:52 AM	SiCl4 post valve closed
1/10/2011	11:49:52 AM	Bubbler valve closed
1/10/2011	11:49:52 AM	Main Vac valve opened
1/10/2011	11:49:52 AM	Bypass valve opened
1/10/2011	11:49:52 AM	Helium MFC set to  0.000000
1/10/2011	11:49:52 AM	H2 MFC set to  0.000000
1/10/2011	11:49:52 AM	BCl3 MFC set to  0.000000
1/10/2011	11:49:52 AM	PHl3 MFC set to  0.000000
1/10/2011	11:49:52 AM	SiCl4 MFC set to  0.000000
1/10/2011	11:49:52 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	11:49:52 AM	Tube furnace set to 0
1/10/2011	11:50:52 AM	H2 valve closed
1/10/2011	11:50:52 AM	BCl3 valve closed
1/10/2011	11:50:52 AM	PH3 valve closed
1/10/2011	11:50:52 AM	SiCl4 pre valve closed
1/10/2011	11:50:52 AM	SiCl4 post valve closed
1/10/2011	11:50:52 AM	Bubbler valve closed
1/10/2011	11:50:52 AM	Helium valve opened
1/10/2011	11:50:52 AM	Main Vac valve opened
1/10/2011	11:50:52 AM	Bypass valve opened
1/10/2011	11:50:52 AM	Helium MFC set to  100.000000
1/10/2011	11:50:52 AM	H2 MFC set to  0.000000
1/10/2011	11:50:52 AM	BCl3 MFC set to  0.000000
1/10/2011	11:50:52 AM	PHl3 MFC set to  0.000000
1/10/2011	11:50:52 AM	SiCl4 MFC set to  0.000000
1/10/2011	11:50:52 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	11:50:52 AM	Tube furnace set to 0
1/10/2011	11:51:52 AM	Helium valve closed
1/10/2011	11:51:52 AM	H2 valve closed
1/10/2011	11:51:52 AM	BCl3 valve closed
1/10/2011	11:51:52 AM	PH3 valve closed
1/10/2011	11:51:52 AM	SiCl4 pre valve closed
1/10/2011	11:51:52 AM	SiCl4 post valve closed
1/10/2011	11:51:52 AM	Bubbler valve closed
1/10/2011	11:51:52 AM	Main Vac valve opened
1/10/2011	11:51:52 AM	Bypass valve opened
1/10/2011	11:51:52 AM	Helium MFC set to  0.000000
1/10/2011	11:51:52 AM	H2 MFC set to  0.000000
1/10/2011	11:51:52 AM	BCl3 MFC set to  0.000000
1/10/2011	11:51:52 AM	PHl3 MFC set to  0.000000
1/10/2011	11:51:52 AM	SiCl4 MFC set to  0.000000
1/10/2011	11:51:52 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	11:51:52 AM	Tube furnace set to 0
1/10/2011	11:52:52 AM	H2 valve closed
1/10/2011	11:52:52 AM	BCl3 valve closed
1/10/2011	11:52:52 AM	PH3 valve closed
1/10/2011	11:52:52 AM	SiCl4 pre valve closed
1/10/2011	11:52:52 AM	SiCl4 post valve closed
1/10/2011	11:52:52 AM	Bubbler valve closed
1/10/2011	11:52:52 AM	Helium valve opened
1/10/2011	11:52:52 AM	Main Vac valve opened
1/10/2011	11:52:52 AM	Bypass valve opened
1/10/2011	11:52:52 AM	Helium MFC set to  100.000000
1/10/2011	11:52:52 AM	H2 MFC set to  0.000000
1/10/2011	11:52:52 AM	BCl3 MFC set to  0.000000
1/10/2011	11:52:52 AM	PHl3 MFC set to  0.000000
1/10/2011	11:52:52 AM	SiCl4 MFC set to  0.000000
1/10/2011	11:52:52 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	11:52:52 AM	Tube furnace set to 0
1/10/2011	11:53:52 AM	Helium valve closed
1/10/2011	11:53:52 AM	H2 valve closed
1/10/2011	11:53:52 AM	BCl3 valve closed
1/10/2011	11:53:52 AM	PH3 valve closed
1/10/2011	11:53:52 AM	SiCl4 pre valve closed
1/10/2011	11:53:52 AM	SiCl4 post valve closed
1/10/2011	11:53:52 AM	Bubbler valve closed
1/10/2011	11:53:52 AM	Main Vac valve opened
1/10/2011	11:53:52 AM	Bypass valve opened
1/10/2011	11:53:52 AM	Helium MFC set to  0.000000
1/10/2011	11:53:52 AM	H2 MFC set to  0.000000
1/10/2011	11:53:52 AM	BCl3 MFC set to  0.000000
1/10/2011	11:53:52 AM	PHl3 MFC set to  0.000000
1/10/2011	11:53:52 AM	SiCl4 MFC set to  0.000000
1/10/2011	11:53:52 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	11:53:53 AM	Tube furnace set to 0
1/10/2011	11:54:53 AM	H2 valve closed
1/10/2011	11:54:53 AM	BCl3 valve closed
1/10/2011	11:54:53 AM	PH3 valve closed
1/10/2011	11:54:53 AM	SiCl4 pre valve closed
1/10/2011	11:54:53 AM	SiCl4 post valve closed
1/10/2011	11:54:53 AM	Bubbler valve closed
1/10/2011	11:54:53 AM	Helium valve opened
1/10/2011	11:54:53 AM	Main Vac valve opened
1/10/2011	11:54:53 AM	Bypass valve opened
1/10/2011	11:54:53 AM	Helium MFC set to  100.000000
1/10/2011	11:54:53 AM	H2 MFC set to  0.000000
1/10/2011	11:54:53 AM	BCl3 MFC set to  0.000000
1/10/2011	11:54:53 AM	PHl3 MFC set to  0.000000
1/10/2011	11:54:53 AM	SiCl4 MFC set to  0.000000
1/10/2011	11:54:53 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	11:54:53 AM	Tube furnace set to 0
1/10/2011	11:55:53 AM	Helium valve closed
1/10/2011	11:55:53 AM	H2 valve closed
1/10/2011	11:55:53 AM	BCl3 valve closed
1/10/2011	11:55:53 AM	PH3 valve closed
1/10/2011	11:55:53 AM	SiCl4 pre valve closed
1/10/2011	11:55:53 AM	SiCl4 post valve closed
1/10/2011	11:55:53 AM	Bubbler valve closed
1/10/2011	11:55:53 AM	Main Vac valve opened
1/10/2011	11:55:53 AM	Bypass valve opened
1/10/2011	11:55:53 AM	Helium MFC set to  0.000000
1/10/2011	11:55:53 AM	H2 MFC set to  0.000000
1/10/2011	11:55:53 AM	BCl3 MFC set to  0.000000
1/10/2011	11:55:53 AM	PHl3 MFC set to  0.000000
1/10/2011	11:55:53 AM	SiCl4 MFC set to  0.000000
1/10/2011	11:55:53 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	11:55:53 AM	Tube furnace set to 0
1/10/2011	11:56:53 AM	H2 valve closed
1/10/2011	11:56:53 AM	BCl3 valve closed
1/10/2011	11:56:53 AM	PH3 valve closed
1/10/2011	11:56:53 AM	SiCl4 pre valve closed
1/10/2011	11:56:53 AM	SiCl4 post valve closed
1/10/2011	11:56:53 AM	Bubbler valve closed
1/10/2011	11:56:53 AM	Helium valve opened
1/10/2011	11:56:53 AM	Main Vac valve opened
1/10/2011	11:56:53 AM	Bypass valve opened
1/10/2011	11:56:53 AM	Helium MFC set to  100.000000
1/10/2011	11:56:53 AM	H2 MFC set to  0.000000
1/10/2011	11:56:53 AM	BCl3 MFC set to  0.000000
1/10/2011	11:56:53 AM	PHl3 MFC set to  0.000000
1/10/2011	11:56:53 AM	SiCl4 MFC set to  0.000000
1/10/2011	11:56:53 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	11:56:53 AM	Tube furnace set to 0
1/10/2011	11:57:53 AM	Helium valve closed
1/10/2011	11:57:53 AM	H2 valve closed
1/10/2011	11:57:53 AM	BCl3 valve closed
1/10/2011	11:57:53 AM	PH3 valve closed
1/10/2011	11:57:53 AM	SiCl4 pre valve closed
1/10/2011	11:57:53 AM	SiCl4 post valve closed
1/10/2011	11:57:53 AM	Bubbler valve closed
1/10/2011	11:57:53 AM	Main Vac valve opened
1/10/2011	11:57:53 AM	Bypass valve opened
1/10/2011	11:57:53 AM	Helium MFC set to  0.000000
1/10/2011	11:57:53 AM	H2 MFC set to  0.000000
1/10/2011	11:57:53 AM	BCl3 MFC set to  0.000000
1/10/2011	11:57:53 AM	PHl3 MFC set to  0.000000
1/10/2011	11:57:53 AM	SiCl4 MFC set to  0.000000
1/10/2011	11:57:53 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	11:57:53 AM	Tube furnace set to 0
1/10/2011	11:58:53 AM	H2 valve closed
1/10/2011	11:58:53 AM	BCl3 valve closed
1/10/2011	11:58:53 AM	PH3 valve closed
1/10/2011	11:58:53 AM	SiCl4 pre valve closed
1/10/2011	11:58:53 AM	SiCl4 post valve closed
1/10/2011	11:58:53 AM	Bubbler valve closed
1/10/2011	11:58:53 AM	Helium valve opened
1/10/2011	11:58:53 AM	Main Vac valve opened
1/10/2011	11:58:53 AM	Bypass valve opened
1/10/2011	11:58:53 AM	Helium MFC set to  100.000000
1/10/2011	11:58:53 AM	H2 MFC set to  0.000000
1/10/2011	11:58:53 AM	BCl3 MFC set to  0.000000
1/10/2011	11:58:53 AM	PHl3 MFC set to  0.000000
1/10/2011	11:58:53 AM	SiCl4 MFC set to  0.000000
1/10/2011	11:58:53 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	11:58:54 AM	Tube furnace set to 0
1/10/2011	11:59:54 AM	Helium valve closed
1/10/2011	11:59:54 AM	H2 valve closed
1/10/2011	11:59:54 AM	BCl3 valve closed
1/10/2011	11:59:54 AM	PH3 valve closed
1/10/2011	11:59:54 AM	SiCl4 pre valve closed
1/10/2011	11:59:54 AM	SiCl4 post valve closed
1/10/2011	11:59:54 AM	Bubbler valve closed
1/10/2011	11:59:54 AM	Main Vac valve opened
1/10/2011	11:59:54 AM	Bypass valve opened
1/10/2011	11:59:54 AM	Helium MFC set to  0.000000
1/10/2011	11:59:54 AM	H2 MFC set to  0.000000
1/10/2011	11:59:54 AM	BCl3 MFC set to  0.000000
1/10/2011	11:59:54 AM	PHl3 MFC set to  0.000000
1/10/2011	11:59:54 AM	SiCl4 MFC set to  0.000000
1/10/2011	11:59:54 AM	Bypass solenoid MFC set to  0.000000
1/10/2011	11:59:54 AM	Tube furnace set to 0
1/10/2011	12:00:54 PM	H2 valve closed
1/10/2011	12:00:54 PM	BCl3 valve closed
1/10/2011	12:00:54 PM	PH3 valve closed
1/10/2011	12:00:54 PM	SiCl4 pre valve closed
1/10/2011	12:00:54 PM	SiCl4 post valve closed
1/10/2011	12:00:54 PM	Bubbler valve closed
1/10/2011	12:00:54 PM	Helium valve opened
1/10/2011	12:00:54 PM	Main Vac valve opened
1/10/2011	12:00:54 PM	Bypass valve opened
1/10/2011	12:00:54 PM	Helium MFC set to  100.000000
1/10/2011	12:00:54 PM	H2 MFC set to  0.000000
1/10/2011	12:00:54 PM	BCl3 MFC set to  0.000000
1/10/2011	12:00:54 PM	PHl3 MFC set to  0.000000
1/10/2011	12:00:54 PM	SiCl4 MFC set to  0.000000
1/10/2011	12:00:54 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	12:00:54 PM	Tube furnace set to 0
1/10/2011	12:01:54 PM	Helium valve closed
1/10/2011	12:01:54 PM	H2 valve closed
1/10/2011	12:01:54 PM	BCl3 valve closed
1/10/2011	12:01:54 PM	PH3 valve closed
1/10/2011	12:01:54 PM	SiCl4 pre valve closed
1/10/2011	12:01:54 PM	SiCl4 post valve closed
1/10/2011	12:01:54 PM	Bubbler valve closed
1/10/2011	12:01:54 PM	Main Vac valve opened
1/10/2011	12:01:54 PM	Bypass valve opened
1/10/2011	12:01:54 PM	Helium MFC set to  0.000000
1/10/2011	12:01:54 PM	H2 MFC set to  0.000000
1/10/2011	12:01:54 PM	BCl3 MFC set to  0.000000
1/10/2011	12:01:54 PM	PHl3 MFC set to  0.000000
1/10/2011	12:01:54 PM	SiCl4 MFC set to  0.000000
1/10/2011	12:01:54 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	12:01:54 PM	Tube furnace set to 0
1/10/2011	12:02:54 PM	H2 valve closed
1/10/2011	12:02:54 PM	BCl3 valve closed
1/10/2011	12:02:54 PM	PH3 valve closed
1/10/2011	12:02:54 PM	SiCl4 pre valve closed
1/10/2011	12:02:54 PM	SiCl4 post valve closed
1/10/2011	12:02:54 PM	Bubbler valve closed
1/10/2011	12:02:54 PM	Helium valve opened
1/10/2011	12:02:54 PM	Main Vac valve opened
1/10/2011	12:02:54 PM	Bypass valve opened
1/10/2011	12:02:54 PM	Helium MFC set to  100.000000
1/10/2011	12:02:54 PM	H2 MFC set to  0.000000
1/10/2011	12:02:54 PM	BCl3 MFC set to  0.000000
1/10/2011	12:02:54 PM	PHl3 MFC set to  0.000000
1/10/2011	12:02:54 PM	SiCl4 MFC set to  0.000000
1/10/2011	12:02:54 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	12:02:54 PM	Tube furnace set to 0
1/10/2011	12:03:54 PM	Helium valve closed
1/10/2011	12:03:54 PM	H2 valve closed
1/10/2011	12:03:54 PM	BCl3 valve closed
1/10/2011	12:03:54 PM	PH3 valve closed
1/10/2011	12:03:54 PM	SiCl4 pre valve closed
1/10/2011	12:03:54 PM	SiCl4 post valve closed
1/10/2011	12:03:54 PM	Bubbler valve closed
1/10/2011	12:03:54 PM	Main Vac valve opened
1/10/2011	12:03:54 PM	Bypass valve opened
1/10/2011	12:03:54 PM	Helium MFC set to  0.000000
1/10/2011	12:03:54 PM	H2 MFC set to  0.000000
1/10/2011	12:03:54 PM	BCl3 MFC set to  0.000000
1/10/2011	12:03:54 PM	PHl3 MFC set to  0.000000
1/10/2011	12:03:54 PM	SiCl4 MFC set to  0.000000
1/10/2011	12:03:54 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	12:03:55 PM	Tube furnace set to 0
1/10/2011	12:04:55 PM	H2 valve closed
1/10/2011	12:04:55 PM	BCl3 valve closed
1/10/2011	12:04:55 PM	PH3 valve closed
1/10/2011	12:04:55 PM	SiCl4 pre valve closed
1/10/2011	12:04:55 PM	SiCl4 post valve closed
1/10/2011	12:04:55 PM	Bubbler valve closed
1/10/2011	12:04:55 PM	Helium valve opened
1/10/2011	12:04:55 PM	Main Vac valve opened
1/10/2011	12:04:55 PM	Bypass valve opened
1/10/2011	12:04:55 PM	Helium MFC set to  100.000000
1/10/2011	12:04:55 PM	H2 MFC set to  0.000000
1/10/2011	12:04:55 PM	BCl3 MFC set to  0.000000
1/10/2011	12:04:55 PM	PHl3 MFC set to  0.000000
1/10/2011	12:04:55 PM	SiCl4 MFC set to  0.000000
1/10/2011	12:04:55 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	12:04:55 PM	Tube furnace set to 0
1/10/2011	12:05:55 PM	Helium valve closed
1/10/2011	12:05:55 PM	H2 valve closed
1/10/2011	12:05:55 PM	BCl3 valve closed
1/10/2011	12:05:55 PM	PH3 valve closed
1/10/2011	12:05:55 PM	SiCl4 pre valve closed
1/10/2011	12:05:55 PM	SiCl4 post valve closed
1/10/2011	12:05:55 PM	Bubbler valve closed
1/10/2011	12:05:55 PM	Main Vac valve opened
1/10/2011	12:05:55 PM	Bypass valve opened
1/10/2011	12:05:55 PM	Helium MFC set to  0.000000
1/10/2011	12:05:55 PM	H2 MFC set to  0.000000
1/10/2011	12:05:55 PM	BCl3 MFC set to  0.000000
1/10/2011	12:05:55 PM	PHl3 MFC set to  0.000000
1/10/2011	12:05:55 PM	SiCl4 MFC set to  0.000000
1/10/2011	12:05:55 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	12:05:55 PM	Tube furnace set to 0
1/10/2011	12:06:55 PM	H2 valve closed
1/10/2011	12:06:55 PM	BCl3 valve closed
1/10/2011	12:06:55 PM	PH3 valve closed
1/10/2011	12:06:55 PM	SiCl4 pre valve closed
1/10/2011	12:06:55 PM	SiCl4 post valve closed
1/10/2011	12:06:55 PM	Bubbler valve closed
1/10/2011	12:06:55 PM	Helium valve opened
1/10/2011	12:06:55 PM	Main Vac valve opened
1/10/2011	12:06:55 PM	Bypass valve opened
1/10/2011	12:06:55 PM	Helium MFC set to  100.000000
1/10/2011	12:06:55 PM	H2 MFC set to  0.000000
1/10/2011	12:06:55 PM	BCl3 MFC set to  0.000000
1/10/2011	12:06:55 PM	PHl3 MFC set to  0.000000
1/10/2011	12:06:55 PM	SiCl4 MFC set to  0.000000
1/10/2011	12:06:55 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	12:06:55 PM	Tube furnace set to 0
1/10/2011	12:07:55 PM	Helium valve closed
1/10/2011	12:07:55 PM	H2 valve closed
1/10/2011	12:07:55 PM	BCl3 valve closed
1/10/2011	12:07:55 PM	PH3 valve closed
1/10/2011	12:07:55 PM	SiCl4 pre valve closed
1/10/2011	12:07:55 PM	SiCl4 post valve closed
1/10/2011	12:07:55 PM	Bubbler valve closed
1/10/2011	12:07:55 PM	Main Vac valve opened
1/10/2011	12:07:55 PM	Bypass valve opened
1/10/2011	12:07:55 PM	Helium MFC set to  0.000000
1/10/2011	12:07:55 PM	H2 MFC set to  0.000000
1/10/2011	12:07:55 PM	BCl3 MFC set to  0.000000
1/10/2011	12:07:55 PM	PHl3 MFC set to  0.000000
1/10/2011	12:07:55 PM	SiCl4 MFC set to  0.000000
1/10/2011	12:07:55 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	12:07:55 PM	Tube furnace set to 0
1/10/2011	12:08:55 PM	H2 valve closed
1/10/2011	12:08:55 PM	BCl3 valve closed
1/10/2011	12:08:55 PM	PH3 valve closed
1/10/2011	12:08:55 PM	SiCl4 pre valve closed
1/10/2011	12:08:55 PM	SiCl4 post valve closed
1/10/2011	12:08:55 PM	Bubbler valve closed
1/10/2011	12:08:55 PM	Helium valve opened
1/10/2011	12:08:55 PM	Main Vac valve opened
1/10/2011	12:08:55 PM	Bypass valve opened
1/10/2011	12:08:55 PM	Helium MFC set to  100.000000
1/10/2011	12:08:55 PM	H2 MFC set to  0.000000
1/10/2011	12:08:56 PM	BCl3 MFC set to  0.000000
1/10/2011	12:08:56 PM	PHl3 MFC set to  0.000000
1/10/2011	12:08:56 PM	SiCl4 MFC set to  0.000000
1/10/2011	12:08:56 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	12:08:56 PM	Tube furnace set to 0
1/10/2011	12:09:56 PM	Helium valve closed
1/10/2011	12:09:56 PM	H2 valve closed
1/10/2011	12:09:56 PM	BCl3 valve closed
1/10/2011	12:09:56 PM	PH3 valve closed
1/10/2011	12:09:56 PM	SiCl4 pre valve closed
1/10/2011	12:09:56 PM	SiCl4 post valve closed
1/10/2011	12:09:56 PM	Bubbler valve closed
1/10/2011	12:09:56 PM	Main Vac valve opened
1/10/2011	12:09:56 PM	Bypass valve opened
1/10/2011	12:09:56 PM	Helium MFC set to  0.000000
1/10/2011	12:09:56 PM	H2 MFC set to  0.000000
1/10/2011	12:09:56 PM	BCl3 MFC set to  0.000000
1/10/2011	12:09:56 PM	PHl3 MFC set to  0.000000
1/10/2011	12:09:56 PM	SiCl4 MFC set to  0.000000
1/10/2011	12:09:56 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	12:09:56 PM	Tube furnace set to 0
1/10/2011	12:09:57 PM	Run finished at 12:09 PM
1/10/2011	12:09:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/10/2011	1:30:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/10/2011	1:30:59 PM	Recipe started at 1:30 PM
1/10/2011	1:30:59 PM	Helium valve closed
1/10/2011	1:30:59 PM	H2 valve closed
1/10/2011	1:30:59 PM	BCl3 valve closed
1/10/2011	1:30:59 PM	PH3 valve closed
1/10/2011	1:30:59 PM	SiCl4 pre valve closed
1/10/2011	1:30:59 PM	SiCl4 post valve closed
1/10/2011	1:30:59 PM	Main Vac valve closed
1/10/2011	1:30:59 PM	Bypass valve closed
1/10/2011	1:30:59 PM	Bubbler valve closed
1/10/2011	1:30:59 PM	Helium MFC set to  0.000000
1/10/2011	1:30:59 PM	H2 MFC set to  0.000000
1/10/2011	1:30:59 PM	BCl3 MFC set to  0.000000
1/10/2011	1:30:59 PM	PHl3 MFC set to  0.000000
1/10/2011	1:30:59 PM	SiCl4 MFC set to  0.000000
1/10/2011	1:30:59 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	1:30:59 PM	Tube furnace set to 0
1/10/2011	1:31:00 PM	Run finished at 1:31 PM
1/10/2011	1:31:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/10/2011	1:31:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/10/2011	1:31:33 PM	Recipe started at 1:31 PM
1/10/2011	1:31:33 PM	Helium valve closed
1/10/2011	1:31:33 PM	H2 valve closed
1/10/2011	1:31:33 PM	BCl3 valve closed
1/10/2011	1:31:33 PM	PH3 valve closed
1/10/2011	1:31:33 PM	SiCl4 pre valve closed
1/10/2011	1:31:33 PM	SiCl4 post valve closed
1/10/2011	1:31:33 PM	Main Vac valve closed
1/10/2011	1:31:33 PM	Bubbler valve closed
1/10/2011	1:31:33 PM	Bypass valve opened
1/10/2011	1:31:33 PM	Helium MFC set to  0.000000
1/10/2011	1:31:33 PM	H2 MFC set to  0.000000
1/10/2011	1:31:33 PM	BCl3 MFC set to  0.000000
1/10/2011	1:31:33 PM	PHl3 MFC set to  0.000000
1/10/2011	1:31:33 PM	SiCl4 MFC set to  0.000000
1/10/2011	1:31:33 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	1:31:33 PM	Tube furnace set to 0
1/10/2011	1:31:34 PM	Helium valve closed
1/10/2011	1:31:34 PM	H2 valve closed
1/10/2011	1:31:34 PM	BCl3 valve closed
1/10/2011	1:31:34 PM	PH3 valve closed
1/10/2011	1:31:34 PM	SiCl4 pre valve closed
1/10/2011	1:31:34 PM	SiCl4 post valve closed
1/10/2011	1:31:34 PM	Bubbler valve closed
1/10/2011	1:31:34 PM	Main Vac valve opened
1/10/2011	1:31:34 PM	Bypass valve opened
1/10/2011	1:31:34 PM	Helium MFC set to  0.000000
1/10/2011	1:31:34 PM	H2 MFC set to  0.000000
1/10/2011	1:31:34 PM	BCl3 MFC set to  0.000000
1/10/2011	1:31:34 PM	PHl3 MFC set to  0.000000
1/10/2011	1:31:34 PM	SiCl4 MFC set to  0.000000
1/10/2011	1:31:34 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	1:31:34 PM	Tube furnace set to 0
1/10/2011	1:31:34 PM	Run finished at 1:31 PM
1/10/2011	1:31:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/10/2011	1:32:18 PM	Recipe started at 1:32 PM
1/10/2011	1:32:18 PM	Helium valve closed
1/10/2011	1:32:18 PM	BCl3 valve closed
1/10/2011	1:32:18 PM	PH3 valve closed
1/10/2011	1:32:18 PM	SiCl4 pre valve closed
1/10/2011	1:32:18 PM	SiCl4 post valve closed
1/10/2011	1:32:18 PM	Main Vac valve closed
1/10/2011	1:32:18 PM	Bypass valve closed
1/10/2011	1:32:18 PM	Bubbler valve closed
1/10/2011	1:32:18 PM	H2 valve opened
1/10/2011	1:32:18 PM	Helium MFC set to  0.000000
1/10/2011	1:32:18 PM	H2 MFC set to  500.000000
1/10/2011	1:32:18 PM	BCl3 MFC set to  0.000000
1/10/2011	1:32:18 PM	PHl3 MFC set to  0.000000
1/10/2011	1:32:18 PM	SiCl4 MFC set to  0.000000
1/10/2011	1:32:18 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	1:32:18 PM	Tube furnace set to 0
1/10/2011	1:33:39 PM	Helium valve closed
1/10/2011	1:33:39 PM	BCl3 valve closed
1/10/2011	1:33:39 PM	PH3 valve closed
1/10/2011	1:33:39 PM	SiCl4 pre valve closed
1/10/2011	1:33:39 PM	SiCl4 post valve closed
1/10/2011	1:33:39 PM	Main Vac valve closed
1/10/2011	1:33:39 PM	Bypass valve closed
1/10/2011	1:33:39 PM	H2 valve opened
1/10/2011	1:33:39 PM	Bubbler valve opened
1/10/2011	1:33:39 PM	Helium MFC set to  0.000000
1/10/2011	1:33:39 PM	H2 MFC set to  500.000000
1/10/2011	1:33:39 PM	BCl3 MFC set to  0.000000
1/10/2011	1:33:39 PM	PHl3 MFC set to  0.000000
1/10/2011	1:33:39 PM	SiCl4 MFC set to  0.000000
1/10/2011	1:33:39 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	1:33:40 PM	Tube furnace set to 1000
1/10/2011	1:53:40 PM	Helium valve closed
1/10/2011	1:53:40 PM	PH3 valve closed
1/10/2011	1:53:40 PM	Main Vac valve closed
1/10/2011	1:53:40 PM	Bypass valve closed
1/10/2011	1:53:40 PM	H2 valve opened
1/10/2011	1:53:40 PM	BCl3 valve opened
1/10/2011	1:53:40 PM	SiCl4 pre valve opened
1/10/2011	1:53:40 PM	SiCl4 post valve opened
1/10/2011	1:53:40 PM	Bubbler valve opened
1/10/2011	1:53:40 PM	Helium MFC set to  0.000000
1/10/2011	1:53:40 PM	H2 MFC set to  500.000000
1/10/2011	1:53:40 PM	BCl3 MFC set to  1.800000
1/10/2011	1:53:40 PM	PHl3 MFC set to  0.000000
1/10/2011	1:53:40 PM	SiCl4 MFC set to  50.000000
1/10/2011	1:53:40 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	1:53:40 PM	Tube furnace set to 1000
1/10/2011	2:08:40 PM	H2 valve closed
1/10/2011	2:08:40 PM	BCl3 valve closed
1/10/2011	2:08:40 PM	PH3 valve closed
1/10/2011	2:08:40 PM	SiCl4 pre valve closed
1/10/2011	2:08:40 PM	SiCl4 post valve closed
1/10/2011	2:08:40 PM	Main Vac valve closed
1/10/2011	2:08:40 PM	Bypass valve closed
1/10/2011	2:08:40 PM	Helium valve opened
1/10/2011	2:08:40 PM	Bubbler valve opened
1/10/2011	2:08:40 PM	Helium MFC set to  500.000000
1/10/2011	2:08:40 PM	H2 MFC set to  0.000000
1/10/2011	2:08:40 PM	BCl3 MFC set to  0.000000
1/10/2011	2:08:40 PM	PHl3 MFC set to  0.000000
1/10/2011	2:08:40 PM	SiCl4 MFC set to  0.000000
1/10/2011	2:08:40 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	2:08:40 PM	Tube furnace set to 0
1/10/2011	2:28:40 PM	Helium valve closed
1/10/2011	2:28:40 PM	H2 valve closed
1/10/2011	2:28:40 PM	BCl3 valve closed
1/10/2011	2:28:40 PM	PH3 valve closed
1/10/2011	2:28:40 PM	SiCl4 pre valve closed
1/10/2011	2:28:40 PM	SiCl4 post valve closed
1/10/2011	2:28:40 PM	Main Vac valve closed
1/10/2011	2:28:40 PM	Bypass valve closed
1/10/2011	2:28:40 PM	Bubbler valve closed
1/10/2011	2:28:40 PM	Helium MFC set to  0.000000
1/10/2011	2:28:40 PM	H2 MFC set to  0.000000
1/10/2011	2:28:40 PM	BCl3 MFC set to  0.000000
1/10/2011	2:28:40 PM	PHl3 MFC set to  0.000000
1/10/2011	2:28:40 PM	SiCl4 MFC set to  0.000000
1/10/2011	2:28:40 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	2:28:40 PM	Tube furnace set to 0
1/10/2011	2:28:40 PM	Run finished at 2:28 PM
1/10/2011	2:46:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/10/2011	2:46:41 PM	Recipe started at 2:46 PM
1/10/2011	2:46:41 PM	H2 valve closed
1/10/2011	2:46:41 PM	BCl3 valve closed
1/10/2011	2:46:41 PM	PH3 valve closed
1/10/2011	2:46:41 PM	SiCl4 pre valve closed
1/10/2011	2:46:41 PM	SiCl4 post valve closed
1/10/2011	2:46:41 PM	Main Vac valve closed
1/10/2011	2:46:41 PM	Bypass valve closed
1/10/2011	2:46:41 PM	Bubbler valve closed
1/10/2011	2:46:41 PM	Helium valve opened
1/10/2011	2:46:41 PM	Helium MFC set to  500.000000
1/10/2011	2:46:41 PM	H2 MFC set to  0.000000
1/10/2011	2:46:41 PM	BCl3 MFC set to  0.000000
1/10/2011	2:46:41 PM	PHl3 MFC set to  0.000000
1/10/2011	2:46:41 PM	SiCl4 MFC set to  0.000000
1/10/2011	2:46:41 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	2:46:41 PM	Tube furnace set to 0
1/10/2011	2:46:48 PM	Helium valve closed
1/10/2011	2:46:48 PM	H2 valve closed
1/10/2011	2:46:48 PM	BCl3 valve closed
1/10/2011	2:46:48 PM	PH3 valve closed
1/10/2011	2:46:48 PM	SiCl4 pre valve closed
1/10/2011	2:46:48 PM	SiCl4 post valve closed
1/10/2011	2:46:48 PM	Main Vac valve closed
1/10/2011	2:46:48 PM	Bypass valve closed
1/10/2011	2:46:48 PM	Bubbler valve closed
1/10/2011	2:46:48 PM	Helium MFC set to  0.000000
1/10/2011	2:46:48 PM	H2 MFC set to  0.000000
1/10/2011	2:46:48 PM	BCl3 MFC set to  0.000000
1/10/2011	2:46:48 PM	PHl3 MFC set to  0.000000
1/10/2011	2:46:48 PM	SiCl4 MFC set to  0.000000
1/10/2011	2:46:48 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	2:46:48 PM	Tube furnace set to 0
1/10/2011	2:46:48 PM	Run finished at 2:46 PM
1/10/2011	2:46:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/10/2011	2:56:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/10/2011	2:56:33 PM	Recipe started at 2:56 PM
1/10/2011	2:56:33 PM	Helium valve closed
1/10/2011	2:56:33 PM	H2 valve closed
1/10/2011	2:56:33 PM	BCl3 valve closed
1/10/2011	2:56:33 PM	PH3 valve closed
1/10/2011	2:56:33 PM	SiCl4 pre valve closed
1/10/2011	2:56:33 PM	SiCl4 post valve closed
1/10/2011	2:56:33 PM	Main Vac valve closed
1/10/2011	2:56:33 PM	Bubbler valve closed
1/10/2011	2:56:33 PM	Bypass valve opened
1/10/2011	2:56:33 PM	Helium MFC set to  0.000000
1/10/2011	2:56:33 PM	H2 MFC set to  0.000000
1/10/2011	2:56:33 PM	BCl3 MFC set to  0.000000
1/10/2011	2:56:33 PM	PHl3 MFC set to  0.000000
1/10/2011	2:56:33 PM	SiCl4 MFC set to  0.000000
1/10/2011	2:56:33 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	2:56:33 PM	Tube furnace set to 0
1/10/2011	2:57:35 PM	Helium valve closed
1/10/2011	2:57:35 PM	H2 valve closed
1/10/2011	2:57:35 PM	BCl3 valve closed
1/10/2011	2:57:35 PM	PH3 valve closed
1/10/2011	2:57:35 PM	SiCl4 pre valve closed
1/10/2011	2:57:35 PM	SiCl4 post valve closed
1/10/2011	2:57:35 PM	Bubbler valve closed
1/10/2011	2:57:35 PM	Main Vac valve opened
1/10/2011	2:57:35 PM	Bypass valve opened
1/10/2011	2:57:35 PM	Helium MFC set to  0.000000
1/10/2011	2:57:35 PM	H2 MFC set to  0.000000
1/10/2011	2:57:35 PM	BCl3 MFC set to  0.000000
1/10/2011	2:57:35 PM	PHl3 MFC set to  0.000000
1/10/2011	2:57:35 PM	SiCl4 MFC set to  0.000000
1/10/2011	2:57:35 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	2:57:35 PM	Tube furnace set to 0
1/10/2011	2:57:35 PM	Run finished at 2:57 PM
1/10/2011	2:57:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/10/2011	2:59:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/10/2011	2:59:30 PM	Recipe started at 2:59 PM
1/10/2011	2:59:30 PM	Helium valve closed
1/10/2011	2:59:30 PM	H2 valve closed
1/10/2011	2:59:30 PM	BCl3 valve closed
1/10/2011	2:59:30 PM	PH3 valve closed
1/10/2011	2:59:30 PM	SiCl4 pre valve closed
1/10/2011	2:59:30 PM	SiCl4 post valve closed
1/10/2011	2:59:30 PM	Main Vac valve closed
1/10/2011	2:59:30 PM	Bubbler valve closed
1/10/2011	2:59:30 PM	Bypass valve opened
1/10/2011	2:59:30 PM	Helium MFC set to  0.000000
1/10/2011	2:59:30 PM	H2 MFC set to  0.000000
1/10/2011	2:59:30 PM	BCl3 MFC set to  0.000000
1/10/2011	2:59:30 PM	PHl3 MFC set to  0.000000
1/10/2011	2:59:30 PM	SiCl4 MFC set to  0.000000
1/10/2011	2:59:30 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	2:59:30 PM	Tube furnace set to 0
1/10/2011	2:59:31 PM	Helium valve closed
1/10/2011	2:59:31 PM	H2 valve closed
1/10/2011	2:59:31 PM	BCl3 valve closed
1/10/2011	2:59:31 PM	PH3 valve closed
1/10/2011	2:59:31 PM	SiCl4 pre valve closed
1/10/2011	2:59:31 PM	SiCl4 post valve closed
1/10/2011	2:59:31 PM	Bubbler valve closed
1/10/2011	2:59:31 PM	Main Vac valve opened
1/10/2011	2:59:31 PM	Bypass valve opened
1/10/2011	2:59:31 PM	Helium MFC set to  0.000000
1/10/2011	2:59:31 PM	H2 MFC set to  0.000000
1/10/2011	2:59:31 PM	BCl3 MFC set to  0.000000
1/10/2011	2:59:31 PM	PHl3 MFC set to  0.000000
1/10/2011	2:59:31 PM	SiCl4 MFC set to  0.000000
1/10/2011	2:59:31 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	2:59:31 PM	Tube furnace set to 0
1/10/2011	3:00:31 PM	H2 valve closed
1/10/2011	3:00:31 PM	BCl3 valve closed
1/10/2011	3:00:31 PM	PH3 valve closed
1/10/2011	3:00:31 PM	SiCl4 pre valve closed
1/10/2011	3:00:31 PM	SiCl4 post valve closed
1/10/2011	3:00:31 PM	Bubbler valve closed
1/10/2011	3:00:31 PM	Helium valve opened
1/10/2011	3:00:31 PM	Main Vac valve opened
1/10/2011	3:00:31 PM	Bypass valve opened
1/10/2011	3:00:31 PM	Helium MFC set to  100.000000
1/10/2011	3:00:31 PM	H2 MFC set to  0.000000
1/10/2011	3:00:31 PM	BCl3 MFC set to  0.000000
1/10/2011	3:00:31 PM	PHl3 MFC set to  0.000000
1/10/2011	3:00:31 PM	SiCl4 MFC set to  0.000000
1/10/2011	3:00:31 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	3:00:31 PM	Tube furnace set to 0
1/10/2011	3:01:31 PM	Helium valve closed
1/10/2011	3:01:31 PM	H2 valve closed
1/10/2011	3:01:31 PM	BCl3 valve closed
1/10/2011	3:01:31 PM	PH3 valve closed
1/10/2011	3:01:31 PM	SiCl4 pre valve closed
1/10/2011	3:01:31 PM	SiCl4 post valve closed
1/10/2011	3:01:31 PM	Bubbler valve closed
1/10/2011	3:01:31 PM	Main Vac valve opened
1/10/2011	3:01:31 PM	Bypass valve opened
1/10/2011	3:01:31 PM	Helium MFC set to  0.000000
1/10/2011	3:01:31 PM	H2 MFC set to  0.000000
1/10/2011	3:01:31 PM	BCl3 MFC set to  0.000000
1/10/2011	3:01:31 PM	PHl3 MFC set to  0.000000
1/10/2011	3:01:31 PM	SiCl4 MFC set to  0.000000
1/10/2011	3:01:31 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	3:01:31 PM	Tube furnace set to 0
1/10/2011	3:02:31 PM	H2 valve closed
1/10/2011	3:02:31 PM	BCl3 valve closed
1/10/2011	3:02:31 PM	PH3 valve closed
1/10/2011	3:02:31 PM	SiCl4 pre valve closed
1/10/2011	3:02:31 PM	SiCl4 post valve closed
1/10/2011	3:02:31 PM	Bubbler valve closed
1/10/2011	3:02:31 PM	Helium valve opened
1/10/2011	3:02:31 PM	Main Vac valve opened
1/10/2011	3:02:31 PM	Bypass valve opened
1/10/2011	3:02:31 PM	Helium MFC set to  100.000000
1/10/2011	3:02:31 PM	H2 MFC set to  0.000000
1/10/2011	3:02:31 PM	BCl3 MFC set to  0.000000
1/10/2011	3:02:31 PM	PHl3 MFC set to  0.000000
1/10/2011	3:02:31 PM	SiCl4 MFC set to  0.000000
1/10/2011	3:02:31 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	3:02:31 PM	Tube furnace set to 0
1/10/2011	3:03:31 PM	Helium valve closed
1/10/2011	3:03:31 PM	H2 valve closed
1/10/2011	3:03:31 PM	BCl3 valve closed
1/10/2011	3:03:31 PM	PH3 valve closed
1/10/2011	3:03:31 PM	SiCl4 pre valve closed
1/10/2011	3:03:31 PM	SiCl4 post valve closed
1/10/2011	3:03:31 PM	Bubbler valve closed
1/10/2011	3:03:31 PM	Main Vac valve opened
1/10/2011	3:03:31 PM	Bypass valve opened
1/10/2011	3:03:31 PM	Helium MFC set to  0.000000
1/10/2011	3:03:31 PM	H2 MFC set to  0.000000
1/10/2011	3:03:31 PM	BCl3 MFC set to  0.000000
1/10/2011	3:03:31 PM	PHl3 MFC set to  0.000000
1/10/2011	3:03:31 PM	SiCl4 MFC set to  0.000000
1/10/2011	3:03:31 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	3:03:32 PM	Tube furnace set to 0
1/10/2011	3:04:32 PM	H2 valve closed
1/10/2011	3:04:32 PM	BCl3 valve closed
1/10/2011	3:04:32 PM	PH3 valve closed
1/10/2011	3:04:32 PM	SiCl4 pre valve closed
1/10/2011	3:04:32 PM	SiCl4 post valve closed
1/10/2011	3:04:32 PM	Bubbler valve closed
1/10/2011	3:04:32 PM	Helium valve opened
1/10/2011	3:04:32 PM	Main Vac valve opened
1/10/2011	3:04:32 PM	Bypass valve opened
1/10/2011	3:04:32 PM	Helium MFC set to  100.000000
1/10/2011	3:04:32 PM	H2 MFC set to  0.000000
1/10/2011	3:04:32 PM	BCl3 MFC set to  0.000000
1/10/2011	3:04:32 PM	PHl3 MFC set to  0.000000
1/10/2011	3:04:32 PM	SiCl4 MFC set to  0.000000
1/10/2011	3:04:32 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	3:04:32 PM	Tube furnace set to 0
1/10/2011	3:05:32 PM	Helium valve closed
1/10/2011	3:05:32 PM	H2 valve closed
1/10/2011	3:05:32 PM	BCl3 valve closed
1/10/2011	3:05:32 PM	PH3 valve closed
1/10/2011	3:05:32 PM	SiCl4 pre valve closed
1/10/2011	3:05:32 PM	SiCl4 post valve closed
1/10/2011	3:05:32 PM	Bubbler valve closed
1/10/2011	3:05:32 PM	Main Vac valve opened
1/10/2011	3:05:32 PM	Bypass valve opened
1/10/2011	3:05:32 PM	Helium MFC set to  0.000000
1/10/2011	3:05:32 PM	H2 MFC set to  0.000000
1/10/2011	3:05:32 PM	BCl3 MFC set to  0.000000
1/10/2011	3:05:32 PM	PHl3 MFC set to  0.000000
1/10/2011	3:05:32 PM	SiCl4 MFC set to  0.000000
1/10/2011	3:05:32 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	3:05:32 PM	Tube furnace set to 0
1/10/2011	3:06:32 PM	H2 valve closed
1/10/2011	3:06:32 PM	BCl3 valve closed
1/10/2011	3:06:32 PM	PH3 valve closed
1/10/2011	3:06:32 PM	SiCl4 pre valve closed
1/10/2011	3:06:32 PM	SiCl4 post valve closed
1/10/2011	3:06:32 PM	Bubbler valve closed
1/10/2011	3:06:32 PM	Helium valve opened
1/10/2011	3:06:32 PM	Main Vac valve opened
1/10/2011	3:06:32 PM	Bypass valve opened
1/10/2011	3:06:32 PM	Helium MFC set to  100.000000
1/10/2011	3:06:32 PM	H2 MFC set to  0.000000
1/10/2011	3:06:32 PM	BCl3 MFC set to  0.000000
1/10/2011	3:06:32 PM	PHl3 MFC set to  0.000000
1/10/2011	3:06:32 PM	SiCl4 MFC set to  0.000000
1/10/2011	3:06:32 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	3:06:32 PM	Tube furnace set to 0
1/10/2011	3:07:32 PM	Helium valve closed
1/10/2011	3:07:32 PM	H2 valve closed
1/10/2011	3:07:32 PM	BCl3 valve closed
1/10/2011	3:07:32 PM	PH3 valve closed
1/10/2011	3:07:32 PM	SiCl4 pre valve closed
1/10/2011	3:07:32 PM	SiCl4 post valve closed
1/10/2011	3:07:32 PM	Bubbler valve closed
1/10/2011	3:07:32 PM	Main Vac valve opened
1/10/2011	3:07:32 PM	Bypass valve opened
1/10/2011	3:07:32 PM	Helium MFC set to  0.000000
1/10/2011	3:07:32 PM	H2 MFC set to  0.000000
1/10/2011	3:07:32 PM	BCl3 MFC set to  0.000000
1/10/2011	3:07:32 PM	PHl3 MFC set to  0.000000
1/10/2011	3:07:32 PM	SiCl4 MFC set to  0.000000
1/10/2011	3:07:32 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	3:07:32 PM	Tube furnace set to 0
1/10/2011	3:08:32 PM	H2 valve closed
1/10/2011	3:08:32 PM	BCl3 valve closed
1/10/2011	3:08:32 PM	PH3 valve closed
1/10/2011	3:08:32 PM	SiCl4 pre valve closed
1/10/2011	3:08:32 PM	SiCl4 post valve closed
1/10/2011	3:08:32 PM	Bubbler valve closed
1/10/2011	3:08:32 PM	Helium valve opened
1/10/2011	3:08:32 PM	Main Vac valve opened
1/10/2011	3:08:32 PM	Bypass valve opened
1/10/2011	3:08:32 PM	Helium MFC set to  100.000000
1/10/2011	3:08:32 PM	H2 MFC set to  0.000000
1/10/2011	3:08:32 PM	BCl3 MFC set to  0.000000
1/10/2011	3:08:32 PM	PHl3 MFC set to  0.000000
1/10/2011	3:08:32 PM	SiCl4 MFC set to  0.000000
1/10/2011	3:08:32 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	3:08:33 PM	Tube furnace set to 0
1/10/2011	3:09:33 PM	Helium valve closed
1/10/2011	3:09:33 PM	H2 valve closed
1/10/2011	3:09:33 PM	BCl3 valve closed
1/10/2011	3:09:33 PM	PH3 valve closed
1/10/2011	3:09:33 PM	SiCl4 pre valve closed
1/10/2011	3:09:33 PM	SiCl4 post valve closed
1/10/2011	3:09:33 PM	Bubbler valve closed
1/10/2011	3:09:33 PM	Main Vac valve opened
1/10/2011	3:09:33 PM	Bypass valve opened
1/10/2011	3:09:33 PM	Helium MFC set to  0.000000
1/10/2011	3:09:33 PM	H2 MFC set to  0.000000
1/10/2011	3:09:33 PM	BCl3 MFC set to  0.000000
1/10/2011	3:09:33 PM	PHl3 MFC set to  0.000000
1/10/2011	3:09:33 PM	SiCl4 MFC set to  0.000000
1/10/2011	3:09:33 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	3:09:33 PM	Tube furnace set to 0
1/10/2011	3:10:33 PM	H2 valve closed
1/10/2011	3:10:33 PM	BCl3 valve closed
1/10/2011	3:10:33 PM	PH3 valve closed
1/10/2011	3:10:33 PM	SiCl4 pre valve closed
1/10/2011	3:10:33 PM	SiCl4 post valve closed
1/10/2011	3:10:33 PM	Bubbler valve closed
1/10/2011	3:10:33 PM	Helium valve opened
1/10/2011	3:10:33 PM	Main Vac valve opened
1/10/2011	3:10:33 PM	Bypass valve opened
1/10/2011	3:10:33 PM	Helium MFC set to  100.000000
1/10/2011	3:10:33 PM	H2 MFC set to  0.000000
1/10/2011	3:10:33 PM	BCl3 MFC set to  0.000000
1/10/2011	3:10:33 PM	PHl3 MFC set to  0.000000
1/10/2011	3:10:33 PM	SiCl4 MFC set to  0.000000
1/10/2011	3:10:33 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	3:10:33 PM	Tube furnace set to 0
1/10/2011	3:11:33 PM	Helium valve closed
1/10/2011	3:11:33 PM	H2 valve closed
1/10/2011	3:11:33 PM	BCl3 valve closed
1/10/2011	3:11:33 PM	PH3 valve closed
1/10/2011	3:11:33 PM	SiCl4 pre valve closed
1/10/2011	3:11:33 PM	SiCl4 post valve closed
1/10/2011	3:11:33 PM	Bubbler valve closed
1/10/2011	3:11:33 PM	Main Vac valve opened
1/10/2011	3:11:33 PM	Bypass valve opened
1/10/2011	3:11:33 PM	Helium MFC set to  0.000000
1/10/2011	3:11:33 PM	H2 MFC set to  0.000000
1/10/2011	3:11:33 PM	BCl3 MFC set to  0.000000
1/10/2011	3:11:33 PM	PHl3 MFC set to  0.000000
1/10/2011	3:11:33 PM	SiCl4 MFC set to  0.000000
1/10/2011	3:11:33 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	3:11:33 PM	Tube furnace set to 0
1/10/2011	3:12:33 PM	H2 valve closed
1/10/2011	3:12:33 PM	BCl3 valve closed
1/10/2011	3:12:33 PM	PH3 valve closed
1/10/2011	3:12:33 PM	SiCl4 pre valve closed
1/10/2011	3:12:33 PM	SiCl4 post valve closed
1/10/2011	3:12:33 PM	Bubbler valve closed
1/10/2011	3:12:33 PM	Helium valve opened
1/10/2011	3:12:33 PM	Main Vac valve opened
1/10/2011	3:12:33 PM	Bypass valve opened
1/10/2011	3:12:33 PM	Helium MFC set to  100.000000
1/10/2011	3:12:33 PM	H2 MFC set to  0.000000
1/10/2011	3:12:33 PM	BCl3 MFC set to  0.000000
1/10/2011	3:12:33 PM	PHl3 MFC set to  0.000000
1/10/2011	3:12:33 PM	SiCl4 MFC set to  0.000000
1/10/2011	3:12:33 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	3:12:33 PM	Tube furnace set to 0
1/10/2011	3:13:33 PM	Helium valve closed
1/10/2011	3:13:33 PM	H2 valve closed
1/10/2011	3:13:33 PM	BCl3 valve closed
1/10/2011	3:13:33 PM	PH3 valve closed
1/10/2011	3:13:33 PM	SiCl4 pre valve closed
1/10/2011	3:13:33 PM	SiCl4 post valve closed
1/10/2011	3:13:33 PM	Bubbler valve closed
1/10/2011	3:13:33 PM	Main Vac valve opened
1/10/2011	3:13:33 PM	Bypass valve opened
1/10/2011	3:13:33 PM	Helium MFC set to  0.000000
1/10/2011	3:13:33 PM	H2 MFC set to  0.000000
1/10/2011	3:13:33 PM	BCl3 MFC set to  0.000000
1/10/2011	3:13:33 PM	PHl3 MFC set to  0.000000
1/10/2011	3:13:33 PM	SiCl4 MFC set to  0.000000
1/10/2011	3:13:33 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	3:13:34 PM	Tube furnace set to 0
1/10/2011	3:14:34 PM	H2 valve closed
1/10/2011	3:14:34 PM	BCl3 valve closed
1/10/2011	3:14:34 PM	PH3 valve closed
1/10/2011	3:14:34 PM	SiCl4 pre valve closed
1/10/2011	3:14:34 PM	SiCl4 post valve closed
1/10/2011	3:14:34 PM	Bubbler valve closed
1/10/2011	3:14:34 PM	Helium valve opened
1/10/2011	3:14:34 PM	Main Vac valve opened
1/10/2011	3:14:34 PM	Bypass valve opened
1/10/2011	3:14:34 PM	Helium MFC set to  100.000000
1/10/2011	3:14:34 PM	H2 MFC set to  0.000000
1/10/2011	3:14:34 PM	BCl3 MFC set to  0.000000
1/10/2011	3:14:34 PM	PHl3 MFC set to  0.000000
1/10/2011	3:14:34 PM	SiCl4 MFC set to  0.000000
1/10/2011	3:14:34 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	3:14:34 PM	Tube furnace set to 0
1/10/2011	3:15:34 PM	Helium valve closed
1/10/2011	3:15:34 PM	H2 valve closed
1/10/2011	3:15:34 PM	BCl3 valve closed
1/10/2011	3:15:34 PM	PH3 valve closed
1/10/2011	3:15:34 PM	SiCl4 pre valve closed
1/10/2011	3:15:34 PM	SiCl4 post valve closed
1/10/2011	3:15:34 PM	Bubbler valve closed
1/10/2011	3:15:34 PM	Main Vac valve opened
1/10/2011	3:15:34 PM	Bypass valve opened
1/10/2011	3:15:34 PM	Helium MFC set to  0.000000
1/10/2011	3:15:34 PM	H2 MFC set to  0.000000
1/10/2011	3:15:34 PM	BCl3 MFC set to  0.000000
1/10/2011	3:15:34 PM	PHl3 MFC set to  0.000000
1/10/2011	3:15:34 PM	SiCl4 MFC set to  0.000000
1/10/2011	3:15:34 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	3:15:34 PM	Tube furnace set to 0
1/10/2011	3:16:34 PM	H2 valve closed
1/10/2011	3:16:34 PM	BCl3 valve closed
1/10/2011	3:16:34 PM	PH3 valve closed
1/10/2011	3:16:34 PM	SiCl4 pre valve closed
1/10/2011	3:16:34 PM	SiCl4 post valve closed
1/10/2011	3:16:34 PM	Bubbler valve closed
1/10/2011	3:16:34 PM	Helium valve opened
1/10/2011	3:16:34 PM	Main Vac valve opened
1/10/2011	3:16:34 PM	Bypass valve opened
1/10/2011	3:16:34 PM	Helium MFC set to  100.000000
1/10/2011	3:16:34 PM	H2 MFC set to  0.000000
1/10/2011	3:16:34 PM	BCl3 MFC set to  0.000000
1/10/2011	3:16:34 PM	PHl3 MFC set to  0.000000
1/10/2011	3:16:34 PM	SiCl4 MFC set to  0.000000
1/10/2011	3:16:34 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	3:16:34 PM	Tube furnace set to 0
1/10/2011	3:17:34 PM	Helium valve closed
1/10/2011	3:17:34 PM	H2 valve closed
1/10/2011	3:17:34 PM	BCl3 valve closed
1/10/2011	3:17:34 PM	PH3 valve closed
1/10/2011	3:17:34 PM	SiCl4 pre valve closed
1/10/2011	3:17:34 PM	SiCl4 post valve closed
1/10/2011	3:17:34 PM	Bubbler valve closed
1/10/2011	3:17:34 PM	Main Vac valve opened
1/10/2011	3:17:34 PM	Bypass valve opened
1/10/2011	3:17:34 PM	Helium MFC set to  0.000000
1/10/2011	3:17:34 PM	H2 MFC set to  0.000000
1/10/2011	3:17:34 PM	BCl3 MFC set to  0.000000
1/10/2011	3:17:34 PM	PHl3 MFC set to  0.000000
1/10/2011	3:17:34 PM	SiCl4 MFC set to  0.000000
1/10/2011	3:17:34 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	3:17:34 PM	Tube furnace set to 0
1/10/2011	3:18:34 PM	H2 valve closed
1/10/2011	3:18:34 PM	BCl3 valve closed
1/10/2011	3:18:34 PM	PH3 valve closed
1/10/2011	3:18:34 PM	SiCl4 pre valve closed
1/10/2011	3:18:34 PM	SiCl4 post valve closed
1/10/2011	3:18:34 PM	Bubbler valve closed
1/10/2011	3:18:34 PM	Helium valve opened
1/10/2011	3:18:34 PM	Main Vac valve opened
1/10/2011	3:18:34 PM	Bypass valve opened
1/10/2011	3:18:34 PM	Helium MFC set to  100.000000
1/10/2011	3:18:34 PM	H2 MFC set to  0.000000
1/10/2011	3:18:34 PM	BCl3 MFC set to  0.000000
1/10/2011	3:18:34 PM	PHl3 MFC set to  0.000000
1/10/2011	3:18:34 PM	SiCl4 MFC set to  0.000000
1/10/2011	3:18:34 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	3:18:35 PM	Tube furnace set to 0
1/10/2011	3:19:35 PM	Helium valve closed
1/10/2011	3:19:35 PM	H2 valve closed
1/10/2011	3:19:35 PM	BCl3 valve closed
1/10/2011	3:19:35 PM	PH3 valve closed
1/10/2011	3:19:35 PM	SiCl4 pre valve closed
1/10/2011	3:19:35 PM	SiCl4 post valve closed
1/10/2011	3:19:35 PM	Bubbler valve closed
1/10/2011	3:19:35 PM	Main Vac valve opened
1/10/2011	3:19:35 PM	Bypass valve opened
1/10/2011	3:19:35 PM	Helium MFC set to  0.000000
1/10/2011	3:19:35 PM	H2 MFC set to  0.000000
1/10/2011	3:19:35 PM	BCl3 MFC set to  0.000000
1/10/2011	3:19:35 PM	PHl3 MFC set to  0.000000
1/10/2011	3:19:35 PM	SiCl4 MFC set to  0.000000
1/10/2011	3:19:35 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	3:19:35 PM	Tube furnace set to 0
1/10/2011	3:19:36 PM	Run finished at 3:19 PM
1/10/2011	3:19:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/10/2011	4:01:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/10/2011	4:02:02 PM	Recipe started at 4:01 PM
1/10/2011	4:02:02 PM	Helium valve closed
1/10/2011	4:02:02 PM	H2 valve closed
1/10/2011	4:02:02 PM	BCl3 valve closed
1/10/2011	4:02:02 PM	PH3 valve closed
1/10/2011	4:02:02 PM	SiCl4 pre valve closed
1/10/2011	4:02:02 PM	SiCl4 post valve closed
1/10/2011	4:02:02 PM	Main Vac valve closed
1/10/2011	4:02:02 PM	Bubbler valve closed
1/10/2011	4:02:02 PM	Bypass valve opened
1/10/2011	4:02:02 PM	Helium MFC set to  0.000000
1/10/2011	4:02:02 PM	H2 MFC set to  0.000000
1/10/2011	4:02:02 PM	BCl3 MFC set to  0.000000
1/10/2011	4:02:02 PM	PHl3 MFC set to  0.000000
1/10/2011	4:02:02 PM	SiCl4 MFC set to  0.000000
1/10/2011	4:02:02 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	4:02:02 PM	Tube furnace set to 0
1/10/2011	4:02:02 PM	Helium valve closed
1/10/2011	4:02:02 PM	H2 valve closed
1/10/2011	4:02:02 PM	BCl3 valve closed
1/10/2011	4:02:02 PM	PH3 valve closed
1/10/2011	4:02:02 PM	SiCl4 pre valve closed
1/10/2011	4:02:02 PM	SiCl4 post valve closed
1/10/2011	4:02:02 PM	Bubbler valve closed
1/10/2011	4:02:02 PM	Main Vac valve opened
1/10/2011	4:02:02 PM	Bypass valve opened
1/10/2011	4:02:02 PM	Helium MFC set to  0.000000
1/10/2011	4:02:02 PM	H2 MFC set to  0.000000
1/10/2011	4:02:02 PM	BCl3 MFC set to  0.000000
1/10/2011	4:02:02 PM	PHl3 MFC set to  0.000000
1/10/2011	4:02:02 PM	SiCl4 MFC set to  0.000000
1/10/2011	4:02:02 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	4:02:02 PM	Tube furnace set to 0
1/10/2011	4:03:02 PM	H2 valve closed
1/10/2011	4:03:02 PM	BCl3 valve closed
1/10/2011	4:03:02 PM	PH3 valve closed
1/10/2011	4:03:02 PM	SiCl4 pre valve closed
1/10/2011	4:03:02 PM	SiCl4 post valve closed
1/10/2011	4:03:02 PM	Bubbler valve closed
1/10/2011	4:03:02 PM	Helium valve opened
1/10/2011	4:03:02 PM	Main Vac valve opened
1/10/2011	4:03:02 PM	Bypass valve opened
1/10/2011	4:03:02 PM	Helium MFC set to  100.000000
1/10/2011	4:03:02 PM	H2 MFC set to  0.000000
1/10/2011	4:03:02 PM	BCl3 MFC set to  0.000000
1/10/2011	4:03:02 PM	PHl3 MFC set to  0.000000
1/10/2011	4:03:02 PM	SiCl4 MFC set to  0.000000
1/10/2011	4:03:02 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	4:03:02 PM	Tube furnace set to 0
1/10/2011	4:04:02 PM	Helium valve closed
1/10/2011	4:04:02 PM	H2 valve closed
1/10/2011	4:04:02 PM	BCl3 valve closed
1/10/2011	4:04:02 PM	PH3 valve closed
1/10/2011	4:04:02 PM	SiCl4 pre valve closed
1/10/2011	4:04:02 PM	SiCl4 post valve closed
1/10/2011	4:04:02 PM	Bubbler valve closed
1/10/2011	4:04:02 PM	Main Vac valve opened
1/10/2011	4:04:02 PM	Bypass valve opened
1/10/2011	4:04:02 PM	Helium MFC set to  0.000000
1/10/2011	4:04:02 PM	H2 MFC set to  0.000000
1/10/2011	4:04:02 PM	BCl3 MFC set to  0.000000
1/10/2011	4:04:02 PM	PHl3 MFC set to  0.000000
1/10/2011	4:04:02 PM	SiCl4 MFC set to  0.000000
1/10/2011	4:04:02 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	4:04:03 PM	Tube furnace set to 0
1/10/2011	4:05:03 PM	H2 valve closed
1/10/2011	4:05:03 PM	BCl3 valve closed
1/10/2011	4:05:03 PM	PH3 valve closed
1/10/2011	4:05:03 PM	SiCl4 pre valve closed
1/10/2011	4:05:03 PM	SiCl4 post valve closed
1/10/2011	4:05:03 PM	Bubbler valve closed
1/10/2011	4:05:03 PM	Helium valve opened
1/10/2011	4:05:03 PM	Main Vac valve opened
1/10/2011	4:05:03 PM	Bypass valve opened
1/10/2011	4:05:03 PM	Helium MFC set to  100.000000
1/10/2011	4:05:03 PM	H2 MFC set to  0.000000
1/10/2011	4:05:03 PM	BCl3 MFC set to  0.000000
1/10/2011	4:05:03 PM	PHl3 MFC set to  0.000000
1/10/2011	4:05:03 PM	SiCl4 MFC set to  0.000000
1/10/2011	4:05:03 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	4:05:03 PM	Tube furnace set to 0
1/10/2011	4:06:03 PM	Helium valve closed
1/10/2011	4:06:03 PM	H2 valve closed
1/10/2011	4:06:03 PM	BCl3 valve closed
1/10/2011	4:06:03 PM	PH3 valve closed
1/10/2011	4:06:03 PM	SiCl4 pre valve closed
1/10/2011	4:06:03 PM	SiCl4 post valve closed
1/10/2011	4:06:03 PM	Bubbler valve closed
1/10/2011	4:06:03 PM	Main Vac valve opened
1/10/2011	4:06:03 PM	Bypass valve opened
1/10/2011	4:06:03 PM	Helium MFC set to  0.000000
1/10/2011	4:06:03 PM	H2 MFC set to  0.000000
1/10/2011	4:06:03 PM	BCl3 MFC set to  0.000000
1/10/2011	4:06:03 PM	PHl3 MFC set to  0.000000
1/10/2011	4:06:03 PM	SiCl4 MFC set to  0.000000
1/10/2011	4:06:03 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	4:06:03 PM	Tube furnace set to 0
1/10/2011	4:07:03 PM	H2 valve closed
1/10/2011	4:07:03 PM	BCl3 valve closed
1/10/2011	4:07:03 PM	PH3 valve closed
1/10/2011	4:07:03 PM	SiCl4 pre valve closed
1/10/2011	4:07:03 PM	SiCl4 post valve closed
1/10/2011	4:07:03 PM	Bubbler valve closed
1/10/2011	4:07:03 PM	Helium valve opened
1/10/2011	4:07:03 PM	Main Vac valve opened
1/10/2011	4:07:03 PM	Bypass valve opened
1/10/2011	4:07:03 PM	Helium MFC set to  100.000000
1/10/2011	4:07:03 PM	H2 MFC set to  0.000000
1/10/2011	4:07:03 PM	BCl3 MFC set to  0.000000
1/10/2011	4:07:03 PM	PHl3 MFC set to  0.000000
1/10/2011	4:07:03 PM	SiCl4 MFC set to  0.000000
1/10/2011	4:07:03 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	4:07:03 PM	Tube furnace set to 0
1/10/2011	4:08:03 PM	Helium valve closed
1/10/2011	4:08:03 PM	H2 valve closed
1/10/2011	4:08:03 PM	BCl3 valve closed
1/10/2011	4:08:03 PM	PH3 valve closed
1/10/2011	4:08:03 PM	SiCl4 pre valve closed
1/10/2011	4:08:03 PM	SiCl4 post valve closed
1/10/2011	4:08:03 PM	Bubbler valve closed
1/10/2011	4:08:03 PM	Main Vac valve opened
1/10/2011	4:08:03 PM	Bypass valve opened
1/10/2011	4:08:03 PM	Helium MFC set to  0.000000
1/10/2011	4:08:03 PM	H2 MFC set to  0.000000
1/10/2011	4:08:03 PM	BCl3 MFC set to  0.000000
1/10/2011	4:08:03 PM	PHl3 MFC set to  0.000000
1/10/2011	4:08:03 PM	SiCl4 MFC set to  0.000000
1/10/2011	4:08:03 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	4:08:03 PM	Tube furnace set to 0
1/10/2011	4:09:03 PM	H2 valve closed
1/10/2011	4:09:03 PM	BCl3 valve closed
1/10/2011	4:09:03 PM	PH3 valve closed
1/10/2011	4:09:04 PM	SiCl4 pre valve closed
1/10/2011	4:09:04 PM	SiCl4 post valve closed
1/10/2011	4:09:04 PM	Bubbler valve closed
1/10/2011	4:09:04 PM	Helium valve opened
1/10/2011	4:09:04 PM	Main Vac valve opened
1/10/2011	4:09:04 PM	Bypass valve opened
1/10/2011	4:09:04 PM	Helium MFC set to  100.000000
1/10/2011	4:09:04 PM	H2 MFC set to  0.000000
1/10/2011	4:09:04 PM	BCl3 MFC set to  0.000000
1/10/2011	4:09:04 PM	PHl3 MFC set to  0.000000
1/10/2011	4:09:04 PM	SiCl4 MFC set to  0.000000
1/10/2011	4:09:04 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	4:09:04 PM	Tube furnace set to 0
1/10/2011	4:10:04 PM	Helium valve closed
1/10/2011	4:10:04 PM	H2 valve closed
1/10/2011	4:10:04 PM	BCl3 valve closed
1/10/2011	4:10:04 PM	PH3 valve closed
1/10/2011	4:10:04 PM	SiCl4 pre valve closed
1/10/2011	4:10:04 PM	SiCl4 post valve closed
1/10/2011	4:10:04 PM	Bubbler valve closed
1/10/2011	4:10:04 PM	Main Vac valve opened
1/10/2011	4:10:04 PM	Bypass valve opened
1/10/2011	4:10:04 PM	Helium MFC set to  0.000000
1/10/2011	4:10:04 PM	H2 MFC set to  0.000000
1/10/2011	4:10:04 PM	BCl3 MFC set to  0.000000
1/10/2011	4:10:04 PM	PHl3 MFC set to  0.000000
1/10/2011	4:10:04 PM	SiCl4 MFC set to  0.000000
1/10/2011	4:10:04 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	4:10:04 PM	Tube furnace set to 0
1/10/2011	4:11:04 PM	H2 valve closed
1/10/2011	4:11:04 PM	BCl3 valve closed
1/10/2011	4:11:04 PM	PH3 valve closed
1/10/2011	4:11:04 PM	SiCl4 pre valve closed
1/10/2011	4:11:04 PM	SiCl4 post valve closed
1/10/2011	4:11:04 PM	Bubbler valve closed
1/10/2011	4:11:04 PM	Helium valve opened
1/10/2011	4:11:04 PM	Main Vac valve opened
1/10/2011	4:11:04 PM	Bypass valve opened
1/10/2011	4:11:04 PM	Helium MFC set to  100.000000
1/10/2011	4:11:04 PM	H2 MFC set to  0.000000
1/10/2011	4:11:04 PM	BCl3 MFC set to  0.000000
1/10/2011	4:11:04 PM	PHl3 MFC set to  0.000000
1/10/2011	4:11:04 PM	SiCl4 MFC set to  0.000000
1/10/2011	4:11:04 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	4:11:04 PM	Tube furnace set to 0
1/10/2011	4:12:04 PM	Helium valve closed
1/10/2011	4:12:04 PM	H2 valve closed
1/10/2011	4:12:04 PM	BCl3 valve closed
1/10/2011	4:12:04 PM	PH3 valve closed
1/10/2011	4:12:04 PM	SiCl4 pre valve closed
1/10/2011	4:12:04 PM	SiCl4 post valve closed
1/10/2011	4:12:04 PM	Bubbler valve closed
1/10/2011	4:12:04 PM	Main Vac valve opened
1/10/2011	4:12:04 PM	Bypass valve opened
1/10/2011	4:12:04 PM	Helium MFC set to  0.000000
1/10/2011	4:12:04 PM	H2 MFC set to  0.000000
1/10/2011	4:12:04 PM	BCl3 MFC set to  0.000000
1/10/2011	4:12:04 PM	PHl3 MFC set to  0.000000
1/10/2011	4:12:04 PM	SiCl4 MFC set to  0.000000
1/10/2011	4:12:04 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	4:12:04 PM	Tube furnace set to 0
1/10/2011	4:13:04 PM	H2 valve closed
1/10/2011	4:13:04 PM	BCl3 valve closed
1/10/2011	4:13:04 PM	PH3 valve closed
1/10/2011	4:13:04 PM	SiCl4 pre valve closed
1/10/2011	4:13:04 PM	SiCl4 post valve closed
1/10/2011	4:13:04 PM	Bubbler valve closed
1/10/2011	4:13:04 PM	Helium valve opened
1/10/2011	4:13:04 PM	Main Vac valve opened
1/10/2011	4:13:04 PM	Bypass valve opened
1/10/2011	4:13:04 PM	Helium MFC set to  100.000000
1/10/2011	4:13:04 PM	H2 MFC set to  0.000000
1/10/2011	4:13:04 PM	BCl3 MFC set to  0.000000
1/10/2011	4:13:04 PM	PHl3 MFC set to  0.000000
1/10/2011	4:13:04 PM	SiCl4 MFC set to  0.000000
1/10/2011	4:13:04 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	4:13:04 PM	Tube furnace set to 0
1/10/2011	4:14:05 PM	Helium valve closed
1/10/2011	4:14:05 PM	H2 valve closed
1/10/2011	4:14:05 PM	BCl3 valve closed
1/10/2011	4:14:05 PM	PH3 valve closed
1/10/2011	4:14:05 PM	SiCl4 pre valve closed
1/10/2011	4:14:05 PM	SiCl4 post valve closed
1/10/2011	4:14:05 PM	Bubbler valve closed
1/10/2011	4:14:05 PM	Main Vac valve opened
1/10/2011	4:14:05 PM	Bypass valve opened
1/10/2011	4:14:05 PM	Helium MFC set to  0.000000
1/10/2011	4:14:05 PM	H2 MFC set to  0.000000
1/10/2011	4:14:05 PM	BCl3 MFC set to  0.000000
1/10/2011	4:14:05 PM	PHl3 MFC set to  0.000000
1/10/2011	4:14:05 PM	SiCl4 MFC set to  0.000000
1/10/2011	4:14:05 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	4:14:05 PM	Tube furnace set to 0
1/10/2011	4:15:05 PM	H2 valve closed
1/10/2011	4:15:05 PM	BCl3 valve closed
1/10/2011	4:15:05 PM	PH3 valve closed
1/10/2011	4:15:05 PM	SiCl4 pre valve closed
1/10/2011	4:15:05 PM	SiCl4 post valve closed
1/10/2011	4:15:05 PM	Bubbler valve closed
1/10/2011	4:15:05 PM	Helium valve opened
1/10/2011	4:15:05 PM	Main Vac valve opened
1/10/2011	4:15:05 PM	Bypass valve opened
1/10/2011	4:15:05 PM	Helium MFC set to  100.000000
1/10/2011	4:15:05 PM	H2 MFC set to  0.000000
1/10/2011	4:15:05 PM	BCl3 MFC set to  0.000000
1/10/2011	4:15:05 PM	PHl3 MFC set to  0.000000
1/10/2011	4:15:05 PM	SiCl4 MFC set to  0.000000
1/10/2011	4:15:05 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	4:15:05 PM	Tube furnace set to 0
1/10/2011	4:16:05 PM	Helium valve closed
1/10/2011	4:16:05 PM	H2 valve closed
1/10/2011	4:16:05 PM	BCl3 valve closed
1/10/2011	4:16:05 PM	PH3 valve closed
1/10/2011	4:16:05 PM	SiCl4 pre valve closed
1/10/2011	4:16:05 PM	SiCl4 post valve closed
1/10/2011	4:16:05 PM	Bubbler valve closed
1/10/2011	4:16:05 PM	Main Vac valve opened
1/10/2011	4:16:05 PM	Bypass valve opened
1/10/2011	4:16:05 PM	Helium MFC set to  0.000000
1/10/2011	4:16:05 PM	H2 MFC set to  0.000000
1/10/2011	4:16:05 PM	BCl3 MFC set to  0.000000
1/10/2011	4:16:05 PM	PHl3 MFC set to  0.000000
1/10/2011	4:16:05 PM	SiCl4 MFC set to  0.000000
1/10/2011	4:16:05 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	4:16:05 PM	Tube furnace set to 0
1/10/2011	4:17:05 PM	H2 valve closed
1/10/2011	4:17:05 PM	BCl3 valve closed
1/10/2011	4:17:05 PM	PH3 valve closed
1/10/2011	4:17:05 PM	SiCl4 pre valve closed
1/10/2011	4:17:05 PM	SiCl4 post valve closed
1/10/2011	4:17:05 PM	Bubbler valve closed
1/10/2011	4:17:05 PM	Helium valve opened
1/10/2011	4:17:05 PM	Main Vac valve opened
1/10/2011	4:17:05 PM	Bypass valve opened
1/10/2011	4:17:05 PM	Helium MFC set to  100.000000
1/10/2011	4:17:05 PM	H2 MFC set to  0.000000
1/10/2011	4:17:05 PM	BCl3 MFC set to  0.000000
1/10/2011	4:17:05 PM	PHl3 MFC set to  0.000000
1/10/2011	4:17:05 PM	SiCl4 MFC set to  0.000000
1/10/2011	4:17:05 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	4:17:05 PM	Tube furnace set to 0
1/10/2011	4:18:05 PM	Helium valve closed
1/10/2011	4:18:05 PM	H2 valve closed
1/10/2011	4:18:05 PM	BCl3 valve closed
1/10/2011	4:18:05 PM	PH3 valve closed
1/10/2011	4:18:05 PM	SiCl4 pre valve closed
1/10/2011	4:18:05 PM	SiCl4 post valve closed
1/10/2011	4:18:05 PM	Bubbler valve closed
1/10/2011	4:18:05 PM	Main Vac valve opened
1/10/2011	4:18:05 PM	Bypass valve opened
1/10/2011	4:18:05 PM	Helium MFC set to  0.000000
1/10/2011	4:18:05 PM	H2 MFC set to  0.000000
1/10/2011	4:18:05 PM	BCl3 MFC set to  0.000000
1/10/2011	4:18:05 PM	PHl3 MFC set to  0.000000
1/10/2011	4:18:05 PM	SiCl4 MFC set to  0.000000
1/10/2011	4:18:05 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	4:18:05 PM	Tube furnace set to 0
1/10/2011	4:19:06 PM	H2 valve closed
1/10/2011	4:19:06 PM	BCl3 valve closed
1/10/2011	4:19:06 PM	PH3 valve closed
1/10/2011	4:19:06 PM	SiCl4 pre valve closed
1/10/2011	4:19:06 PM	SiCl4 post valve closed
1/10/2011	4:19:06 PM	Bubbler valve closed
1/10/2011	4:19:06 PM	Helium valve opened
1/10/2011	4:19:06 PM	Main Vac valve opened
1/10/2011	4:19:06 PM	Bypass valve opened
1/10/2011	4:19:06 PM	Helium MFC set to  100.000000
1/10/2011	4:19:06 PM	H2 MFC set to  0.000000
1/10/2011	4:19:06 PM	BCl3 MFC set to  0.000000
1/10/2011	4:19:06 PM	PHl3 MFC set to  0.000000
1/10/2011	4:19:06 PM	SiCl4 MFC set to  0.000000
1/10/2011	4:19:06 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	4:19:06 PM	Tube furnace set to 0
1/10/2011	4:20:06 PM	Helium valve closed
1/10/2011	4:20:06 PM	H2 valve closed
1/10/2011	4:20:06 PM	BCl3 valve closed
1/10/2011	4:20:06 PM	PH3 valve closed
1/10/2011	4:20:06 PM	SiCl4 pre valve closed
1/10/2011	4:20:06 PM	SiCl4 post valve closed
1/10/2011	4:20:06 PM	Bubbler valve closed
1/10/2011	4:20:06 PM	Main Vac valve opened
1/10/2011	4:20:06 PM	Bypass valve opened
1/10/2011	4:20:06 PM	Helium MFC set to  0.000000
1/10/2011	4:20:06 PM	H2 MFC set to  0.000000
1/10/2011	4:20:06 PM	BCl3 MFC set to  0.000000
1/10/2011	4:20:06 PM	PHl3 MFC set to  0.000000
1/10/2011	4:20:06 PM	SiCl4 MFC set to  0.000000
1/10/2011	4:20:06 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	4:20:06 PM	Tube furnace set to 0
1/10/2011	4:21:06 PM	H2 valve closed
1/10/2011	4:21:06 PM	BCl3 valve closed
1/10/2011	4:21:06 PM	PH3 valve closed
1/10/2011	4:21:06 PM	SiCl4 pre valve closed
1/10/2011	4:21:06 PM	SiCl4 post valve closed
1/10/2011	4:21:06 PM	Bubbler valve closed
1/10/2011	4:21:06 PM	Helium valve opened
1/10/2011	4:21:06 PM	Main Vac valve opened
1/10/2011	4:21:06 PM	Bypass valve opened
1/10/2011	4:21:06 PM	Helium MFC set to  100.000000
1/10/2011	4:21:06 PM	H2 MFC set to  0.000000
1/10/2011	4:21:06 PM	BCl3 MFC set to  0.000000
1/10/2011	4:21:06 PM	PHl3 MFC set to  0.000000
1/10/2011	4:21:06 PM	SiCl4 MFC set to  0.000000
1/10/2011	4:21:06 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	4:21:06 PM	Tube furnace set to 0
1/10/2011	4:22:06 PM	Helium valve closed
1/10/2011	4:22:06 PM	H2 valve closed
1/10/2011	4:22:06 PM	BCl3 valve closed
1/10/2011	4:22:06 PM	PH3 valve closed
1/10/2011	4:22:06 PM	SiCl4 pre valve closed
1/10/2011	4:22:06 PM	SiCl4 post valve closed
1/10/2011	4:22:06 PM	Bubbler valve closed
1/10/2011	4:22:06 PM	Main Vac valve opened
1/10/2011	4:22:06 PM	Bypass valve opened
1/10/2011	4:22:06 PM	Helium MFC set to  0.000000
1/10/2011	4:22:06 PM	H2 MFC set to  0.000000
1/10/2011	4:22:06 PM	BCl3 MFC set to  0.000000
1/10/2011	4:22:06 PM	PHl3 MFC set to  0.000000
1/10/2011	4:22:06 PM	SiCl4 MFC set to  0.000000
1/10/2011	4:22:06 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	4:22:06 PM	Tube furnace set to 0
1/10/2011	4:22:07 PM	Run finished at 4:22 PM
1/10/2011	4:22:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/10/2011	4:25:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/10/2011	4:25:46 PM	Recipe started at 4:25 PM
1/10/2011	4:25:46 PM	Helium valve closed
1/10/2011	4:25:46 PM	H2 valve closed
1/10/2011	4:25:46 PM	BCl3 valve closed
1/10/2011	4:25:46 PM	PH3 valve closed
1/10/2011	4:25:46 PM	SiCl4 pre valve closed
1/10/2011	4:25:46 PM	SiCl4 post valve closed
1/10/2011	4:25:46 PM	Main Vac valve closed
1/10/2011	4:25:46 PM	Bypass valve closed
1/10/2011	4:25:46 PM	Bubbler valve closed
1/10/2011	4:25:46 PM	Helium MFC set to  0.000000
1/10/2011	4:25:46 PM	H2 MFC set to  0.000000
1/10/2011	4:25:46 PM	BCl3 MFC set to  0.000000
1/10/2011	4:25:46 PM	PHl3 MFC set to  0.000000
1/10/2011	4:25:46 PM	SiCl4 MFC set to  0.000000
1/10/2011	4:25:46 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	4:25:46 PM	Tube furnace set to 0
1/10/2011	4:25:47 PM	Run finished at 4:25 PM
1/10/2011	4:25:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/10/2011	4:26:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/10/2011	4:26:15 PM	Recipe started at 4:26 PM
1/10/2011	4:26:15 PM	Helium valve closed
1/10/2011	4:26:15 PM	H2 valve closed
1/10/2011	4:26:15 PM	BCl3 valve closed
1/10/2011	4:26:15 PM	PH3 valve closed
1/10/2011	4:26:15 PM	SiCl4 pre valve closed
1/10/2011	4:26:15 PM	SiCl4 post valve closed
1/10/2011	4:26:15 PM	Main Vac valve closed
1/10/2011	4:26:15 PM	Bubbler valve closed
1/10/2011	4:26:15 PM	Bypass valve opened
1/10/2011	4:26:15 PM	Helium MFC set to  0.000000
1/10/2011	4:26:15 PM	H2 MFC set to  0.000000
1/10/2011	4:26:15 PM	BCl3 MFC set to  0.000000
1/10/2011	4:26:15 PM	PHl3 MFC set to  0.000000
1/10/2011	4:26:15 PM	SiCl4 MFC set to  0.000000
1/10/2011	4:26:15 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	4:26:15 PM	Tube furnace set to 0
1/10/2011	4:26:15 PM	Helium valve closed
1/10/2011	4:26:15 PM	H2 valve closed
1/10/2011	4:26:15 PM	BCl3 valve closed
1/10/2011	4:26:15 PM	PH3 valve closed
1/10/2011	4:26:15 PM	SiCl4 pre valve closed
1/10/2011	4:26:15 PM	SiCl4 post valve closed
1/10/2011	4:26:15 PM	Bubbler valve closed
1/10/2011	4:26:15 PM	Main Vac valve opened
1/10/2011	4:26:15 PM	Bypass valve opened
1/10/2011	4:26:15 PM	Helium MFC set to  0.000000
1/10/2011	4:26:15 PM	H2 MFC set to  0.000000
1/10/2011	4:26:15 PM	BCl3 MFC set to  0.000000
1/10/2011	4:26:15 PM	PHl3 MFC set to  0.000000
1/10/2011	4:26:15 PM	SiCl4 MFC set to  0.000000
1/10/2011	4:26:15 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	4:26:15 PM	Tube furnace set to 0
1/10/2011	4:26:16 PM	Run finished at 4:26 PM
1/10/2011	4:26:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/10/2011	4:29:30 PM	Recipe started at 4:29 PM
1/10/2011	4:29:30 PM	Helium valve closed
1/10/2011	4:29:30 PM	BCl3 valve closed
1/10/2011	4:29:30 PM	PH3 valve closed
1/10/2011	4:29:30 PM	SiCl4 pre valve closed
1/10/2011	4:29:30 PM	SiCl4 post valve closed
1/10/2011	4:29:30 PM	Main Vac valve closed
1/10/2011	4:29:30 PM	Bypass valve closed
1/10/2011	4:29:30 PM	Bubbler valve closed
1/10/2011	4:29:30 PM	H2 valve opened
1/10/2011	4:29:30 PM	Helium MFC set to  0.000000
1/10/2011	4:29:30 PM	H2 MFC set to  500.000000
1/10/2011	4:29:30 PM	BCl3 MFC set to  0.000000
1/10/2011	4:29:30 PM	PHl3 MFC set to  0.000000
1/10/2011	4:29:30 PM	SiCl4 MFC set to  0.000000
1/10/2011	4:29:30 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	4:29:30 PM	Tube furnace set to 0
1/10/2011	4:30:51 PM	Helium valve closed
1/10/2011	4:30:51 PM	BCl3 valve closed
1/10/2011	4:30:51 PM	PH3 valve closed
1/10/2011	4:30:51 PM	SiCl4 pre valve closed
1/10/2011	4:30:51 PM	SiCl4 post valve closed
1/10/2011	4:30:51 PM	Main Vac valve closed
1/10/2011	4:30:51 PM	Bypass valve closed
1/10/2011	4:30:51 PM	H2 valve opened
1/10/2011	4:30:51 PM	Bubbler valve opened
1/10/2011	4:30:51 PM	Helium MFC set to  0.000000
1/10/2011	4:30:51 PM	H2 MFC set to  500.000000
1/10/2011	4:30:51 PM	BCl3 MFC set to  0.000000
1/10/2011	4:30:51 PM	PHl3 MFC set to  0.000000
1/10/2011	4:30:51 PM	SiCl4 MFC set to  0.000000
1/10/2011	4:30:51 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	4:30:51 PM	Tube furnace set to 1000
1/10/2011	4:50:51 PM	Helium valve closed
1/10/2011	4:50:51 PM	PH3 valve closed
1/10/2011	4:50:51 PM	Main Vac valve closed
1/10/2011	4:50:51 PM	Bypass valve closed
1/10/2011	4:50:51 PM	H2 valve opened
1/10/2011	4:50:51 PM	BCl3 valve opened
1/10/2011	4:50:51 PM	SiCl4 pre valve opened
1/10/2011	4:50:51 PM	SiCl4 post valve opened
1/10/2011	4:50:51 PM	Bubbler valve opened
1/10/2011	4:50:51 PM	Helium MFC set to  0.000000
1/10/2011	4:50:51 PM	H2 MFC set to  500.000000
1/10/2011	4:50:51 PM	BCl3 MFC set to  1.800000
1/10/2011	4:50:51 PM	PHl3 MFC set to  0.000000
1/10/2011	4:50:51 PM	SiCl4 MFC set to  50.000000
1/10/2011	4:50:51 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	4:50:51 PM	Tube furnace set to 1000
1/10/2011	5:08:51 PM	H2 valve closed
1/10/2011	5:08:51 PM	BCl3 valve closed
1/10/2011	5:08:51 PM	PH3 valve closed
1/10/2011	5:08:51 PM	SiCl4 pre valve closed
1/10/2011	5:08:51 PM	SiCl4 post valve closed
1/10/2011	5:08:51 PM	Main Vac valve closed
1/10/2011	5:08:51 PM	Bypass valve closed
1/10/2011	5:08:51 PM	Helium valve opened
1/10/2011	5:08:51 PM	Bubbler valve opened
1/10/2011	5:08:51 PM	Helium MFC set to  500.000000
1/10/2011	5:08:51 PM	H2 MFC set to  0.000000
1/10/2011	5:08:51 PM	BCl3 MFC set to  0.000000
1/10/2011	5:08:51 PM	PHl3 MFC set to  0.000000
1/10/2011	5:08:51 PM	SiCl4 MFC set to  0.000000
1/10/2011	5:08:51 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	5:08:51 PM	Tube furnace set to 0
1/10/2011	5:28:51 PM	Helium valve closed
1/10/2011	5:28:51 PM	H2 valve closed
1/10/2011	5:28:51 PM	BCl3 valve closed
1/10/2011	5:28:51 PM	PH3 valve closed
1/10/2011	5:28:51 PM	SiCl4 pre valve closed
1/10/2011	5:28:51 PM	SiCl4 post valve closed
1/10/2011	5:28:51 PM	Main Vac valve closed
1/10/2011	5:28:51 PM	Bypass valve closed
1/10/2011	5:28:51 PM	Bubbler valve closed
1/10/2011	5:28:51 PM	Helium MFC set to  0.000000
1/10/2011	5:28:51 PM	H2 MFC set to  0.000000
1/10/2011	5:28:51 PM	BCl3 MFC set to  0.000000
1/10/2011	5:28:51 PM	PHl3 MFC set to  0.000000
1/10/2011	5:28:51 PM	SiCl4 MFC set to  0.000000
1/10/2011	5:28:51 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	5:28:52 PM	Tube furnace set to 0
1/10/2011	5:28:52 PM	Run finished at 5:28 PM
1/10/2011	5:57:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/10/2011	5:57:02 PM	Recipe started at 5:57 PM
1/10/2011	5:57:02 PM	H2 valve closed
1/10/2011	5:57:02 PM	BCl3 valve closed
1/10/2011	5:57:02 PM	PH3 valve closed
1/10/2011	5:57:02 PM	SiCl4 pre valve closed
1/10/2011	5:57:02 PM	SiCl4 post valve closed
1/10/2011	5:57:02 PM	Main Vac valve closed
1/10/2011	5:57:02 PM	Bypass valve closed
1/10/2011	5:57:02 PM	Bubbler valve closed
1/10/2011	5:57:02 PM	Helium valve opened
1/10/2011	5:57:02 PM	Helium MFC set to  500.000000
1/10/2011	5:57:02 PM	H2 MFC set to  0.000000
1/10/2011	5:57:02 PM	BCl3 MFC set to  0.000000
1/10/2011	5:57:02 PM	PHl3 MFC set to  0.000000
1/10/2011	5:57:02 PM	SiCl4 MFC set to  0.000000
1/10/2011	5:57:02 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	5:57:02 PM	Tube furnace set to 0
1/10/2011	5:57:10 PM	Helium valve closed
1/10/2011	5:57:10 PM	H2 valve closed
1/10/2011	5:57:10 PM	BCl3 valve closed
1/10/2011	5:57:10 PM	PH3 valve closed
1/10/2011	5:57:10 PM	SiCl4 pre valve closed
1/10/2011	5:57:10 PM	SiCl4 post valve closed
1/10/2011	5:57:10 PM	Main Vac valve closed
1/10/2011	5:57:10 PM	Bypass valve closed
1/10/2011	5:57:10 PM	Bubbler valve closed
1/10/2011	5:57:10 PM	Helium MFC set to  0.000000
1/10/2011	5:57:10 PM	H2 MFC set to  0.000000
1/10/2011	5:57:10 PM	BCl3 MFC set to  0.000000
1/10/2011	5:57:10 PM	PHl3 MFC set to  0.000000
1/10/2011	5:57:10 PM	SiCl4 MFC set to  0.000000
1/10/2011	5:57:10 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	5:57:10 PM	Tube furnace set to 0
1/10/2011	5:57:10 PM	Run finished at 5:57 PM
1/10/2011	5:57:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/10/2011	5:58:13 PM	Helium MFC set to  100.000000
1/10/2011	5:58:15 PM	Helium valve opened
1/10/2011	5:58:57 PM	Helium valve closed
1/10/2011	5:59:01 PM	Helium MFC set to  0.000000
1/10/2011	6:08:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/10/2011	6:08:54 PM	Recipe started at 6:08 PM
1/10/2011	6:08:54 PM	Helium valve closed
1/10/2011	6:08:54 PM	H2 valve closed
1/10/2011	6:08:54 PM	BCl3 valve closed
1/10/2011	6:08:54 PM	PH3 valve closed
1/10/2011	6:08:54 PM	SiCl4 pre valve closed
1/10/2011	6:08:54 PM	SiCl4 post valve closed
1/10/2011	6:08:54 PM	Main Vac valve closed
1/10/2011	6:08:54 PM	Bubbler valve closed
1/10/2011	6:08:54 PM	Bypass valve opened
1/10/2011	6:08:54 PM	Helium MFC set to  0.000000
1/10/2011	6:08:54 PM	H2 MFC set to  0.000000
1/10/2011	6:08:54 PM	BCl3 MFC set to  0.000000
1/10/2011	6:08:54 PM	PHl3 MFC set to  0.000000
1/10/2011	6:08:54 PM	SiCl4 MFC set to  0.000000
1/10/2011	6:08:54 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	6:08:54 PM	Tube furnace set to 0
1/10/2011	6:09:56 PM	Helium valve closed
1/10/2011	6:09:56 PM	H2 valve closed
1/10/2011	6:09:56 PM	BCl3 valve closed
1/10/2011	6:09:56 PM	PH3 valve closed
1/10/2011	6:09:56 PM	SiCl4 pre valve closed
1/10/2011	6:09:56 PM	SiCl4 post valve closed
1/10/2011	6:09:56 PM	Bubbler valve closed
1/10/2011	6:09:56 PM	Main Vac valve opened
1/10/2011	6:09:56 PM	Bypass valve opened
1/10/2011	6:09:56 PM	Helium MFC set to  0.000000
1/10/2011	6:09:56 PM	H2 MFC set to  0.000000
1/10/2011	6:09:56 PM	BCl3 MFC set to  0.000000
1/10/2011	6:09:56 PM	PHl3 MFC set to  0.000000
1/10/2011	6:09:56 PM	SiCl4 MFC set to  0.000000
1/10/2011	6:09:56 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	6:09:56 PM	Tube furnace set to 0
1/10/2011	6:09:57 PM	Run finished at 6:09 PM
1/10/2011	6:09:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/10/2011	6:11:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/10/2011	6:11:52 PM	Recipe started at 6:11 PM
1/10/2011	6:11:52 PM	Helium valve closed
1/10/2011	6:11:52 PM	H2 valve closed
1/10/2011	6:11:52 PM	BCl3 valve closed
1/10/2011	6:11:52 PM	PH3 valve closed
1/10/2011	6:11:52 PM	SiCl4 pre valve closed
1/10/2011	6:11:52 PM	SiCl4 post valve closed
1/10/2011	6:11:52 PM	Main Vac valve closed
1/10/2011	6:11:52 PM	Bubbler valve closed
1/10/2011	6:11:52 PM	Bypass valve opened
1/10/2011	6:11:52 PM	Helium MFC set to  0.000000
1/10/2011	6:11:52 PM	H2 MFC set to  0.000000
1/10/2011	6:11:52 PM	BCl3 MFC set to  0.000000
1/10/2011	6:11:52 PM	PHl3 MFC set to  0.000000
1/10/2011	6:11:52 PM	SiCl4 MFC set to  0.000000
1/10/2011	6:11:52 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	6:11:52 PM	Tube furnace set to 0
1/10/2011	6:11:52 PM	Helium valve closed
1/10/2011	6:11:52 PM	H2 valve closed
1/10/2011	6:11:52 PM	BCl3 valve closed
1/10/2011	6:11:52 PM	PH3 valve closed
1/10/2011	6:11:52 PM	SiCl4 pre valve closed
1/10/2011	6:11:52 PM	SiCl4 post valve closed
1/10/2011	6:11:52 PM	Bubbler valve closed
1/10/2011	6:11:52 PM	Main Vac valve opened
1/10/2011	6:11:52 PM	Bypass valve opened
1/10/2011	6:11:52 PM	Helium MFC set to  0.000000
1/10/2011	6:11:52 PM	H2 MFC set to  0.000000
1/10/2011	6:11:52 PM	BCl3 MFC set to  0.000000
1/10/2011	6:11:52 PM	PHl3 MFC set to  0.000000
1/10/2011	6:11:52 PM	SiCl4 MFC set to  0.000000
1/10/2011	6:11:52 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	6:11:52 PM	Tube furnace set to 0
1/10/2011	6:12:52 PM	H2 valve closed
1/10/2011	6:12:52 PM	BCl3 valve closed
1/10/2011	6:12:52 PM	PH3 valve closed
1/10/2011	6:12:52 PM	SiCl4 pre valve closed
1/10/2011	6:12:52 PM	SiCl4 post valve closed
1/10/2011	6:12:52 PM	Bubbler valve closed
1/10/2011	6:12:52 PM	Helium valve opened
1/10/2011	6:12:52 PM	Main Vac valve opened
1/10/2011	6:12:52 PM	Bypass valve opened
1/10/2011	6:12:52 PM	Helium MFC set to  100.000000
1/10/2011	6:12:52 PM	H2 MFC set to  0.000000
1/10/2011	6:12:52 PM	BCl3 MFC set to  0.000000
1/10/2011	6:12:52 PM	PHl3 MFC set to  0.000000
1/10/2011	6:12:52 PM	SiCl4 MFC set to  0.000000
1/10/2011	6:12:52 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	6:12:52 PM	Tube furnace set to 0
1/10/2011	6:13:53 PM	Helium valve closed
1/10/2011	6:13:53 PM	H2 valve closed
1/10/2011	6:13:53 PM	BCl3 valve closed
1/10/2011	6:13:53 PM	PH3 valve closed
1/10/2011	6:13:53 PM	SiCl4 pre valve closed
1/10/2011	6:13:53 PM	SiCl4 post valve closed
1/10/2011	6:13:53 PM	Bubbler valve closed
1/10/2011	6:13:53 PM	Main Vac valve opened
1/10/2011	6:13:53 PM	Bypass valve opened
1/10/2011	6:13:53 PM	Helium MFC set to  0.000000
1/10/2011	6:13:53 PM	H2 MFC set to  0.000000
1/10/2011	6:13:53 PM	BCl3 MFC set to  0.000000
1/10/2011	6:13:53 PM	PHl3 MFC set to  0.000000
1/10/2011	6:13:53 PM	SiCl4 MFC set to  0.000000
1/10/2011	6:13:53 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	6:13:53 PM	Tube furnace set to 0
1/10/2011	6:14:53 PM	H2 valve closed
1/10/2011	6:14:53 PM	BCl3 valve closed
1/10/2011	6:14:53 PM	PH3 valve closed
1/10/2011	6:14:53 PM	SiCl4 pre valve closed
1/10/2011	6:14:53 PM	SiCl4 post valve closed
1/10/2011	6:14:53 PM	Bubbler valve closed
1/10/2011	6:14:53 PM	Helium valve opened
1/10/2011	6:14:53 PM	Main Vac valve opened
1/10/2011	6:14:53 PM	Bypass valve opened
1/10/2011	6:14:53 PM	Helium MFC set to  100.000000
1/10/2011	6:14:53 PM	H2 MFC set to  0.000000
1/10/2011	6:14:53 PM	BCl3 MFC set to  0.000000
1/10/2011	6:14:53 PM	PHl3 MFC set to  0.000000
1/10/2011	6:14:53 PM	SiCl4 MFC set to  0.000000
1/10/2011	6:14:53 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	6:14:53 PM	Tube furnace set to 0
1/10/2011	6:15:53 PM	Helium valve closed
1/10/2011	6:15:53 PM	H2 valve closed
1/10/2011	6:15:53 PM	BCl3 valve closed
1/10/2011	6:15:53 PM	PH3 valve closed
1/10/2011	6:15:53 PM	SiCl4 pre valve closed
1/10/2011	6:15:53 PM	SiCl4 post valve closed
1/10/2011	6:15:53 PM	Bubbler valve closed
1/10/2011	6:15:53 PM	Main Vac valve opened
1/10/2011	6:15:53 PM	Bypass valve opened
1/10/2011	6:15:53 PM	Helium MFC set to  0.000000
1/10/2011	6:15:53 PM	H2 MFC set to  0.000000
1/10/2011	6:15:53 PM	BCl3 MFC set to  0.000000
1/10/2011	6:15:53 PM	PHl3 MFC set to  0.000000
1/10/2011	6:15:53 PM	SiCl4 MFC set to  0.000000
1/10/2011	6:15:53 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	6:15:53 PM	Tube furnace set to 0
1/10/2011	6:16:53 PM	H2 valve closed
1/10/2011	6:16:53 PM	BCl3 valve closed
1/10/2011	6:16:53 PM	PH3 valve closed
1/10/2011	6:16:53 PM	SiCl4 pre valve closed
1/10/2011	6:16:53 PM	SiCl4 post valve closed
1/10/2011	6:16:53 PM	Bubbler valve closed
1/10/2011	6:16:53 PM	Helium valve opened
1/10/2011	6:16:53 PM	Main Vac valve opened
1/10/2011	6:16:53 PM	Bypass valve opened
1/10/2011	6:16:53 PM	Helium MFC set to  100.000000
1/10/2011	6:16:53 PM	H2 MFC set to  0.000000
1/10/2011	6:16:53 PM	BCl3 MFC set to  0.000000
1/10/2011	6:16:53 PM	PHl3 MFC set to  0.000000
1/10/2011	6:16:53 PM	SiCl4 MFC set to  0.000000
1/10/2011	6:16:53 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	6:16:53 PM	Tube furnace set to 0
1/10/2011	6:17:53 PM	Helium valve closed
1/10/2011	6:17:53 PM	H2 valve closed
1/10/2011	6:17:53 PM	BCl3 valve closed
1/10/2011	6:17:53 PM	PH3 valve closed
1/10/2011	6:17:53 PM	SiCl4 pre valve closed
1/10/2011	6:17:53 PM	SiCl4 post valve closed
1/10/2011	6:17:53 PM	Bubbler valve closed
1/10/2011	6:17:53 PM	Main Vac valve opened
1/10/2011	6:17:53 PM	Bypass valve opened
1/10/2011	6:17:53 PM	Helium MFC set to  0.000000
1/10/2011	6:17:53 PM	H2 MFC set to  0.000000
1/10/2011	6:17:53 PM	BCl3 MFC set to  0.000000
1/10/2011	6:17:53 PM	PHl3 MFC set to  0.000000
1/10/2011	6:17:53 PM	SiCl4 MFC set to  0.000000
1/10/2011	6:17:53 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	6:17:53 PM	Tube furnace set to 0
1/10/2011	6:18:54 PM	H2 valve closed
1/10/2011	6:18:54 PM	BCl3 valve closed
1/10/2011	6:18:54 PM	PH3 valve closed
1/10/2011	6:18:54 PM	SiCl4 pre valve closed
1/10/2011	6:18:54 PM	SiCl4 post valve closed
1/10/2011	6:18:54 PM	Bubbler valve closed
1/10/2011	6:18:54 PM	Helium valve opened
1/10/2011	6:18:54 PM	Main Vac valve opened
1/10/2011	6:18:54 PM	Bypass valve opened
1/10/2011	6:18:54 PM	Helium MFC set to  100.000000
1/10/2011	6:18:54 PM	H2 MFC set to  0.000000
1/10/2011	6:18:54 PM	BCl3 MFC set to  0.000000
1/10/2011	6:18:54 PM	PHl3 MFC set to  0.000000
1/10/2011	6:18:54 PM	SiCl4 MFC set to  0.000000
1/10/2011	6:18:54 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	6:18:54 PM	Tube furnace set to 0
1/10/2011	6:19:54 PM	Helium valve closed
1/10/2011	6:19:54 PM	H2 valve closed
1/10/2011	6:19:54 PM	BCl3 valve closed
1/10/2011	6:19:54 PM	PH3 valve closed
1/10/2011	6:19:54 PM	SiCl4 pre valve closed
1/10/2011	6:19:54 PM	SiCl4 post valve closed
1/10/2011	6:19:54 PM	Bubbler valve closed
1/10/2011	6:19:54 PM	Main Vac valve opened
1/10/2011	6:19:54 PM	Bypass valve opened
1/10/2011	6:19:54 PM	Helium MFC set to  0.000000
1/10/2011	6:19:54 PM	H2 MFC set to  0.000000
1/10/2011	6:19:54 PM	BCl3 MFC set to  0.000000
1/10/2011	6:19:54 PM	PHl3 MFC set to  0.000000
1/10/2011	6:19:54 PM	SiCl4 MFC set to  0.000000
1/10/2011	6:19:54 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	6:19:54 PM	Tube furnace set to 0
1/10/2011	6:20:54 PM	H2 valve closed
1/10/2011	6:20:54 PM	BCl3 valve closed
1/10/2011	6:20:54 PM	PH3 valve closed
1/10/2011	6:20:54 PM	SiCl4 pre valve closed
1/10/2011	6:20:54 PM	SiCl4 post valve closed
1/10/2011	6:20:54 PM	Bubbler valve closed
1/10/2011	6:20:54 PM	Helium valve opened
1/10/2011	6:20:54 PM	Main Vac valve opened
1/10/2011	6:20:54 PM	Bypass valve opened
1/10/2011	6:20:54 PM	Helium MFC set to  100.000000
1/10/2011	6:20:54 PM	H2 MFC set to  0.000000
1/10/2011	6:20:54 PM	BCl3 MFC set to  0.000000
1/10/2011	6:20:54 PM	PHl3 MFC set to  0.000000
1/10/2011	6:20:54 PM	SiCl4 MFC set to  0.000000
1/10/2011	6:20:54 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	6:20:54 PM	Tube furnace set to 0
1/10/2011	6:21:54 PM	Helium valve closed
1/10/2011	6:21:54 PM	H2 valve closed
1/10/2011	6:21:54 PM	BCl3 valve closed
1/10/2011	6:21:54 PM	PH3 valve closed
1/10/2011	6:21:54 PM	SiCl4 pre valve closed
1/10/2011	6:21:54 PM	SiCl4 post valve closed
1/10/2011	6:21:54 PM	Bubbler valve closed
1/10/2011	6:21:54 PM	Main Vac valve opened
1/10/2011	6:21:54 PM	Bypass valve opened
1/10/2011	6:21:54 PM	Helium MFC set to  0.000000
1/10/2011	6:21:54 PM	H2 MFC set to  0.000000
1/10/2011	6:21:54 PM	BCl3 MFC set to  0.000000
1/10/2011	6:21:54 PM	PHl3 MFC set to  0.000000
1/10/2011	6:21:54 PM	SiCl4 MFC set to  0.000000
1/10/2011	6:21:54 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	6:21:54 PM	Tube furnace set to 0
1/10/2011	6:22:54 PM	H2 valve closed
1/10/2011	6:22:54 PM	BCl3 valve closed
1/10/2011	6:22:54 PM	PH3 valve closed
1/10/2011	6:22:54 PM	SiCl4 pre valve closed
1/10/2011	6:22:54 PM	SiCl4 post valve closed
1/10/2011	6:22:54 PM	Bubbler valve closed
1/10/2011	6:22:54 PM	Helium valve opened
1/10/2011	6:22:54 PM	Main Vac valve opened
1/10/2011	6:22:54 PM	Bypass valve opened
1/10/2011	6:22:54 PM	Helium MFC set to  100.000000
1/10/2011	6:22:54 PM	H2 MFC set to  0.000000
1/10/2011	6:22:54 PM	BCl3 MFC set to  0.000000
1/10/2011	6:22:54 PM	PHl3 MFC set to  0.000000
1/10/2011	6:22:54 PM	SiCl4 MFC set to  0.000000
1/10/2011	6:22:54 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	6:22:55 PM	Tube furnace set to 0
1/10/2011	6:23:55 PM	Helium valve closed
1/10/2011	6:23:55 PM	H2 valve closed
1/10/2011	6:23:55 PM	BCl3 valve closed
1/10/2011	6:23:55 PM	PH3 valve closed
1/10/2011	6:23:55 PM	SiCl4 pre valve closed
1/10/2011	6:23:55 PM	SiCl4 post valve closed
1/10/2011	6:23:55 PM	Bubbler valve closed
1/10/2011	6:23:55 PM	Main Vac valve opened
1/10/2011	6:23:55 PM	Bypass valve opened
1/10/2011	6:23:55 PM	Helium MFC set to  0.000000
1/10/2011	6:23:55 PM	H2 MFC set to  0.000000
1/10/2011	6:23:55 PM	BCl3 MFC set to  0.000000
1/10/2011	6:23:55 PM	PHl3 MFC set to  0.000000
1/10/2011	6:23:55 PM	SiCl4 MFC set to  0.000000
1/10/2011	6:23:55 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	6:23:55 PM	Tube furnace set to 0
1/10/2011	6:24:55 PM	H2 valve closed
1/10/2011	6:24:55 PM	BCl3 valve closed
1/10/2011	6:24:55 PM	PH3 valve closed
1/10/2011	6:24:55 PM	SiCl4 pre valve closed
1/10/2011	6:24:55 PM	SiCl4 post valve closed
1/10/2011	6:24:55 PM	Bubbler valve closed
1/10/2011	6:24:55 PM	Helium valve opened
1/10/2011	6:24:55 PM	Main Vac valve opened
1/10/2011	6:24:55 PM	Bypass valve opened
1/10/2011	6:24:55 PM	Helium MFC set to  100.000000
1/10/2011	6:24:55 PM	H2 MFC set to  0.000000
1/10/2011	6:24:55 PM	BCl3 MFC set to  0.000000
1/10/2011	6:24:55 PM	PHl3 MFC set to  0.000000
1/10/2011	6:24:55 PM	SiCl4 MFC set to  0.000000
1/10/2011	6:24:55 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	6:24:55 PM	Tube furnace set to 0
1/10/2011	6:25:55 PM	Helium valve closed
1/10/2011	6:25:55 PM	H2 valve closed
1/10/2011	6:25:55 PM	BCl3 valve closed
1/10/2011	6:25:55 PM	PH3 valve closed
1/10/2011	6:25:55 PM	SiCl4 pre valve closed
1/10/2011	6:25:55 PM	SiCl4 post valve closed
1/10/2011	6:25:55 PM	Bubbler valve closed
1/10/2011	6:25:55 PM	Main Vac valve opened
1/10/2011	6:25:55 PM	Bypass valve opened
1/10/2011	6:25:55 PM	Helium MFC set to  0.000000
1/10/2011	6:25:55 PM	H2 MFC set to  0.000000
1/10/2011	6:25:55 PM	BCl3 MFC set to  0.000000
1/10/2011	6:25:55 PM	PHl3 MFC set to  0.000000
1/10/2011	6:25:55 PM	SiCl4 MFC set to  0.000000
1/10/2011	6:25:55 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	6:25:55 PM	Tube furnace set to 0
1/10/2011	6:26:55 PM	H2 valve closed
1/10/2011	6:26:55 PM	BCl3 valve closed
1/10/2011	6:26:55 PM	PH3 valve closed
1/10/2011	6:26:55 PM	SiCl4 pre valve closed
1/10/2011	6:26:55 PM	SiCl4 post valve closed
1/10/2011	6:26:55 PM	Bubbler valve closed
1/10/2011	6:26:55 PM	Helium valve opened
1/10/2011	6:26:55 PM	Main Vac valve opened
1/10/2011	6:26:55 PM	Bypass valve opened
1/10/2011	6:26:55 PM	Helium MFC set to  100.000000
1/10/2011	6:26:55 PM	H2 MFC set to  0.000000
1/10/2011	6:26:55 PM	BCl3 MFC set to  0.000000
1/10/2011	6:26:55 PM	PHl3 MFC set to  0.000000
1/10/2011	6:26:55 PM	SiCl4 MFC set to  0.000000
1/10/2011	6:26:55 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	6:26:55 PM	Tube furnace set to 0
1/10/2011	6:27:55 PM	Helium valve closed
1/10/2011	6:27:55 PM	H2 valve closed
1/10/2011	6:27:55 PM	BCl3 valve closed
1/10/2011	6:27:55 PM	PH3 valve closed
1/10/2011	6:27:55 PM	SiCl4 pre valve closed
1/10/2011	6:27:55 PM	SiCl4 post valve closed
1/10/2011	6:27:55 PM	Bubbler valve closed
1/10/2011	6:27:55 PM	Main Vac valve opened
1/10/2011	6:27:55 PM	Bypass valve opened
1/10/2011	6:27:55 PM	Helium MFC set to  0.000000
1/10/2011	6:27:55 PM	H2 MFC set to  0.000000
1/10/2011	6:27:55 PM	BCl3 MFC set to  0.000000
1/10/2011	6:27:55 PM	PHl3 MFC set to  0.000000
1/10/2011	6:27:55 PM	SiCl4 MFC set to  0.000000
1/10/2011	6:27:55 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	6:27:56 PM	Tube furnace set to 0
1/10/2011	6:28:56 PM	H2 valve closed
1/10/2011	6:28:56 PM	BCl3 valve closed
1/10/2011	6:28:56 PM	PH3 valve closed
1/10/2011	6:28:56 PM	SiCl4 pre valve closed
1/10/2011	6:28:56 PM	SiCl4 post valve closed
1/10/2011	6:28:56 PM	Bubbler valve closed
1/10/2011	6:28:56 PM	Helium valve opened
1/10/2011	6:28:56 PM	Main Vac valve opened
1/10/2011	6:28:56 PM	Bypass valve opened
1/10/2011	6:28:56 PM	Helium MFC set to  100.000000
1/10/2011	6:28:56 PM	H2 MFC set to  0.000000
1/10/2011	6:28:56 PM	BCl3 MFC set to  0.000000
1/10/2011	6:28:56 PM	PHl3 MFC set to  0.000000
1/10/2011	6:28:56 PM	SiCl4 MFC set to  0.000000
1/10/2011	6:28:56 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	6:28:56 PM	Tube furnace set to 0
1/10/2011	6:29:56 PM	Helium valve closed
1/10/2011	6:29:56 PM	H2 valve closed
1/10/2011	6:29:56 PM	BCl3 valve closed
1/10/2011	6:29:56 PM	PH3 valve closed
1/10/2011	6:29:56 PM	SiCl4 pre valve closed
1/10/2011	6:29:56 PM	SiCl4 post valve closed
1/10/2011	6:29:56 PM	Bubbler valve closed
1/10/2011	6:29:56 PM	Main Vac valve opened
1/10/2011	6:29:56 PM	Bypass valve opened
1/10/2011	6:29:56 PM	Helium MFC set to  0.000000
1/10/2011	6:29:56 PM	H2 MFC set to  0.000000
1/10/2011	6:29:56 PM	BCl3 MFC set to  0.000000
1/10/2011	6:29:56 PM	PHl3 MFC set to  0.000000
1/10/2011	6:29:56 PM	SiCl4 MFC set to  0.000000
1/10/2011	6:29:56 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	6:29:56 PM	Tube furnace set to 0
1/10/2011	6:30:56 PM	H2 valve closed
1/10/2011	6:30:56 PM	BCl3 valve closed
1/10/2011	6:30:56 PM	PH3 valve closed
1/10/2011	6:30:56 PM	SiCl4 pre valve closed
1/10/2011	6:30:56 PM	SiCl4 post valve closed
1/10/2011	6:30:56 PM	Bubbler valve closed
1/10/2011	6:30:56 PM	Helium valve opened
1/10/2011	6:30:56 PM	Main Vac valve opened
1/10/2011	6:30:56 PM	Bypass valve opened
1/10/2011	6:30:56 PM	Helium MFC set to  100.000000
1/10/2011	6:30:56 PM	H2 MFC set to  0.000000
1/10/2011	6:30:56 PM	BCl3 MFC set to  0.000000
1/10/2011	6:30:56 PM	PHl3 MFC set to  0.000000
1/10/2011	6:30:56 PM	SiCl4 MFC set to  0.000000
1/10/2011	6:30:56 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	6:30:56 PM	Tube furnace set to 0
1/10/2011	6:31:56 PM	Helium valve closed
1/10/2011	6:31:56 PM	H2 valve closed
1/10/2011	6:31:56 PM	BCl3 valve closed
1/10/2011	6:31:56 PM	PH3 valve closed
1/10/2011	6:31:56 PM	SiCl4 pre valve closed
1/10/2011	6:31:56 PM	SiCl4 post valve closed
1/10/2011	6:31:56 PM	Bubbler valve closed
1/10/2011	6:31:56 PM	Main Vac valve opened
1/10/2011	6:31:56 PM	Bypass valve opened
1/10/2011	6:31:56 PM	Helium MFC set to  0.000000
1/10/2011	6:31:56 PM	H2 MFC set to  0.000000
1/10/2011	6:31:56 PM	BCl3 MFC set to  0.000000
1/10/2011	6:31:56 PM	PHl3 MFC set to  0.000000
1/10/2011	6:31:56 PM	SiCl4 MFC set to  0.000000
1/10/2011	6:31:56 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	6:31:56 PM	Tube furnace set to 0
1/10/2011	6:31:57 PM	Run finished at 6:31 PM
1/10/2011	6:31:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/10/2011	7:59:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/10/2011	7:59:10 PM	Recipe started at 7:59 PM
1/10/2011	7:59:10 PM	Helium valve closed
1/10/2011	7:59:10 PM	H2 valve closed
1/10/2011	7:59:10 PM	BCl3 valve closed
1/10/2011	7:59:10 PM	PH3 valve closed
1/10/2011	7:59:10 PM	SiCl4 pre valve closed
1/10/2011	7:59:10 PM	SiCl4 post valve closed
1/10/2011	7:59:10 PM	Main Vac valve closed
1/10/2011	7:59:10 PM	Bypass valve closed
1/10/2011	7:59:10 PM	Bubbler valve closed
1/10/2011	7:59:10 PM	Helium MFC set to  0.000000
1/10/2011	7:59:10 PM	H2 MFC set to  0.000000
1/10/2011	7:59:10 PM	BCl3 MFC set to  0.000000
1/10/2011	7:59:10 PM	PHl3 MFC set to  0.000000
1/10/2011	7:59:10 PM	SiCl4 MFC set to  0.000000
1/10/2011	7:59:10 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	7:59:10 PM	Tube furnace set to 0
1/10/2011	7:59:11 PM	Run finished at 7:59 PM
1/10/2011	7:59:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/10/2011	7:59:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/10/2011	7:59:38 PM	Recipe started at 7:59 PM
1/10/2011	7:59:38 PM	Helium valve closed
1/10/2011	7:59:38 PM	H2 valve closed
1/10/2011	7:59:38 PM	BCl3 valve closed
1/10/2011	7:59:38 PM	PH3 valve closed
1/10/2011	7:59:38 PM	SiCl4 pre valve closed
1/10/2011	7:59:38 PM	SiCl4 post valve closed
1/10/2011	7:59:38 PM	Main Vac valve closed
1/10/2011	7:59:38 PM	Bubbler valve closed
1/10/2011	7:59:38 PM	Bypass valve opened
1/10/2011	7:59:38 PM	Helium MFC set to  0.000000
1/10/2011	7:59:38 PM	H2 MFC set to  0.000000
1/10/2011	7:59:38 PM	BCl3 MFC set to  0.000000
1/10/2011	7:59:38 PM	PHl3 MFC set to  0.000000
1/10/2011	7:59:38 PM	SiCl4 MFC set to  0.000000
1/10/2011	7:59:38 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	7:59:39 PM	Tube furnace set to 0
1/10/2011	7:59:39 PM	Helium valve closed
1/10/2011	7:59:39 PM	H2 valve closed
1/10/2011	7:59:39 PM	BCl3 valve closed
1/10/2011	7:59:39 PM	PH3 valve closed
1/10/2011	7:59:39 PM	SiCl4 pre valve closed
1/10/2011	7:59:39 PM	SiCl4 post valve closed
1/10/2011	7:59:39 PM	Bubbler valve closed
1/10/2011	7:59:39 PM	Main Vac valve opened
1/10/2011	7:59:39 PM	Bypass valve opened
1/10/2011	7:59:39 PM	Helium MFC set to  0.000000
1/10/2011	7:59:39 PM	H2 MFC set to  0.000000
1/10/2011	7:59:39 PM	BCl3 MFC set to  0.000000
1/10/2011	7:59:39 PM	PHl3 MFC set to  0.000000
1/10/2011	7:59:39 PM	SiCl4 MFC set to  0.000000
1/10/2011	7:59:39 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	7:59:39 PM	Tube furnace set to 0
1/10/2011	7:59:39 PM	Run finished at 7:59 PM
1/10/2011	7:59:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/10/2011	8:00:19 PM	Recipe started at 8:00 PM
1/10/2011	8:00:19 PM	Helium valve closed
1/10/2011	8:00:19 PM	BCl3 valve closed
1/10/2011	8:00:19 PM	PH3 valve closed
1/10/2011	8:00:19 PM	SiCl4 pre valve closed
1/10/2011	8:00:19 PM	SiCl4 post valve closed
1/10/2011	8:00:19 PM	Main Vac valve closed
1/10/2011	8:00:19 PM	Bypass valve closed
1/10/2011	8:00:19 PM	Bubbler valve closed
1/10/2011	8:00:19 PM	H2 valve opened
1/10/2011	8:00:19 PM	Helium MFC set to  0.000000
1/10/2011	8:00:19 PM	H2 MFC set to  500.000000
1/10/2011	8:00:19 PM	BCl3 MFC set to  0.000000
1/10/2011	8:00:19 PM	PHl3 MFC set to  0.000000
1/10/2011	8:00:19 PM	SiCl4 MFC set to  0.000000
1/10/2011	8:00:19 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	8:00:19 PM	Tube furnace set to 0
1/10/2011	8:01:41 PM	Helium valve closed
1/10/2011	8:01:41 PM	BCl3 valve closed
1/10/2011	8:01:41 PM	PH3 valve closed
1/10/2011	8:01:41 PM	SiCl4 pre valve closed
1/10/2011	8:01:41 PM	SiCl4 post valve closed
1/10/2011	8:01:41 PM	Main Vac valve closed
1/10/2011	8:01:41 PM	Bypass valve closed
1/10/2011	8:01:41 PM	H2 valve opened
1/10/2011	8:01:41 PM	Bubbler valve opened
1/10/2011	8:01:41 PM	Helium MFC set to  0.000000
1/10/2011	8:01:41 PM	H2 MFC set to  500.000000
1/10/2011	8:01:41 PM	BCl3 MFC set to  0.000000
1/10/2011	8:01:41 PM	PHl3 MFC set to  0.000000
1/10/2011	8:01:41 PM	SiCl4 MFC set to  0.000000
1/10/2011	8:01:41 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	8:01:41 PM	Tube furnace set to 1000
1/10/2011	8:21:41 PM	Helium valve closed
1/10/2011	8:21:41 PM	PH3 valve closed
1/10/2011	8:21:41 PM	Main Vac valve closed
1/10/2011	8:21:41 PM	Bypass valve closed
1/10/2011	8:21:41 PM	H2 valve opened
1/10/2011	8:21:41 PM	BCl3 valve opened
1/10/2011	8:21:41 PM	SiCl4 pre valve opened
1/10/2011	8:21:41 PM	SiCl4 post valve opened
1/10/2011	8:21:41 PM	Bubbler valve opened
1/10/2011	8:21:41 PM	Helium MFC set to  0.000000
1/10/2011	8:21:41 PM	H2 MFC set to  500.000000
1/10/2011	8:21:41 PM	BCl3 MFC set to  1.800000
1/10/2011	8:21:41 PM	PHl3 MFC set to  0.000000
1/10/2011	8:21:41 PM	SiCl4 MFC set to  50.000000
1/10/2011	8:21:41 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	8:21:41 PM	Tube furnace set to 1000
1/10/2011	8:41:41 PM	H2 valve closed
1/10/2011	8:41:41 PM	BCl3 valve closed
1/10/2011	8:41:41 PM	PH3 valve closed
1/10/2011	8:41:41 PM	SiCl4 pre valve closed
1/10/2011	8:41:41 PM	SiCl4 post valve closed
1/10/2011	8:41:41 PM	Main Vac valve closed
1/10/2011	8:41:41 PM	Bypass valve closed
1/10/2011	8:41:41 PM	Helium valve opened
1/10/2011	8:41:41 PM	Bubbler valve opened
1/10/2011	8:41:41 PM	Helium MFC set to  500.000000
1/10/2011	8:41:41 PM	H2 MFC set to  0.000000
1/10/2011	8:41:41 PM	BCl3 MFC set to  0.000000
1/10/2011	8:41:41 PM	PHl3 MFC set to  0.000000
1/10/2011	8:41:41 PM	SiCl4 MFC set to  0.000000
1/10/2011	8:41:41 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	8:41:41 PM	Tube furnace set to 0
1/10/2011	9:01:41 PM	Helium valve closed
1/10/2011	9:01:41 PM	H2 valve closed
1/10/2011	9:01:41 PM	BCl3 valve closed
1/10/2011	9:01:41 PM	PH3 valve closed
1/10/2011	9:01:41 PM	SiCl4 pre valve closed
1/10/2011	9:01:41 PM	SiCl4 post valve closed
1/10/2011	9:01:41 PM	Main Vac valve closed
1/10/2011	9:01:41 PM	Bypass valve closed
1/10/2011	9:01:41 PM	Bubbler valve closed
1/10/2011	9:01:41 PM	Helium MFC set to  0.000000
1/10/2011	9:01:41 PM	H2 MFC set to  0.000000
1/10/2011	9:01:41 PM	BCl3 MFC set to  0.000000
1/10/2011	9:01:41 PM	PHl3 MFC set to  0.000000
1/10/2011	9:01:41 PM	SiCl4 MFC set to  0.000000
1/10/2011	9:01:41 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	9:01:41 PM	Tube furnace set to 0
1/10/2011	9:01:42 PM	Run finished at 9:01 PM
1/10/2011	9:23:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/10/2011	9:23:37 PM	Recipe started at 9:23 PM
1/10/2011	9:23:37 PM	H2 valve closed
1/10/2011	9:23:37 PM	BCl3 valve closed
1/10/2011	9:23:37 PM	PH3 valve closed
1/10/2011	9:23:37 PM	SiCl4 pre valve closed
1/10/2011	9:23:37 PM	SiCl4 post valve closed
1/10/2011	9:23:37 PM	Main Vac valve closed
1/10/2011	9:23:37 PM	Bypass valve closed
1/10/2011	9:23:37 PM	Bubbler valve closed
1/10/2011	9:23:37 PM	Helium valve opened
1/10/2011	9:23:37 PM	Helium MFC set to  500.000000
1/10/2011	9:23:37 PM	H2 MFC set to  0.000000
1/10/2011	9:23:37 PM	BCl3 MFC set to  0.000000
1/10/2011	9:23:37 PM	PHl3 MFC set to  0.000000
1/10/2011	9:23:37 PM	SiCl4 MFC set to  0.000000
1/10/2011	9:23:37 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	9:23:37 PM	Tube furnace set to 0
1/10/2011	9:23:45 PM	Helium valve closed
1/10/2011	9:23:45 PM	H2 valve closed
1/10/2011	9:23:45 PM	BCl3 valve closed
1/10/2011	9:23:45 PM	PH3 valve closed
1/10/2011	9:23:45 PM	SiCl4 pre valve closed
1/10/2011	9:23:45 PM	SiCl4 post valve closed
1/10/2011	9:23:45 PM	Main Vac valve closed
1/10/2011	9:23:45 PM	Bypass valve closed
1/10/2011	9:23:45 PM	Bubbler valve closed
1/10/2011	9:23:45 PM	Helium MFC set to  0.000000
1/10/2011	9:23:45 PM	H2 MFC set to  0.000000
1/10/2011	9:23:45 PM	BCl3 MFC set to  0.000000
1/10/2011	9:23:45 PM	PHl3 MFC set to  0.000000
1/10/2011	9:23:45 PM	SiCl4 MFC set to  0.000000
1/10/2011	9:23:45 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	9:23:45 PM	Tube furnace set to 0
1/10/2011	9:23:45 PM	Run finished at 9:23 PM
1/10/2011	9:23:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/10/2011	9:27:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/10/2011	9:27:57 PM	Recipe started at 9:27 PM
1/10/2011	9:27:57 PM	H2 valve closed
1/10/2011	9:27:57 PM	BCl3 valve closed
1/10/2011	9:27:57 PM	PH3 valve closed
1/10/2011	9:27:57 PM	SiCl4 pre valve closed
1/10/2011	9:27:57 PM	SiCl4 post valve closed
1/10/2011	9:27:57 PM	Main Vac valve closed
1/10/2011	9:27:57 PM	Bypass valve closed
1/10/2011	9:27:57 PM	Bubbler valve closed
1/10/2011	9:27:57 PM	Helium valve opened
1/10/2011	9:27:57 PM	Helium MFC set to  500.000000
1/10/2011	9:27:57 PM	H2 MFC set to  0.000000
1/10/2011	9:27:57 PM	BCl3 MFC set to  0.000000
1/10/2011	9:27:57 PM	PHl3 MFC set to  0.000000
1/10/2011	9:27:57 PM	SiCl4 MFC set to  0.000000
1/10/2011	9:27:57 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	9:27:57 PM	Tube furnace set to 0
1/10/2011	9:27:58 PM	Helium valve closed
1/10/2011	9:27:58 PM	H2 valve closed
1/10/2011	9:27:58 PM	BCl3 valve closed
1/10/2011	9:27:58 PM	PH3 valve closed
1/10/2011	9:27:58 PM	SiCl4 pre valve closed
1/10/2011	9:27:58 PM	SiCl4 post valve closed
1/10/2011	9:27:58 PM	Main Vac valve closed
1/10/2011	9:27:58 PM	Bypass valve closed
1/10/2011	9:27:58 PM	Bubbler valve closed
1/10/2011	9:27:58 PM	Helium MFC set to  0.000000
1/10/2011	9:27:58 PM	H2 MFC set to  0.000000
1/10/2011	9:27:58 PM	BCl3 MFC set to  0.000000
1/10/2011	9:27:58 PM	PHl3 MFC set to  0.000000
1/10/2011	9:27:58 PM	SiCl4 MFC set to  0.000000
1/10/2011	9:27:58 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	9:27:58 PM	Tube furnace set to 0
1/10/2011	9:27:58 PM	Run finished at 9:27 PM
1/10/2011	9:27:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/10/2011	9:33:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/10/2011	9:33:28 PM	Recipe started at 9:33 PM
1/10/2011	9:33:28 PM	Helium valve closed
1/10/2011	9:33:28 PM	H2 valve closed
1/10/2011	9:33:28 PM	BCl3 valve closed
1/10/2011	9:33:28 PM	PH3 valve closed
1/10/2011	9:33:28 PM	SiCl4 pre valve closed
1/10/2011	9:33:28 PM	SiCl4 post valve closed
1/10/2011	9:33:28 PM	Main Vac valve closed
1/10/2011	9:33:28 PM	Bubbler valve closed
1/10/2011	9:33:28 PM	Bypass valve opened
1/10/2011	9:33:28 PM	Helium MFC set to  0.000000
1/10/2011	9:33:28 PM	H2 MFC set to  0.000000
1/10/2011	9:33:28 PM	BCl3 MFC set to  0.000000
1/10/2011	9:33:28 PM	PHl3 MFC set to  0.000000
1/10/2011	9:33:28 PM	SiCl4 MFC set to  0.000000
1/10/2011	9:33:28 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	9:33:28 PM	Tube furnace set to 0
1/10/2011	9:34:30 PM	Helium valve closed
1/10/2011	9:34:30 PM	H2 valve closed
1/10/2011	9:34:30 PM	BCl3 valve closed
1/10/2011	9:34:30 PM	PH3 valve closed
1/10/2011	9:34:30 PM	SiCl4 pre valve closed
1/10/2011	9:34:30 PM	SiCl4 post valve closed
1/10/2011	9:34:30 PM	Bubbler valve closed
1/10/2011	9:34:30 PM	Main Vac valve opened
1/10/2011	9:34:30 PM	Bypass valve opened
1/10/2011	9:34:30 PM	Helium MFC set to  0.000000
1/10/2011	9:34:30 PM	H2 MFC set to  0.000000
1/10/2011	9:34:30 PM	BCl3 MFC set to  0.000000
1/10/2011	9:34:30 PM	PHl3 MFC set to  0.000000
1/10/2011	9:34:30 PM	SiCl4 MFC set to  0.000000
1/10/2011	9:34:30 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	9:34:30 PM	Tube furnace set to 0
1/10/2011	9:34:30 PM	Run finished at 9:34 PM
1/10/2011	9:34:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/10/2011	9:39:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/10/2011	9:39:16 PM	Recipe started at 9:39 PM
1/10/2011	9:39:16 PM	Helium valve closed
1/10/2011	9:39:16 PM	H2 valve closed
1/10/2011	9:39:16 PM	BCl3 valve closed
1/10/2011	9:39:16 PM	PH3 valve closed
1/10/2011	9:39:16 PM	SiCl4 pre valve closed
1/10/2011	9:39:16 PM	SiCl4 post valve closed
1/10/2011	9:39:16 PM	Main Vac valve closed
1/10/2011	9:39:16 PM	Bubbler valve closed
1/10/2011	9:39:16 PM	Bypass valve opened
1/10/2011	9:39:16 PM	Helium MFC set to  0.000000
1/10/2011	9:39:16 PM	H2 MFC set to  0.000000
1/10/2011	9:39:16 PM	BCl3 MFC set to  0.000000
1/10/2011	9:39:16 PM	PHl3 MFC set to  0.000000
1/10/2011	9:39:16 PM	SiCl4 MFC set to  0.000000
1/10/2011	9:39:16 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	9:39:16 PM	Tube furnace set to 0
1/10/2011	9:39:16 PM	Helium valve closed
1/10/2011	9:39:16 PM	H2 valve closed
1/10/2011	9:39:16 PM	BCl3 valve closed
1/10/2011	9:39:16 PM	PH3 valve closed
1/10/2011	9:39:16 PM	SiCl4 pre valve closed
1/10/2011	9:39:16 PM	SiCl4 post valve closed
1/10/2011	9:39:16 PM	Bubbler valve closed
1/10/2011	9:39:16 PM	Main Vac valve opened
1/10/2011	9:39:16 PM	Bypass valve opened
1/10/2011	9:39:16 PM	Helium MFC set to  0.000000
1/10/2011	9:39:16 PM	H2 MFC set to  0.000000
1/10/2011	9:39:16 PM	BCl3 MFC set to  0.000000
1/10/2011	9:39:16 PM	PHl3 MFC set to  0.000000
1/10/2011	9:39:16 PM	SiCl4 MFC set to  0.000000
1/10/2011	9:39:16 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	9:39:16 PM	Tube furnace set to 0
1/10/2011	9:40:16 PM	H2 valve closed
1/10/2011	9:40:16 PM	BCl3 valve closed
1/10/2011	9:40:16 PM	PH3 valve closed
1/10/2011	9:40:16 PM	SiCl4 pre valve closed
1/10/2011	9:40:16 PM	SiCl4 post valve closed
1/10/2011	9:40:16 PM	Bubbler valve closed
1/10/2011	9:40:16 PM	Helium valve opened
1/10/2011	9:40:16 PM	Main Vac valve opened
1/10/2011	9:40:16 PM	Bypass valve opened
1/10/2011	9:40:16 PM	Helium MFC set to  100.000000
1/10/2011	9:40:16 PM	H2 MFC set to  0.000000
1/10/2011	9:40:16 PM	BCl3 MFC set to  0.000000
1/10/2011	9:40:16 PM	PHl3 MFC set to  0.000000
1/10/2011	9:40:16 PM	SiCl4 MFC set to  0.000000
1/10/2011	9:40:16 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	9:40:17 PM	Tube furnace set to 0
1/10/2011	9:41:17 PM	Helium valve closed
1/10/2011	9:41:17 PM	H2 valve closed
1/10/2011	9:41:17 PM	BCl3 valve closed
1/10/2011	9:41:17 PM	PH3 valve closed
1/10/2011	9:41:17 PM	SiCl4 pre valve closed
1/10/2011	9:41:17 PM	SiCl4 post valve closed
1/10/2011	9:41:17 PM	Bubbler valve closed
1/10/2011	9:41:17 PM	Main Vac valve opened
1/10/2011	9:41:17 PM	Bypass valve opened
1/10/2011	9:41:17 PM	Helium MFC set to  0.000000
1/10/2011	9:41:17 PM	H2 MFC set to  0.000000
1/10/2011	9:41:17 PM	BCl3 MFC set to  0.000000
1/10/2011	9:41:17 PM	PHl3 MFC set to  0.000000
1/10/2011	9:41:17 PM	SiCl4 MFC set to  0.000000
1/10/2011	9:41:17 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	9:41:17 PM	Tube furnace set to 0
1/10/2011	9:42:17 PM	H2 valve closed
1/10/2011	9:42:17 PM	BCl3 valve closed
1/10/2011	9:42:17 PM	PH3 valve closed
1/10/2011	9:42:17 PM	SiCl4 pre valve closed
1/10/2011	9:42:17 PM	SiCl4 post valve closed
1/10/2011	9:42:17 PM	Bubbler valve closed
1/10/2011	9:42:17 PM	Helium valve opened
1/10/2011	9:42:17 PM	Main Vac valve opened
1/10/2011	9:42:17 PM	Bypass valve opened
1/10/2011	9:42:17 PM	Helium MFC set to  100.000000
1/10/2011	9:42:17 PM	H2 MFC set to  0.000000
1/10/2011	9:42:17 PM	BCl3 MFC set to  0.000000
1/10/2011	9:42:17 PM	PHl3 MFC set to  0.000000
1/10/2011	9:42:17 PM	SiCl4 MFC set to  0.000000
1/10/2011	9:42:17 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	9:42:17 PM	Tube furnace set to 0
1/10/2011	9:43:17 PM	Helium valve closed
1/10/2011	9:43:17 PM	H2 valve closed
1/10/2011	9:43:17 PM	BCl3 valve closed
1/10/2011	9:43:17 PM	PH3 valve closed
1/10/2011	9:43:17 PM	SiCl4 pre valve closed
1/10/2011	9:43:17 PM	SiCl4 post valve closed
1/10/2011	9:43:17 PM	Bubbler valve closed
1/10/2011	9:43:17 PM	Main Vac valve opened
1/10/2011	9:43:17 PM	Bypass valve opened
1/10/2011	9:43:17 PM	Helium MFC set to  0.000000
1/10/2011	9:43:17 PM	H2 MFC set to  0.000000
1/10/2011	9:43:17 PM	BCl3 MFC set to  0.000000
1/10/2011	9:43:17 PM	PHl3 MFC set to  0.000000
1/10/2011	9:43:17 PM	SiCl4 MFC set to  0.000000
1/10/2011	9:43:17 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	9:43:17 PM	Tube furnace set to 0
1/10/2011	9:44:17 PM	H2 valve closed
1/10/2011	9:44:17 PM	BCl3 valve closed
1/10/2011	9:44:17 PM	PH3 valve closed
1/10/2011	9:44:17 PM	SiCl4 pre valve closed
1/10/2011	9:44:17 PM	SiCl4 post valve closed
1/10/2011	9:44:17 PM	Bubbler valve closed
1/10/2011	9:44:17 PM	Helium valve opened
1/10/2011	9:44:17 PM	Main Vac valve opened
1/10/2011	9:44:17 PM	Bypass valve opened
1/10/2011	9:44:17 PM	Helium MFC set to  100.000000
1/10/2011	9:44:17 PM	H2 MFC set to  0.000000
1/10/2011	9:44:17 PM	BCl3 MFC set to  0.000000
1/10/2011	9:44:17 PM	PHl3 MFC set to  0.000000
1/10/2011	9:44:17 PM	SiCl4 MFC set to  0.000000
1/10/2011	9:44:17 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	9:44:17 PM	Tube furnace set to 0
1/10/2011	9:45:17 PM	Helium valve closed
1/10/2011	9:45:17 PM	H2 valve closed
1/10/2011	9:45:17 PM	BCl3 valve closed
1/10/2011	9:45:17 PM	PH3 valve closed
1/10/2011	9:45:17 PM	SiCl4 pre valve closed
1/10/2011	9:45:17 PM	SiCl4 post valve closed
1/10/2011	9:45:17 PM	Bubbler valve closed
1/10/2011	9:45:17 PM	Main Vac valve opened
1/10/2011	9:45:17 PM	Bypass valve opened
1/10/2011	9:45:17 PM	Helium MFC set to  0.000000
1/10/2011	9:45:17 PM	H2 MFC set to  0.000000
1/10/2011	9:45:17 PM	BCl3 MFC set to  0.000000
1/10/2011	9:45:17 PM	PHl3 MFC set to  0.000000
1/10/2011	9:45:17 PM	SiCl4 MFC set to  0.000000
1/10/2011	9:45:17 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	9:45:18 PM	Tube furnace set to 0
1/10/2011	9:46:18 PM	H2 valve closed
1/10/2011	9:46:18 PM	BCl3 valve closed
1/10/2011	9:46:18 PM	PH3 valve closed
1/10/2011	9:46:18 PM	SiCl4 pre valve closed
1/10/2011	9:46:18 PM	SiCl4 post valve closed
1/10/2011	9:46:18 PM	Bubbler valve closed
1/10/2011	9:46:18 PM	Helium valve opened
1/10/2011	9:46:18 PM	Main Vac valve opened
1/10/2011	9:46:18 PM	Bypass valve opened
1/10/2011	9:46:18 PM	Helium MFC set to  100.000000
1/10/2011	9:46:18 PM	H2 MFC set to  0.000000
1/10/2011	9:46:18 PM	BCl3 MFC set to  0.000000
1/10/2011	9:46:18 PM	PHl3 MFC set to  0.000000
1/10/2011	9:46:18 PM	SiCl4 MFC set to  0.000000
1/10/2011	9:46:18 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	9:46:18 PM	Tube furnace set to 0
1/10/2011	9:47:18 PM	Helium valve closed
1/10/2011	9:47:18 PM	H2 valve closed
1/10/2011	9:47:18 PM	BCl3 valve closed
1/10/2011	9:47:18 PM	PH3 valve closed
1/10/2011	9:47:18 PM	SiCl4 pre valve closed
1/10/2011	9:47:18 PM	SiCl4 post valve closed
1/10/2011	9:47:18 PM	Bubbler valve closed
1/10/2011	9:47:18 PM	Main Vac valve opened
1/10/2011	9:47:18 PM	Bypass valve opened
1/10/2011	9:47:18 PM	Helium MFC set to  0.000000
1/10/2011	9:47:18 PM	H2 MFC set to  0.000000
1/10/2011	9:47:18 PM	BCl3 MFC set to  0.000000
1/10/2011	9:47:18 PM	PHl3 MFC set to  0.000000
1/10/2011	9:47:18 PM	SiCl4 MFC set to  0.000000
1/10/2011	9:47:18 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	9:47:18 PM	Tube furnace set to 0
1/10/2011	9:48:18 PM	H2 valve closed
1/10/2011	9:48:18 PM	BCl3 valve closed
1/10/2011	9:48:18 PM	PH3 valve closed
1/10/2011	9:48:18 PM	SiCl4 pre valve closed
1/10/2011	9:48:18 PM	SiCl4 post valve closed
1/10/2011	9:48:18 PM	Bubbler valve closed
1/10/2011	9:48:18 PM	Helium valve opened
1/10/2011	9:48:18 PM	Main Vac valve opened
1/10/2011	9:48:18 PM	Bypass valve opened
1/10/2011	9:48:18 PM	Helium MFC set to  100.000000
1/10/2011	9:48:18 PM	H2 MFC set to  0.000000
1/10/2011	9:48:18 PM	BCl3 MFC set to  0.000000
1/10/2011	9:48:18 PM	PHl3 MFC set to  0.000000
1/10/2011	9:48:18 PM	SiCl4 MFC set to  0.000000
1/10/2011	9:48:18 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	9:48:18 PM	Tube furnace set to 0
1/10/2011	9:49:18 PM	Helium valve closed
1/10/2011	9:49:18 PM	H2 valve closed
1/10/2011	9:49:18 PM	BCl3 valve closed
1/10/2011	9:49:18 PM	PH3 valve closed
1/10/2011	9:49:18 PM	SiCl4 pre valve closed
1/10/2011	9:49:18 PM	SiCl4 post valve closed
1/10/2011	9:49:18 PM	Bubbler valve closed
1/10/2011	9:49:18 PM	Main Vac valve opened
1/10/2011	9:49:18 PM	Bypass valve opened
1/10/2011	9:49:18 PM	Helium MFC set to  0.000000
1/10/2011	9:49:18 PM	H2 MFC set to  0.000000
1/10/2011	9:49:18 PM	BCl3 MFC set to  0.000000
1/10/2011	9:49:18 PM	PHl3 MFC set to  0.000000
1/10/2011	9:49:18 PM	SiCl4 MFC set to  0.000000
1/10/2011	9:49:18 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	9:49:18 PM	Tube furnace set to 0
1/10/2011	9:50:18 PM	H2 valve closed
1/10/2011	9:50:18 PM	BCl3 valve closed
1/10/2011	9:50:18 PM	PH3 valve closed
1/10/2011	9:50:18 PM	SiCl4 pre valve closed
1/10/2011	9:50:18 PM	SiCl4 post valve closed
1/10/2011	9:50:18 PM	Bubbler valve closed
1/10/2011	9:50:18 PM	Helium valve opened
1/10/2011	9:50:18 PM	Main Vac valve opened
1/10/2011	9:50:18 PM	Bypass valve opened
1/10/2011	9:50:18 PM	Helium MFC set to  100.000000
1/10/2011	9:50:18 PM	H2 MFC set to  0.000000
1/10/2011	9:50:18 PM	BCl3 MFC set to  0.000000
1/10/2011	9:50:18 PM	PHl3 MFC set to  0.000000
1/10/2011	9:50:18 PM	SiCl4 MFC set to  0.000000
1/10/2011	9:50:18 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	9:50:19 PM	Tube furnace set to 0
1/10/2011	9:51:19 PM	Helium valve closed
1/10/2011	9:51:19 PM	H2 valve closed
1/10/2011	9:51:19 PM	BCl3 valve closed
1/10/2011	9:51:19 PM	PH3 valve closed
1/10/2011	9:51:19 PM	SiCl4 pre valve closed
1/10/2011	9:51:19 PM	SiCl4 post valve closed
1/10/2011	9:51:19 PM	Bubbler valve closed
1/10/2011	9:51:19 PM	Main Vac valve opened
1/10/2011	9:51:19 PM	Bypass valve opened
1/10/2011	9:51:19 PM	Helium MFC set to  0.000000
1/10/2011	9:51:19 PM	H2 MFC set to  0.000000
1/10/2011	9:51:19 PM	BCl3 MFC set to  0.000000
1/10/2011	9:51:19 PM	PHl3 MFC set to  0.000000
1/10/2011	9:51:19 PM	SiCl4 MFC set to  0.000000
1/10/2011	9:51:19 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	9:51:19 PM	Tube furnace set to 0
1/10/2011	9:52:19 PM	H2 valve closed
1/10/2011	9:52:19 PM	BCl3 valve closed
1/10/2011	9:52:19 PM	PH3 valve closed
1/10/2011	9:52:19 PM	SiCl4 pre valve closed
1/10/2011	9:52:19 PM	SiCl4 post valve closed
1/10/2011	9:52:19 PM	Bubbler valve closed
1/10/2011	9:52:19 PM	Helium valve opened
1/10/2011	9:52:19 PM	Main Vac valve opened
1/10/2011	9:52:19 PM	Bypass valve opened
1/10/2011	9:52:19 PM	Helium MFC set to  100.000000
1/10/2011	9:52:19 PM	H2 MFC set to  0.000000
1/10/2011	9:52:19 PM	BCl3 MFC set to  0.000000
1/10/2011	9:52:19 PM	PHl3 MFC set to  0.000000
1/10/2011	9:52:19 PM	SiCl4 MFC set to  0.000000
1/10/2011	9:52:19 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	9:52:19 PM	Tube furnace set to 0
1/10/2011	9:53:19 PM	Helium valve closed
1/10/2011	9:53:19 PM	H2 valve closed
1/10/2011	9:53:19 PM	BCl3 valve closed
1/10/2011	9:53:19 PM	PH3 valve closed
1/10/2011	9:53:19 PM	SiCl4 pre valve closed
1/10/2011	9:53:19 PM	SiCl4 post valve closed
1/10/2011	9:53:19 PM	Bubbler valve closed
1/10/2011	9:53:19 PM	Main Vac valve opened
1/10/2011	9:53:19 PM	Bypass valve opened
1/10/2011	9:53:19 PM	Helium MFC set to  0.000000
1/10/2011	9:53:19 PM	H2 MFC set to  0.000000
1/10/2011	9:53:19 PM	BCl3 MFC set to  0.000000
1/10/2011	9:53:19 PM	PHl3 MFC set to  0.000000
1/10/2011	9:53:19 PM	SiCl4 MFC set to  0.000000
1/10/2011	9:53:19 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	9:53:19 PM	Tube furnace set to 0
1/10/2011	9:54:19 PM	H2 valve closed
1/10/2011	9:54:19 PM	BCl3 valve closed
1/10/2011	9:54:19 PM	PH3 valve closed
1/10/2011	9:54:19 PM	SiCl4 pre valve closed
1/10/2011	9:54:19 PM	SiCl4 post valve closed
1/10/2011	9:54:19 PM	Bubbler valve closed
1/10/2011	9:54:19 PM	Helium valve opened
1/10/2011	9:54:19 PM	Main Vac valve opened
1/10/2011	9:54:19 PM	Bypass valve opened
1/10/2011	9:54:19 PM	Helium MFC set to  100.000000
1/10/2011	9:54:19 PM	H2 MFC set to  0.000000
1/10/2011	9:54:19 PM	BCl3 MFC set to  0.000000
1/10/2011	9:54:19 PM	PHl3 MFC set to  0.000000
1/10/2011	9:54:19 PM	SiCl4 MFC set to  0.000000
1/10/2011	9:54:19 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	9:54:19 PM	Tube furnace set to 0
1/10/2011	9:55:19 PM	Helium valve closed
1/10/2011	9:55:19 PM	H2 valve closed
1/10/2011	9:55:19 PM	BCl3 valve closed
1/10/2011	9:55:19 PM	PH3 valve closed
1/10/2011	9:55:19 PM	SiCl4 pre valve closed
1/10/2011	9:55:19 PM	SiCl4 post valve closed
1/10/2011	9:55:19 PM	Bubbler valve closed
1/10/2011	9:55:19 PM	Main Vac valve opened
1/10/2011	9:55:19 PM	Bypass valve opened
1/10/2011	9:55:19 PM	Helium MFC set to  0.000000
1/10/2011	9:55:19 PM	H2 MFC set to  0.000000
1/10/2011	9:55:19 PM	BCl3 MFC set to  0.000000
1/10/2011	9:55:19 PM	PHl3 MFC set to  0.000000
1/10/2011	9:55:19 PM	SiCl4 MFC set to  0.000000
1/10/2011	9:55:19 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	9:55:20 PM	Tube furnace set to 0
1/10/2011	9:56:20 PM	H2 valve closed
1/10/2011	9:56:20 PM	BCl3 valve closed
1/10/2011	9:56:20 PM	PH3 valve closed
1/10/2011	9:56:20 PM	SiCl4 pre valve closed
1/10/2011	9:56:20 PM	SiCl4 post valve closed
1/10/2011	9:56:20 PM	Bubbler valve closed
1/10/2011	9:56:20 PM	Helium valve opened
1/10/2011	9:56:20 PM	Main Vac valve opened
1/10/2011	9:56:20 PM	Bypass valve opened
1/10/2011	9:56:20 PM	Helium MFC set to  100.000000
1/10/2011	9:56:20 PM	H2 MFC set to  0.000000
1/10/2011	9:56:20 PM	BCl3 MFC set to  0.000000
1/10/2011	9:56:20 PM	PHl3 MFC set to  0.000000
1/10/2011	9:56:20 PM	SiCl4 MFC set to  0.000000
1/10/2011	9:56:20 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	9:56:20 PM	Tube furnace set to 0
1/10/2011	9:57:20 PM	Helium valve closed
1/10/2011	9:57:20 PM	H2 valve closed
1/10/2011	9:57:20 PM	BCl3 valve closed
1/10/2011	9:57:20 PM	PH3 valve closed
1/10/2011	9:57:20 PM	SiCl4 pre valve closed
1/10/2011	9:57:20 PM	SiCl4 post valve closed
1/10/2011	9:57:20 PM	Bubbler valve closed
1/10/2011	9:57:20 PM	Main Vac valve opened
1/10/2011	9:57:20 PM	Bypass valve opened
1/10/2011	9:57:20 PM	Helium MFC set to  0.000000
1/10/2011	9:57:20 PM	H2 MFC set to  0.000000
1/10/2011	9:57:20 PM	BCl3 MFC set to  0.000000
1/10/2011	9:57:20 PM	PHl3 MFC set to  0.000000
1/10/2011	9:57:20 PM	SiCl4 MFC set to  0.000000
1/10/2011	9:57:20 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	9:57:20 PM	Tube furnace set to 0
1/10/2011	9:58:20 PM	H2 valve closed
1/10/2011	9:58:20 PM	BCl3 valve closed
1/10/2011	9:58:20 PM	PH3 valve closed
1/10/2011	9:58:20 PM	SiCl4 pre valve closed
1/10/2011	9:58:20 PM	SiCl4 post valve closed
1/10/2011	9:58:20 PM	Bubbler valve closed
1/10/2011	9:58:20 PM	Helium valve opened
1/10/2011	9:58:20 PM	Main Vac valve opened
1/10/2011	9:58:20 PM	Bypass valve opened
1/10/2011	9:58:20 PM	Helium MFC set to  100.000000
1/10/2011	9:58:20 PM	H2 MFC set to  0.000000
1/10/2011	9:58:20 PM	BCl3 MFC set to  0.000000
1/10/2011	9:58:20 PM	PHl3 MFC set to  0.000000
1/10/2011	9:58:20 PM	SiCl4 MFC set to  0.000000
1/10/2011	9:58:20 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	9:58:20 PM	Tube furnace set to 0
1/10/2011	9:59:20 PM	Helium valve closed
1/10/2011	9:59:20 PM	H2 valve closed
1/10/2011	9:59:20 PM	BCl3 valve closed
1/10/2011	9:59:20 PM	PH3 valve closed
1/10/2011	9:59:20 PM	SiCl4 pre valve closed
1/10/2011	9:59:20 PM	SiCl4 post valve closed
1/10/2011	9:59:20 PM	Bubbler valve closed
1/10/2011	9:59:20 PM	Main Vac valve opened
1/10/2011	9:59:20 PM	Bypass valve opened
1/10/2011	9:59:20 PM	Helium MFC set to  0.000000
1/10/2011	9:59:20 PM	H2 MFC set to  0.000000
1/10/2011	9:59:20 PM	BCl3 MFC set to  0.000000
1/10/2011	9:59:20 PM	PHl3 MFC set to  0.000000
1/10/2011	9:59:20 PM	SiCl4 MFC set to  0.000000
1/10/2011	9:59:20 PM	Bypass solenoid MFC set to  0.000000
1/10/2011	9:59:20 PM	Tube furnace set to 0
1/10/2011	9:59:21 PM	Run finished at 9:59 PM
1/10/2011	9:59:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
